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US5124310A
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Laser ablation method for depositing fluorinated y-ba-cu-o superconducting film having basal plane alignment of the unit cells deposited on non-lattice-matched substrates
Assignee: Energy Conversion Devices Inc
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Filing: 1990-08-20
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Granted: 1992-06-23
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Expires: 2010-08-20
Abstract
Abstract A thin film, fluorinated, ceramic defect-oxide type superconducting material grown on a substrate such as sapphire or stainless steel. The superconducting material is characterized by basal plane alignment of the unit cells thereof even though the substrate does not possess a perovskite-type lattice structure. A laser ablation technique is used to evaporate material from a fluorinated pellet of target material to deposit the fluorinated superconducing material on the substrate, which is heated during the deposition process. The instant invention provides for a low pressure and relatively low temperature method of depositing a superconducting film which is characterized by (1) a minimal number of high angle grain boundaries typically associated with polycrystalline films, and (2) aligned a, b, and c axes of the unit cells thereof so as to provide for enhanced current carrying capacities. Further, the method of this invention provides for the deposition of superconducting material without a post deposition anneal. Large area, irregularly shaped rolls of inexpensive substrate material can be uniformly covered by the method described herein.
Inventors
- 👤 Stanford R. Ovshinsky
- 👤 Rosa Young
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 03:59
CPC Classifications
B; B32; B32B; B32B18/00; C; C23; C23C; C23C14/00; C23C14/22; C23C14/24; C23C14/28; C23C14/06; C23C14/08; C23C14/087; H; H10; H10N; H10N60/00; H10N60/01; H10N60/0268; H10N60/0296; H10N60/0521; Y; Y10; Y10S; Y10S505/00; Y10S505/725; Y10S505/73; Y10S505/731; Y10S505/775; Y10S505/776; Y10S505/779; Y10S505/78
Claims Analysis
Total Claims: 19
Claim 1
Independent Claim
205 words
A method of fabricating a fluorinated Y 1 Ba 2 Cu 3 O 7 (F) superconducting thin film on a substrate having a lattice which does not match the lattice of superconducting film, said method including the steps of: providing a substrate characterized by a lattice differing from the lattice of the fluorinated Y 1 Ba 2 Cu 3 O 7 (F) superconducting thin film; providing at least one non-stoichiometric, fluorinated target including Y, Ba, Cu, and O; providing a chamber defining a deposition region therewithin; evacuating said chamber; providing a background atmosphere including at least a partial pressure of O 2 in said deposition region; heating said substrate; providing a laser; laser ablation depositing the fluorinated target material, in said background atmosphere, onto the heated substrate; and controlling said partial pressure of O 2 in said deposition region and the temperature of said substrate such that the fluorinated material deposited onto said heated substrate is superconducting without a post deposition oxygen anneal, wherein a fluorinated Y 1 Ba 2 Cu 3 O 7 (F) superconducting thin film, characterized by basal plane alignment of the unit cells thereof and a lattice which is different than that of said substrate, is grown on said heated substrate.
Claim 2
Independent Claim
205 words
A method of fabricating a fluorinated Y 1 Ba 2 Cu 3 O 7 (F) superconducting thin film on a substrate having a lattice which does not match the lattice of superconducting film, said method including the steps of: providing a substrate characterized by a lattice differing from the lattice of the fluorinated Y 1 Ba 2 Cu 3 O 7 (F) superconducting thin film; providing at least one non-stoichiometric, fluorinated target including Y, Ba, Cu, and O; providing a chamber defining a deposition region therewithin; evacuating said chamber; providing a background atmosphere including at least a partial pressure of O 2 in said deposition region; heating said substrate; providing a laser; laser ablation depositing the fluorinated target material, in said background atmosphere, onto the heated substrate; and controlling said partial pressure of O 2 in said deposition region and the temperature of said substrate such that the fluorinated material deposited onto said heated substrate is superconducting without a post deposition oxygen anneal, wherein a fluorinated Y 1 Ba 2 Cu 3 O 7 (F) superconducting thin film, characterized by basal plane alignment of the unit cells thereof and a lattice which is different than that of said substrate, is grown on said heated substrate.
Claim 3
Dependent Claim
31 words
The method of claim 1, wherein the step of providing a non-stoichiometric fluorinated target comprises providing a sintered, multiphased target including BaF 2 , CuO and Y 2 O 3 .
Claim 4
Dependent Claim
36 words
The method of claim 1, wherein the step of providing a non-stoichiometric fluorinated target comprises providing a sintered body of Y 1 Ba 2 .7 Cu 2 .6 O 4 .1 F 5 .4 target material.
Claim 5
Dependent Claim
30 words
The method of claim 1, wherein the step of providing a partial pressure 02 atmosphere includes maintaining said atmosphere at a pressure in the range of about 25 to 50mTorr.
Claim 6
Dependent Claim
32 words
The method of claim 1, which includes the further step of mounting the substrate in a holder which is maintained at a temperature in the range of about 650° to 680° C.
