US5485294A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Process for producing MIM elements by electrolytic polymerization
Assignee: Seiko Epson Corp
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Filing: 1991-10-03
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Granted: 1996-01-16
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Expires: 2011-10-03
Abstract
Abstract An active element such as a MIM element includes a first electrically conductive layer, a nonlinearly conductive layer having a low dielectric constant disposed on the first conductive layer and a second electrically conductive layer disposed on the nonlinearly conductive layer. The nonlinearly conductive layer can be deposited on the first conductive layer by electrolytic polymerization. A matrix of liquid crystal picture element electrodes driven by active elements in accordance with the invention can be formed with as little as two or three photolythographic steps.
Inventors
- 👤 Jun Sugiyama
- 👤 Tadashi Ota
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 22:40
CPC Classifications
G; G02; G02F; G02F1/00; G02F1/01; G02F1/13; G02F1/133; G02F1/136; G02F1/1362; G02F1/1365; H; H10; H10N; H10N70/00; Y; Y10; Y10S; Y10S438/00; Y10S438/957
Claims Analysis
Total Claims: 16
Claim 1
Independent Claim
113 words
A method of forming a two-terminal conductor--nonlinear conductor--conductor active element for an electrical device, on a substrate, comprising the steps of: selectively disposing a first layer of electrically conductive material on a substrate; immersing the first layer in an electrolytic solution containing electrolytically polymerizable material; applying voltage to the first layer to selectively deposit a layer of non-linearly conductive material, including organic material, on the first layer, by electrolytic polymerization, to a thickness of about 15 nm to about 50 nm; selectively disposing a second electrically conductive layer on at least a portion of the non-linearly conductive layer at a position opposed to the first conductive layer with the nonlinearly conductive layer therebetween.
Claim 2
Independent Claim
113 words
A method of forming a two-terminal conductor--nonlinear conductor--conductor active element for an electrical device, on a substrate, comprising the steps of: selectively disposing a first layer of electrically conductive material on a substrate; immersing the first layer in an electrolytic solution containing electrolytically polymerizable material; applying voltage to the first layer to selectively deposit a layer of non-linearly conductive material, including organic material, on the first layer, by electrolytic polymerization, to a thickness of about 15 nm to about 50 nm; selectively disposing a second electrically conductive layer on at least a portion of the non-linearly conductive layer at a position opposed to the first conductive layer with the nonlinearly conductive layer therebetween.
Claim 3
Dependent Claim
12 words
The method of claim 1, wherein the active element is a MIM.
Claim 4
Dependent Claim
30 words
The method of claim 1, wherein the nonlinearly conductive layer has not more than 1/5 the dielectric constant of a tantalum pentoxide layer produced by anodization of a tantalum strip.
Claim 5
Independent Claim
112 words
A method of forming a two terminal active matrix substrate for an electrooptical device, comprising: selectively disposing a first layer of electrically conductive material on a substrate; selectively disposing a plurality of picture element electrodes in a matrix of columns and rows on the substrate; electrochemically selectively depositing a layer of nonlinearly electrically conductive material including an organic material on the first layer; and selectively disposing a second layer of electrically conductive material on at least a portion of the nonlinearly electrically conductive material at a position opposed to the first layer with the nonlinearly electrically conductive material therebetween, and the second conductive layer being electrically coupled to the picture element electrodes.
Claim 6
Independent Claim
112 words
A method of forming a two terminal active matrix substrate for an electrooptical device, comprising: selectively disposing a first layer of electrically conductive material on a substrate; selectively disposing a plurality of picture element electrodes in a matrix of columns and rows on the substrate; electrochemically selectively depositing a layer of nonlinearly electrically conductive material including an organic material on the first layer; and selectively disposing a second layer of electrically conductive material on at least a portion of the nonlinearly electrically conductive material at a position opposed to the first layer with the nonlinearly electrically conductive material therebetween, and the second conductive layer being electrically coupled to the picture element electrodes.
Claim 7
Dependent Claim
50 words
The method of preparing an active matrix substrate of claim 4, wherein the second electrically conductive layer is disposed in the form of a strip adjacent to a column or row of picture element electrodes and the second electrically conductive layer is electrically connected directly to each picture element electrode.
Claim 8
Dependent Claim
12 words
The method of claim 4, wherein the active element is a MIM.
Claim 9
Dependent Claim
81 words
The method of claim 4, wherein the first layer is formed as a series of conductive strips adjacent columns of the picture element electrodes; the strips are coupled to an external voltage source; the nonlinearly conductive material is formed on the strips; and the second conductive layer is in the form of a lead extending from the picture element electrodes to the nonlinearly conductive layer and a portion of the lead opposes the conductive strips with the nonlinearly conductive material therebetween.
Claim 10
Dependent Claim
81 words
The method of claim 6, wherein the first layer is formed as a series of conductive strips adjacent columns of the picture element electrodes; the strips are coupled to an external voltage source; the nonlinearly conductive material is formed on the strips; and the second conductive layer is in the form of a lead extending from the picture element electrodes to the nonlinearly conductive layer and a portion of the lead opposes the conductive strips with the nonlinearly conductive material therebetween.
Claim 11
Independent Claim
150 words
A method of forming an active matrix substrate, comprising: disposing a layer of a first conductive material on a substrate; disposing a layer of a second conductive material on the layer of first conductive material; selectively removing portions of the first and second layers from the substrate to form a matrix of two layer picture element electrodes adjacent two layer conductive strips, the two layers being the second material on the first material; immersing the substrate in an electrolyte solution and selectively depositing a layer of a nonlinearly conductive material on the conductive strips by electrolysis from the electrolyte solution; selectively disposing a top layer of conductive material as a conductive lead from the layer of nonlinearly conductive material to the picture electrode to yield a two-terminal device in which current can flow through the nonlinearly conductive material regardless of the polarity of voltage applied across the nonlinearly conductive material.
Claim 12
Independent Claim
150 words
A method of forming an active matrix substrate, comprising: disposing a layer of a first conductive material on a substrate; disposing a layer of a second conductive material on the layer of first conductive material; selectively removing portions of the first and second layers from the substrate to form a matrix of two layer picture element electrodes adjacent two layer conductive strips, the two layers being the second material on the first material; immersing the substrate in an electrolyte solution and selectively depositing a layer of a nonlinearly conductive material on the conductive strips by electrolysis from the electrolyte solution; selectively disposing a top layer of conductive material as a conductive lead from the layer of nonlinearly conductive material to the picture electrode to yield a two-terminal device in which current can flow through the nonlinearly conductive material regardless of the polarity of voltage applied across the nonlinearly conductive material.
Claim 13
Dependent Claim
29 words
The method of forming an active element of claim 9, wherein the nonlinearly conductive layer is formed to a thickness of about between about 20 nm and 50 nm.
Claim 14
Dependent Claim
43 words
The method of forming an active element of claim 9, wherein the first conductive material is ITO and the second conductive material of the picture electrode is removed from substantially all of the ITO layer, except for a portion under the conductive lead.
Claim 15
Dependent Claim
20 words
The method of forming an active element of claim 9, wherein the nonlinearly conductive layer is deposited by electrolytic polymerization.
Claim 16
Dependent Claim
17 words
The method of forming an active element of claim 12, wherein the active element is a MIM.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-01-15 | 1999-07-17 | 2000-01-16 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-01-15 | 2003-07-17 | 2004-01-16 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-01-15 | 2007-07-17 | 2008-01-16 | $7700.00 | Window Closed / Lapsed |