US3614677A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Electromechanical monolithic resonator
Assignee: International Business Machines Corp
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Filing: 1966-04-29
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Granted: 1971-10-19
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Expires: 1986-04-29
Abstract
Abstract A semiconductor substrate is supported so as to allow mechanical vibration of the substrate. This semiconductor substrate is of a size and has such electrical and mechanical characteristics as to be capable of sustaining mechanical stress and producing a useable resonance frequency. An excitation element is formed in the substrate at a suitable location to cause mechanical strain in the semiconductor substrate by a thermal expansion mechanism. The further addition of a device formed in the semiconductor substrate for converting mechanical stresses in the semiconductor substrate into electrical phenomena makes the semiconductor device of even greater value.
Inventors
- 👤 Raymond J Wilfinger
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-06 09:51
CPC Classifications
H; H03; H03H; H03H9/00; H03H9/46; H03H9/24; H10; H10D; H10D99/00; H10N; H10N39/00
Claims Analysis
Total Claims: 23
Claim 1
Independent Claim
27 words
A device according to claim 1 in which the heating means comprises a semiconductor means attached to the member and electrical means for driving said semiconductor means.
Claim 2
Dependent Claim
15 words
A device according to claim 1 including means for abstracting an output from said member.
Claim 3
Dependent Claim
21 words
A device according to claim 3 in which the output-abstracting means comprises means for sensing changes in strain in the member.
Claim 4
Dependent Claim
60 words
A device according to claim 4 in which the member comprises an elongated member of semiconductive material, the heating means comprises a semiconductor means attached to the elongated member, and the output-abstracting means comprises a piezoresistive semiconductor diffused into said semiconductive material and provided with connections between which the resistance varies as a function of the strain in said material.
Claim 5
Dependent Claim
60 words
A device according to claim 1 in which the member comprises a reed of semiconductive material and nonresonant means for supporting said reed, and in which the heating means comprises a resistive element heat coupled to said reed and electrical means for driving resistive element to heat said reed, said device including means for coupling an output from said reed.
Claim 6
Dependent Claim
54 words
A device according to claim 6 in which the resistive element comprises a first semiconductor resistive element contacting the material of the reed and the output-coupling means comprises a second piezo resistive element contacting the material of said reed, both in orientations to undergo changes of resistivity as the strain of said reed changes.
Claim 7
Dependent Claim
21 words
A device according to claim 1 wherein said member comprises a substrate and said substrate is excited in a flexual mold.
Claim 8
Dependent Claim
15 words
A device according to claim 8 wherein said substrate is excited in a torsional mold.
Claim 9
Dependent Claim
15 words
A device according to claim 8 wherein said substrate is excited in an acoustical mode.
Claim 10
Dependent Claim
28 words
A device according to claim 1 wherein said member comprises a substrate and said means for heating comprises an electrical resistance element at the surface of said substrate.
Claim 11
Dependent Claim
28 words
A device according to claim 1 wherein said member comprises a substRate and said means for heating includes an electrical resistance established through the body of said substrate.
Claim 12
Dependent Claim
27 words
The device according to claim 1 wherein said member comprises a substrate and said means for heating includes a forward bias PN junction device in said substrate.
Claim 13
Dependent Claim
31 words
A device according to claim 1 wherein said member comprises a substrate and said means for a heating is a transistor device in said substrate operated to cause collector power dissipation.
Claim 14
Dependent Claim
14 words
A device according to claim 1 further including at least one piezoresistor sensor element.
Claim 15
Dependent Claim
45 words
A device according to claim 1 wherein said member comprises a substrate and further including more than one piezoresistor sensor element positioned in said substrate geometrically so as to cancel out thermal and electrical effect between said piezoresistors and the means for heating said substrate.
Claim 16
Dependent Claim
16 words
A device according to claim 1 further including at least one piezo PN junction sensor element.
Claim 17
Dependent Claim
18 words
A device according to claim 1 wherein said member comprises a substrate composed of a homopolar semiconductor material.
Claim 18
Dependent Claim
29 words
A device according to claim 18 wherein said means for heating and said sensor element are located on the periphery of said substrate substantially on a 45* spiral line.
Claim 19
Dependent Claim
117 words
A filter comprising an elongated member capable of flexing in response to a change in temperature and having a resonant frequency of flexing vibration, means for heating said member to change the temperature and produce flexure thereof, said heating means including input terminals to which may be applied a signal having a plurality of frequencies including said resonant frequency and including means coupled between said input terminals and said elongated member for converting said signal to heat, said elongated member and said heating means being mutually adapted to promote flexing vibration predominantly at said resonant frequency, and means for coupling from said elongated member a signal responsive to the portion of said signal at said resonant frequency.
Claim 20
Dependent Claim
42 words
A filter according to claim 20 in which the elongated member comprises a reed of semiconductive material, said filter including nonresonant means for supporting the elongated member and electrical means for applying the signal having a plurality of frequencies to said member.
Claim 21
Dependent Claim
68 words
A filter according to claim 21 in which the means for coupling a signal from the elongated member comprises an element of semiconductor resistive material diffused into said reed, and an output circuit connected across the element, said output circuit including means for biasing said element to carry a current responsive to changes in strain in said reed while not having a substantial effect in driving said reed.
Claim 22
Dependent Claim
51 words
A filter according to claim 21 in which the reed has two longitudinal regions and means separating said regions for providing a substantial degree of thermal isolation from one another, the heating means and the means for coupling the signal from the reed being disposed in different ones of said regions.
Claim 23
Dependent Claim
58 words
In an oscillator a device comprising a member capable of flexing in response to a change in temperature and having a resonant frequency of flexing vibration, and means for heating said member to change the temperature and produce flexure thereof, said member and said heating means being mutually adapted to promote flexing vibration predominantly at said resonant frequency.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1974-10-18 | 1975-04-19 | 1975-10-19 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1978-10-18 | 1979-04-19 | 1979-10-19 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1982-10-18 | 1983-04-19 | 1983-10-19 | $7700.00 | Window Closed / Lapsed |