Apparatus for growing silicon epitaxial layer

Claim 1

An apparatus for growing a silicon epitaxial layer on a main surface of a silicon substrate wafer, comprising: a horizontal chamber; a susceptor mounted within the chamber, the top surface of the susceptor holding the silicon substrate wafer in a horizontal position so that said main surface of the silicon substrate wafer is facing upward; means for rotating said susceptor; an exhaust gas outlet; a series of injectors arranged; transversely to the horizontal axis of the chamber, the injectors comprising a central injector passing a flow of a reactive gas past a central part of the chamber and peripheral injectors passing flows of the reactive gas past a peripheral part of the chamber, the reactive gas consisting of a silicon source, a dopant and hydrogen; a first gas feeder system connected to the central injector and feeding the reactive gas to the central injector; a second gas feeder system connected to the peripheral injectors and feeding the reactive gas to said peripheral injectors; a first controller provided in the first gas feeder system and controlling the mass flows of at least one of the silicon source and the dopant fed by the central injector; and a second controller provided in the second gas feeder system and controlling the mass flows of at least one of the silicon source and the dopant fed by the peripheral injectors independently of the first controller. injector independently of the first controller.

Claim 2

An apparatus for growing a silicon epitaxial layer on a main surface of a silicon substrate wafer, comprising: a horizontal chamber; a susceptor mounted within the chamber, the top surface of the susceptor holding the silicon substrate wafer in a horizontal position so that said main surface of the silicon substrate wafer is facing upward; means for rotating said susceptor; an exhaust gas outlet; a series of injectors arranged; transversely to the horizontal axis of the chamber, the injectors comprising a central injector passing a flow of a reactive gas past a central part of the chamber and peripheral injectors passing flows of the reactive gas past a peripheral part of the chamber, the reactive gas consisting of a silicon source, a dopant and hydrogen; a first gas feeder system connected to the central injector and feeding the reactive gas to the central injector; a second gas feeder system connected to the peripheral injectors and feeding the reactive gas to said peripheral injectors; a first controller provided in the first gas feeder system and controlling the mass flows of at least one of the silicon source and the dopant fed by the central injector; and a second controller provided in the second gas feeder system and controlling the mass flows of at least one of the silicon source and the dopant fed by the peripheral injectors independently of the first controller. injector independently of the first controller.

Claim 3

An apparatus for growing a silicon epitaxial layer on a main surface of a silicon substrate wafer, comprising: a horizontal chamber; a susceptor mounted within the chamber, the top surface of the susceptor holding the silicon substrate wafer in a horizontal position so that said main surface of the silicon substrate wafer is facing upward; means for rotating said susceptor; an exhaust gas outlet; a series of injectors arranged transversely to the horizontal axis of the chamber, the injectors comprising a central injector passing a central flow of a reactive gas past a central part of the chamber and peripheral injectors passing peripheral flows of the reactive gas past a peripheral part of the chamber, the reactive gas consisting of a silicon source, a dopant and hydrogen; a first gas feeder system connected to said central injector and feeding the reactive gas to the central injector; a second gas feeder system connected to the peripheral injectors and feeding the reactive gas to said peripheral injectors; a first controller provided in the first gas feeder system and controlling the mass flows of at least one of the silicon source, the dopant and hydrogen fed by the central injector; and a second controller provided in the second gas feeder system and controlling the mass flows of at least one of the silicon source, the dopant and hydrogen fed by the peripheral injector independently of said first controller.

Claim 4

An apparatus for growing a silicon epitaxial layer on a main surface of a silicon substrate wafer, comprising: a horizontal chamber; a susceptor mounted within the chamber, the top surface of the susceptor holding the silicon substrate wafer in a horizontal position so that said main surface of the silicon substrate wafer is facing upward; means for rotating said susceptor; an exhaust gas outlet; a series of injectors arranged transversely to the horizontal axis of the chamber, the injectors comprising a central injector passing a central flow of a reactive gas past a central part of the chamber and peripheral injectors passing peripheral flows of the reactive gas past a peripheral part of the chamber, the reactive gas consisting of a silicon source, a dopant and hydrogen; a first gas feeder system connected to said central injector and feeding the reactive gas to the central injector; a second gas feeder system connected to the peripheral injectors and feeding the reactive gas to said peripheral injectors; a first controller provided in the first gas feeder system and controlling the mass flows of at least one of the silicon source, the dopant and hydrogen fed by the central injector; and a second controller provided in the second gas feeder system and controlling the mass flows of at least one of the silicon source, the dopant and hydrogen fed by the peripheral injector independently of said first controller.

Claim 5

An apparatus for growing a silicon epitaxial layer on a main surface of a silicon substrate wafer, the apparatus comprising: a horizontal chamber having a cooled wall; a rotatable susceptor mounted within the chamber and having a top surface for holding a silicon substrate wafer; a series of injectors arranged transversely to a horizontal axis of the chamber and configured to concurrently feed parallel flows of a reactive gas into the chamber; a heater configured to provide a silicon wafer on said top surface with a temperature distribution; and a controller for adjusting individual mass flow rates of reactive gas in each of said injectors, and controlling the mass flow rate of reactive gas from a center injector of said series of injectors to be different from the mass flow rate of reactive gas from a peripheral injector of said series of injectors.

Claim 6

An apparatus for growing a silicon epitaxial layer on a main surface of a silicon substrate wafer, the apparatus comprising: a horizontal chamber having a cooled wall; a rotatable susceptor mounted within the chamber and having a top surface for holding a silicon substrate wafer; a series of injectors arranged transversely to a horizontal axis of the chamber and configured to concurrently feed parallel flows of a reactive gas into the chamber; a heater configured to provide a silicon wafer on said top surface with a temperature distribution; and a controller for adjusting individual mass flow rates of reactive gas in each of said injectors, and controlling the mass flow rate of reactive gas from a center injector of said series of injectors to be different from the mass flow rate of reactive gas from a peripheral injector of said series of injectors.