Patent US5481396A successfully refreshed from Google Patents.
US5481396A
Expired / Lapsed
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Thin film actuated mirror array
Assignee: Maple Vision Technologies Inc
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Filing: 1994-02-23
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Granted: 1996-01-02
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Expires: 2014-02-23
Abstract
Abstract A thin film actuated mirror for an actuated mirror array includes a pedestal and at least piezoelectric structure cantilevered from the pedestal. The piezoelectric structure includes a layer of piezoelectric material having two opposing surfaces. Each of two metal electrodes are mounted on a respective one of the opposing surfaces of the piezoelectric material layer. An electrical signal is applied across the piezoelectric material, between the electrodes, causing deformation of the piezoelectric material. The thin film actuated mirror further includes a mirror surface interconnected to the piezoelectric material layer such that the mirror surface deforms in response to the deformation of the piezoelectric material layer.
Inventors
- 👤 Jeong B. Ji
- 👤 Gregory Um
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 16:58
CPC Classifications
G; G02; G02B; G02B26/00; G02B26/08; G02B26/0816; G02B26/0833; G02B26/0858; B; B81; B81B; B81B3/00; B81B3/0035; B81B3/004; B81B2201/00; B81B2201/04; B81B2201/042
Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
100 words
A thin film actuated mirror comprising: a pedestal; at least one piezoelectric structure cantilevered from said pedestal, said piezoelectric structure further comprising a piezoelectric material layer having two opposing surfaces, and two metal electrodes, each of said electrodes being mounted on a respective one of said opposing surfaces of said piezoelectric material, wherein an electrical signal applied across said piezoelectric material between said electrodes causes deformation of said piezoelectric material layer; and a mirror surface, said mirror surface being interconnected to said piezoelectric structure such that said mirror surface deforms in response to the deformation of said piezoelectric material layer.
Claim 2
Dependent Claim
100 words
A thin film actuated mirror comprising: a pedestal; at least one piezoelectric structure cantilevered from said pedestal, said piezoelectric structure further comprising a piezoelectric material layer having two opposing surfaces, and two metal electrodes, each of said electrodes being mounted on a respective one of said opposing surfaces of said piezoelectric material, wherein an electrical signal applied across said piezoelectric material between said electrodes causes deformation of said piezoelectric material layer; and a mirror surface, said mirror surface being interconnected to said piezoelectric structure such that said mirror surface deforms in response to the deformation of said piezoelectric material layer.
Claim 3
Dependent Claim
23 words
A thin film actuated mirror in accordance with claim 1 wherein said mirror surface is mounted directly to one of said metal electrodes.
Claim 4
Dependent Claim
28 words
A thin film actuated mirror in accordance with claim 1 further comprising: a spacer member, said spacer member being mounted intermediate said piezoelectric structure and said mirror surface.
Claim 5
Dependent Claim
51 words
A thin film actuated mirror in accordance with claim 3 wherein said piezoelectric structure includes a proximal end and a distal end, said piezoelectric structure being mounted to the pedestal at the proximal end of said piezoelectric structure, and said spacer being mounted to the distal end of said piezoelectric structure.
Claim 6
Dependent Claim
18 words
A thin film actuated mirror in accordance with claim 1 wherein said piezoelectric structure is a bimorph structure.
Claim 7
Dependent Claim
48 words
A thin film actuated mirror in accordance with claim 1 wherein said piezoelectric structure includes a proximal end and a distal end, said pedestal being mounted to the proximal end of said piezoelectric structure and said mirror surface being interconnected to the distal end of said piezoelectric structure.
Claim 8
Dependent Claim
21 words
A thin film actuated mirror in accordance with claim 1 wherein said piezoelectric material layer is comprised of an electrostrictive material.
Claim 9
Dependent Claim
21 words
A thin film actuated mirror in accordance with claim 1 wherein said piezoelectric material layer is comprised of a magnetostrictive material.
Claim 10
Dependent Claim
21 words
A thin film actuated mirror in accordance with claim 1 wherein said piezoelectric material layer is comprised of a motion-inducing material.
Claim 11
Dependent Claim
46 words
A thin film actuated mirror in accordance with claim 1 wherein said piezoelectric structure includes a first and a second elongated side, a proximal end and a distal end, and further wherein said mirror surface is directly connected to said distal end of said piezoelectric structure.
Claim 12
Dependent Claim
27 words
A thin film actuated mirror in accordance with claim 10 wherein said piezoelectric structure is mounted to said pedestal at the proximal end of said piezoelectric structure.
Claim 13
Dependent Claim
31 words
A thin film actuated mirror in accordance with claim 11 wherein said first and second elongated sides of said piezoelectric structure are separated from the mirror surface by a narrow opening.
Claim 14
Dependent Claim
39 words
A thin film actuated mirror in accordance with claim 1 wherein said piezoelectric structure includes a proximal end and a distal end, and further wherein said mirror surface is directly connected to said proximal end of said piezoelectric structure.
Claim 15
Dependent Claim
27 words
A thin film actuated mirror in accordance with claim 13 wherein said piezoelectric structure is mounted to said pedestal at the distal end of said piezoelectric structure.
Claim 16
Dependent Claim
70 words
A thin film actuated mirror in accordance with claim 1 wherein said piezoelectric structure includes a first piezoelectric structure and a second piezoelectric structure and said mirror surface includes a first side and a second opposing side, and further wherein said first piezoelectric structure is aligned with the first side of the mirror surface, and said second piezoelectric structure is aligned with the second opposing side of the mirror surface.
Claim 17
Dependent Claim
41 words
A thin film actuated mirror in accordance with claim 15 wherein each of said piezoelectric structure includes a proximal end and a distal end, and further wherein said mirror surface is directly connected to said proximal end of said piezoelectric structure.
Claim 18
Dependent Claim
27 words
A thin film actuated mirror in accordance with claim 15 wherein said piezoelectric structure is mounted to said pedestal at the distal end of said piezoelectric structure.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-01-01 | 1999-07-03 | 2000-01-02 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-01-01 | 2003-07-03 | 2004-01-02 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-01-01 | 2007-07-03 | 2008-01-02 | $7700.00 | Window Closed / Lapsed |