Claim 7
Dependent Claim
54 words
The method of claim 1, wherein the step of providing at least one non-stoichiometric fluorinated target includes providing a plurality of spacedly disposed non-stoichiometric fluorinated targets; and said method further includes the step of simultaneously laser ablating material from said plurality of targets so as to uniformly deposit superconducting material onto large area substrates.
Claim 8
Dependent Claim
28 words
The method of claim 1, wherein the step of providing a substrate comprises the step of providing a Al 2 O 3 substrate having a hexagonal lattice structure.
Claim 9
Independent Claim
236 words
A method of sequentially fabricating a fluorinated Y 1 Ba 2 Cu 3 O 7 (F) superconducting thin film on substrates having a lattice which does not match the lattice of said superconducting film, said method including the steps of: providing a plurality of substrates characterized by a lattice differing from the lattice of the fluorinated Y 1 Ba 2 Cu 3 O 7 (F) superconducting thin film; providing at least one non-stoichiometric, fluorinated target including Y, Ba, Cu, and O; providing a chamber defining a deposition region therewithin; evacuating said chamber; providing a background atmosphere including at least a partial pressure of O 2 in said deposition region; providing a means for sequentially advancing discrete ones of said substrates through said deposition region; heating said plurality of substrates; providing a laser; laser ablation depositing the fluorinated target material, in said background atmosphere, onto the heated substrates sequentially advance through said deposition region; and controlling said partial pressure of O 2 in said deposition region and the temperature of said substrate such that the fluorinated material deposited onto said heated substrate is superconducting without the need for a post deposition oxygen anneal, whereby a fluorinated Y 1 Ba 2 Cu 3 O 7 (F) superconducting thin film, characterized by basal plane alignment of the unit cells thereof and a lattice which is different than that of said substrates, is sequentially grown on said discrete heated substrates.
Claim 10
Independent Claim
236 words
A method of sequentially fabricating a fluorinated Y 1 Ba 2 Cu 3 O 7 (F) superconducting thin film on substrates having a lattice which does not match the lattice of said superconducting film, said method including the steps of: providing a plurality of substrates characterized by a lattice differing from the lattice of the fluorinated Y 1 Ba 2 Cu 3 O 7 (F) superconducting thin film; providing at least one non-stoichiometric, fluorinated target including Y, Ba, Cu, and O; providing a chamber defining a deposition region therewithin; evacuating said chamber; providing a background atmosphere including at least a partial pressure of O 2 in said deposition region; providing a means for sequentially advancing discrete ones of said substrates through said deposition region; heating said plurality of substrates; providing a laser; laser ablation depositing the fluorinated target material, in said background atmosphere, onto the heated substrates sequentially advance through said deposition region; and controlling said partial pressure of O 2 in said deposition region and the temperature of said substrate such that the fluorinated material deposited onto said heated substrate is superconducting without the need for a post deposition oxygen anneal, whereby a fluorinated Y 1 Ba 2 Cu 3 O 7 (F) superconducting thin film, characterized by basal plane alignment of the unit cells thereof and a lattice which is different than that of said substrates, is sequentially grown on said discrete heated substrates.
Claim 11
Dependent Claim
31 words
The method of claim 8, wherein the step of providing a non-stoichiometric, fluorinated target includes providing a sintered, multiphased target including BaF 2 , CuO and Y 2 O 3 .
Claim 12
Dependent Claim
36 words
The method of claim 8, wherein the step of providing a non-stoichiometric, fluorinated target comprises providing a sintered body of Y 1 Ba 2 .7 Cu 2 .63 O 4 .1 F 5 .4 target material.
Claim 13
Dependent Claim
32 words
The method of claim 8, wherein the step of providing a partial pressure O 2 atmosphere includes maintaining said atmosphere at a pressure in the range of about 25 to 50 mTorr.
Claim 14
Dependent Claim
60 words
The method of claim 8, wherein the step of providing at least one non-stoichiometric fluorinated target includes providing a plurality of non-stoichiometric fluorinated targets; and said method includes a further step of simultaneously laser ablating material from said plurality of targets to uniformly and sequentially deposit superconducting material onto discrete ones of large area substrates advanced through the deposition region.
Claim 15
Dependent Claim
18 words
The method of claim 8, further including the step of introducing a plurality of substrates into the chamber.
Claim 16
Dependent Claim
20 words
The method of claim 13, further including the step of operatively disposing said substrates in spaced relation on a cassette.
Claim 17
Dependent Claim
23 words
The method of claim 14, further including the step of sequentially selecting a substrate and advancing said selected substrate through the deposition region.
Claim 18
Dependent Claim
15 words
The method of claim 8, including the further step of fabricating the substrate of sapphire.
Claim 19
Dependent Claim
23 words
The method of claim 16, further including the further step of depositing a layer of silver atop one surface of the sapphire substrate.
References Cited (Backward Citations)
No citation records indexed.
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| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 1995-06-23 | 1995-12-23 | 1996-06-23 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-06-23 | 1999-12-23 | 2000-06-23 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-06-23 | 2003-12-23 | 2004-06-23 | $7700.00 | Window Closed / Lapsed |