EP0398374A2
Expired / Lapsed
EP
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Method of and apparatus for fabricating oxide superconducting wire
Assignee: Sumitomo Electric Industries Ltd
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Filing: 1990-05-18
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Granted: —
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Expires: 2010-05-18
Abstract
Abstract Disclosed herein is a method of and an apparatus for fabricating an oxide superconducting wire which comprises a tape-type long base material and an oxide superconducting film formed thereon. The oxide superconducting film is formed by laser ablation of applying a laser beam (2) onto a target (4) while translating a long base material (6) along its longitudinal direction and depositing atoms and/or molecules scattered from the target (4) on the base material (6).
Inventors
- 👤 Noriyuki C/O Osaka Works Yoshida
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-10-25 20:45
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/56; C23C14/562; C23C14/24; C23C14/28; H; H10; H10N; H10N60/00; H10N60/01; H10N60/0268; H10N60/0296; H10N60/0521; H10N60/0801; Y; Y10; Y10S; Y10S505/00; Y10S505/725; Y10S505/73; Y10S505/732; Y10S505/742
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
100 words
A method of fabricating an oxide superconducting wire using laser ablation of applying a laser beam onto a target containing components of an oxide superconductive material and depositing particles thereby scattered from said target on a base material, said method comprising the steps of: feeding a long base material along its longitudinal direction to be passed through a film forming station provided therein with a target; applying a laser beam onto said target thereby scattering particles from said target on the basis of laser ablation; and depositing said particles on said long base material for forming an oxide superconducting film.
Claim 2
Independent Claim
100 words
A method of fabricating an oxide superconducting wire using laser ablation of applying a laser beam onto a target containing components of an oxide superconductive material and depositing particles thereby scattered from said target on a base material, said method comprising the steps of: feeding a long base material along its longitudinal direction to be passed through a film forming station provided therein with a target; applying a laser beam onto said target thereby scattering particles from said target on the basis of laser ablation; and depositing said particles on said long base material for forming an oxide superconducting film.
Claim 3
Dependent Claim
45 words
A method of fabricating an oxide superconducting wire in accordance with claim 1, further comprising the step of cooling slowly said oxide superconducting film under a partial pressure of oxygen higher than that in said film forming station after said step of oxide superconducting film.
Claim 4
Dependent Claim
31 words
A method of fabricating an oxide superconducting wire in accordance with claim 1, wherein a mask for limiting a film forming region is arranged between said target and said base material.
Claim 5
Dependent Claim
35 words
A method of fabricating an oxide superconducting wire in accordance with claim 1, wherein said film forming station comprises a plurality of film forming stations distributed along a path for feeding said long base material.
Claim 6
Dependent Claim
50 words
A method of fabricating an oxide superconducting wire in accordance with claim 1, wherein a laser beam emitted from an excimer laser, a laser beam emitted from a nitrogen laser, or the 4th or the 2nd harmonics laser beam emitted from a YAG laser is employed as said laser beam.
Claim 7
Dependent Claim
36 words
A method of fabricating an oxide superconducting wire in accordance with claim 1, wherein one of a zirconia ceramic tape and a metal tape of nickel or nickel group alloy is employed as said base material.
Claim 8
Dependent Claim
28 words
A method of fabricating an oxide superconducting wire in accordance with claim 1, wherein said target has one composition selected from the group of Y-Ba-Cu-O, Bi-Sr-Ca-Cu-O and Tl-Ba-Ca-Cu-O.
Claim 9
Independent Claim
90 words
An apparatus for fabricating an oxide superconducting wire, comprising: base material holding means having a supply unit and a take-up unit for a long base material for translating said long base material along its longitudinal direction between said supply unit and said take-up unit; a laser for emitting a laser beam; and a target containing components of an oxide superconductive material, said target being irradiated with said laser beam for scattering atoms and/or molecules to be deposited on said translated long base material through such irradiation with said laser beam.
Claim 10
Independent Claim
90 words
An apparatus for fabricating an oxide superconducting wire, comprising: base material holding means having a supply unit and a take-up unit for a long base material for translating said long base material along its longitudinal direction between said supply unit and said take-up unit; a laser for emitting a laser beam; and a target containing components of an oxide superconductive material, said target being irradiated with said laser beam for scattering atoms and/or molecules to be deposited on said translated long base material through such irradiation with said laser beam.
Claim 11
Dependent Claim
37 words
An apparatus for fabricating an oxide superconducting wire in accordance with claim 8, wherein a plurality of combinations of said laser and said target are serially arranged along the longitudinal direction of said translated long base material.
Claim 12
Dependent Claim
32 words
An apparatus for fabricating an oxide superconducting wire in accordance with claim 8, further comprising a mask arranged between said target and said long base material for limiting a film forming region.
References Cited (Backward Citations)
No citation records indexed.
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