US5478398A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Device for forming a compound oxide superconductor thin film
Assignee: Sumitomo Electric Industries Ltd
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Filing: 1994-02-14
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Granted: 1995-12-26
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Expires: 2014-02-14
Abstract
Abstract There is disclosed a device for forming a thin film on a substrate by irradiating a target of a compound oxide superconducting material with a laser beam and evaporating on the substrate a thin film corresponding to a composition of the target in an oxygen ambient atmosphere by laser evaporation, a scanning optical system for causing the laser beam to scan being disposed in an optical path of the laser beam.
Inventors
- 👤 Hidenori Nakanishi
- 👤 Saburo Tanaka
- 👤 Hideo Itozaki
- 👤 Shuji Yazu
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 02:11
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/24; C23C14/28; H; H10; H10N; H10N60/00; H10N60/01; H10N60/0268; H10N60/0296; H10N60/0521
Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
195 words
A device for forming a compound oxide superconducting film on a substrate, comprising: a holding means for holding a target made of a compound oxide superconducting material; a laser beam irradiating means for irradiating the target by a laser beam to evaporate a thin film corresponding to the oxide superconducting material of the target onto the substrate; means for scanning the laser over the target in a one dimensional scanning direction; transfer means for moving the substrate in a transfer direction, wherein the transfer direction is perpendicular to the one-dimensional scanning direction, wherein said transfer means includes (a) a frame having plural pairs of guide rollers arranged such that the guide rollers of each pair are arranged opposite to one another, (b) a substrate holder, wherein the frame and substrate holder are movable with respect to one another in said transfer direction, and (c) a heater for heating the substrate to be held thereon; and an oxygen supply means disposed proximate the substrate for supplying O 2 gas on a surface of the substrate on which the oxide superconducting film is to be formed; whereby laser beam evaporation is performed in an oxygen ambient atmosphere.
Claim 2
Independent Claim
195 words
A device for forming a compound oxide superconducting film on a substrate, comprising: a holding means for holding a target made of a compound oxide superconducting material; a laser beam irradiating means for irradiating the target by a laser beam to evaporate a thin film corresponding to the oxide superconducting material of the target onto the substrate; means for scanning the laser over the target in a one dimensional scanning direction; transfer means for moving the substrate in a transfer direction, wherein the transfer direction is perpendicular to the one-dimensional scanning direction, wherein said transfer means includes (a) a frame having plural pairs of guide rollers arranged such that the guide rollers of each pair are arranged opposite to one another, (b) a substrate holder, wherein the frame and substrate holder are movable with respect to one another in said transfer direction, and (c) a heater for heating the substrate to be held thereon; and an oxygen supply means disposed proximate the substrate for supplying O 2 gas on a surface of the substrate on which the oxide superconducting film is to be formed; whereby laser beam evaporation is performed in an oxygen ambient atmosphere.
Claim 3
Dependent Claim
24 words
A device according to claim 1, wherein said pairs of guide rollers engage in guide grooves defined in opposed sides of the substrate holder.
Claim 4
Dependent Claim
21 words
A device according to claim 2, wherein the heater includes a rod shaped heating body arranged perpendicular to said transfer direction.
Claim 5
Dependent Claim
23 words
A device according to claim 2, wherein the heater includes a plurality of rod shaped heating bodies arranged perpendicular to said transfer direction.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-12-25 | 1999-06-26 | 1999-12-26 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-12-25 | 2003-06-26 | 2003-12-26 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-12-25 | 2007-06-26 | 2007-12-26 | $7700.00 | Window Closed / Lapsed |