Patent US5484314A successfully refreshed from Google Patents.
US5484314A
Expired / Lapsed
US
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Micro-pillar fabrication utilizing a stereolithographic printing process
Assignee: Micron Technology Inc
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Filing: 1994-10-13
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Granted: 1996-01-16
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Expires: 2014-10-13
Abstract
Abstract Another aspect of the present invention comprises a method for fabricating columnar supports used for an evacuated display, in which an electrode plate is covered with a layer of material having a depth. The material is used to form the columnar supports, and the depth of the layer represents the height of the columnar supports. The material is selectively irradiated with light energy in a pattern causing the material to harden, thereby forming the columnar supports.
Inventors
- 👤 Warren M. Farnworth
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 12:23
CPC Classifications
H; H01; H01J; H01J9/00; H01J9/24; H01J9/241; H01J9/242; B; B33; B33Y; B33Y10/00; B33Y30/00; B33Y80/00; H01J2329/00; H01J2329/86; H01J2329/8625
Claims Analysis
Total Claims: 23
Claim 1
Independent Claim
71 words
A method for fabricating columnar supports used for an evacuated display, said method comprising the following steps: covering an electrode plate with a layer of material having a depth, said material for forming said columnar supports, said depth of said layer representing the height of said columnar supports; and selectively irradiating said material with light energy in a pattern causing said material to harden, said hardened material comprising said columnar supports.
Claim 2
Independent Claim
71 words
A method for fabricating columnar supports used for an evacuated display, said method comprising the following steps: covering an electrode plate with a layer of material having a depth, said material for forming said columnar supports, said depth of said layer representing the height of said columnar supports; and selectively irradiating said material with light energy in a pattern causing said material to harden, said hardened material comprising said columnar supports.
Claim 3
Dependent Claim
65 words
The method for fabricating columnar supports used for an evacuated display, according to claim 1, further comprising the steps of: covering said electrode plate and said hardened material with another layer of said material; and selectively irradiating said another layer of material with light energy in substantially the same said pattern causing said irradiated material to harden, thereby increasing the height of said columnar supports.
Claim 4
Dependent Claim
28 words
The method for fabricating columnar supports used for an evacuated display, according to claim 2, wherein said process is repeated until said columnar supports attain a desired height.
Claim 5
Dependent Claim
25 words
The method for fabricating columnar supports used for an evacuated display, according to claim 3, wherein said pattern corresponds to locations of said columnar supports.
Claim 6
Dependent Claim
29 words
The method for fabricating columnar supports used for an evacuated display, according to claim 4, wherein said material comprises a dielectric, said dielectric being sensitive to said light energy.
Claim 7
Dependent Claim
26 words
The method for fabricating columnar supports used for an evacuated display, according to claim 5, wherein said light energy has a wavelength of approximately 350 nm.
Claim 8
Independent Claim
69 words
A method for fabricating micro-pillars useful in evacuated displays, said method comprising the following steps of: disposing a display plate in a bath, said baseplate having a top surface, said bath comprising pillar material, said pillar material covering said top surface of said display plate; and pulsing radiant energy toward said top surface of said display plate in a pattern, said radiant energy hardening said pillar material impacted thereby.
Claim 9
Independent Claim
69 words
A method for fabricating micro-pillars useful in evacuated displays, said method comprising the following steps of: disposing a display plate in a bath, said baseplate having a top surface, said bath comprising pillar material, said pillar material covering said top surface of said display plate; and pulsing radiant energy toward said top surface of said display plate in a pattern, said radiant energy hardening said pillar material impacted thereby.
Claim 10
Dependent Claim
63 words
The method for fabricating micro-pillars useful in evacuated displays, according to claim 7, further comprising the steps of: lowering said baseplate deeper into said bath such that said pillar material covers said hardened pillar material; and pulsing said radiant energy toward said top surface of said display plate in substantially the same said pattern, said radiant energy hardening said pillar material impacted thereby.
Claim 11
Dependent Claim
30 words
The method for fabricating micro-pillars useful in evacuated displays, according to claim 8, wherein said pillar material comprises at least one of glass beads, a liquid plastic, and a resin.
Claim 12
Dependent Claim
27 words
The method for fabricating micro-pillars useful in evacuated displays, according to claim 9, wherein said radiant energy comprises at least one of ultra-violet light and laser light.
Claim 13
Dependent Claim
21 words
The method for fabricating micro-pillars useful in evacuated displays, according to claim 10, wherein said pattern is programmed into said laser.
Claim 14
Dependent Claim
27 words
The method for fabricating micro-pillars useful in evacuated displays, according to claim 11, wherein said micropillar has a diameter substantially in the range of 20 μm-30 μm.
Claim 15
Dependent Claim
28 words
The method for fabricating micro-pillars useful in evacuated displays, according to claim 12, wherein said display plate comprises at least one of an anode screen and a baseplate.
Claim 16
Independent Claim
67 words
A method of forming inter-electrode spacers useful for flat panel display devices, said method comprising the following steps of: placing a display electrode on a pedestal, said pedestal being disposed in a vat of glass beads, a layer of glass beads blankets said display electrode; and directing laser energy toward said display electrode, said glass beads adhering to said baseplate as a result of said laser energy.
Claim 17
Independent Claim
67 words
A method of forming inter-electrode spacers useful for flat panel display devices, said method comprising the following steps of: placing a display electrode on a pedestal, said pedestal being disposed in a vat of glass beads, a layer of glass beads blankets said display electrode; and directing laser energy toward said display electrode, said glass beads adhering to said baseplate as a result of said laser energy.
Claim 18
Dependent Claim
38 words
The method of forming inter-electrode spacers useful for flat panel display devices, according to claim 14, wherein said laser energy is directed toward said display electrode in a pattern, said patterning representing locations where said spacers are formed.
Claim 19
Dependent Claim
35 words
The method of forming inter-electrode spacers useful for flat panel display devices, according to claim 15, wherein a squeegee is used to disperse said glass beads in a substantial uniform layer across said display electrode.
Claim 20
Dependent Claim
30 words
The method of forming inter-electrode spacers useful for flat panel display devices, according to claim 16, wherein said pedestal is lowered deeper into said vat and said process is repeated.
Claim 21
Dependent Claim
30 words
The method of forming inter-electrode spacers useful for flat panel display devices, according to claim 17, wherein said glass beads have a diameter in the approximate range of 20-35 μm.
Claim 22
Dependent Claim
31 words
The method of forming inter-electrode spacers useful for flat panel display devices, according to claim 18, wherein said display electrode comprises at least one of an anode screen and a baseplate.
Claim 23
Dependent Claim
24 words
The method of forming inter-electrode spacers useful for flat panel display devices, according to claim 19, wherein said display is a field emission display.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-01-15 | 1999-07-17 | 2000-01-16 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-01-15 | 2003-07-17 | 2004-01-16 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-01-15 | 2007-07-17 | 2008-01-16 | $7700.00 | Window Closed / Lapsed |