US5478653A
Expired / Lapsed
US
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Bismuth titanate as a template layer for growth of crystallographically oriented silicon
Assignee: Individual
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Filing: 1994-04-04
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Granted: 1995-12-26
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Expires: 2014-04-04
Abstract
Abstract A method of forming a crystallographically oriented silicon layer over a glassy layer of, for example, SiO 2 . A templating layer of a layered perovskite, preferably Bi 4 Ti 3 O 12 , is deposited on the glassy layer under conditions favoring its crystallographic growth with its long c-axis perpendicular to the film. The silicon is then grown over the templating layer under conditions usually favoring monocrystalline growth. Thereby, it grows crystallographically aligned with the underlaying templating layer.
Inventors
- 👤 Charles S. Guenzer
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 19:20
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/20; H10P14/29; H10P14/2901; H10P14/2921; H10P14/2922; H10P14/32; H10P14/3202; H10P14/3238; H10P14/34; H10P14/3402; H10P14/3404; H10P14/3411
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
63 words
A silicon heterostructure, comprising: a substrate having a glassy surface comprising a non-crystalline material; a templating layer comprising a layered perovskite deposited on said glassy surface to be crystallographically oriented with a long axis thereof substantially perpendicular to a principal plane of the layer; and a layer of silicon epitaxially deposited on said templating layer and substantially crystallographically aligned with said templating layer.
Claim 2
Dependent Claim
63 words
A silicon heterostructure, comprising: a substrate having a glassy surface comprising a non-crystalline material; a templating layer comprising a layered perovskite deposited on said glassy surface to be crystallographically oriented with a long axis thereof substantially perpendicular to a principal plane of the layer; and a layer of silicon epitaxially deposited on said templating layer and substantially crystallographically aligned with said templating layer.
Claim 3
Dependent Claim
17 words
A silicon heterostructure as recited in claim 1, wherein said layered perovskite comprises bismuth, titanium, and oxygen.
Claim 4
Dependent Claim
20 words
A silicon heterostructure as recited in claim 2, wherein said layered perovskite comprises Bi 4 Ti 3 O 12 .
Claim 5
Dependent Claim
19 words
A silicon heterostructure as recited in claim 1, wherein said glassy surface comprises a mixture of silicon and oxygen.
Claim 6
Dependent Claim
32 words
A silicon heterostructure as recited in claim 4, wherein said glassy surface is a glassy layer of said non-crystalline material deposited on said substrate and comprising said mixture of silicon and oxygen.
Claim 7
Dependent Claim
17 words
A silicon heterostructure as recited in claim 5, wherein said layered perovskite comprises bismuth, titanium, and oxygen.
Claim 8
Dependent Claim
20 words
A silicon heterostructure as recited in claim 6, wherein said layered perovskite comprises Bi 4 Ti 3 O 12 .
Claim 9
Dependent Claim
15 words
A silicon heterostructure as recited in claim 1, wherein said substrate comprises a borosilicate glass.
Claim 10
Dependent Claim
32 words
A silicon heterostructure as recited in claim 8, wherein said glassy surface is a glassy layer of said non-crystalline material deposited on said substrate and comprises said mixture of silicon and oxygen.
Claim 11
Dependent Claim
17 words
A silicon heterostructure as recited in claim 9, wherein said mixture consists essentially of SiO 2 .
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-12-25 | 1999-06-26 | 1999-12-26 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-12-25 | 2003-06-26 | 2003-12-26 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-12-25 | 2007-06-26 | 2007-12-26 | $7700.00 | Window Closed / Lapsed |