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EP0398375A2 Expired / Lapsed EP ⏱️ 0.0 years remaining

Method of fabricating oxide superconducting film

Assignee: Sumitomo Electric Industries Ltd
•
Filing: 1990-05-18
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Granted: —
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Expires: 2010-05-18
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Abstract

Abstract An oxide superconducting film is formed using laser deposition of applying an excimer laser beam (1, 21) onto a target (3, 23) through a converging lens (2, 22) and depositing atoms and/or molecules scattered from the target (3, 23) on the base material (5). The converging lens (2) is prepared by a cylindrical lens, or the converging lens (22) is moved, so that a portion (4, 25) irradiated with the laser beam (1, 21) on the target (3, 23) is linearized. Thus, it is possible to form an oxide superconducting film which is homogeneous over a region having a relatively large area on the base material (5) not only in film thickness but also in property.

Inventors

  • 👤 Noriki C/O Osaka Works Hayashi
  • 👤 Noriyuki C/O Osaka Works Yoshida

Bibliographic Details

Application Number —
Jurisdiction EP
Data Source google_patents
Last Synchronized 2026-10-25 19:55
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/24; C23C14/28; H; H10; H10N; H10N60/00; H10N60/01; H10N60/0268; H10N60/0296; H10N60/0521; Y; Y10; Y10S; Y10S505/00; Y10S505/725; Y10S505/73; Y10S505/732

Claims Analysis

Total Claims: 8
Claim 1
Independent Claim 53 words
A method of fabricating an oxide superconducting film using laser deposition of applying a laser beam onto a target of an oxide superconductive material through a converging lens and depositing atoms and/or molecules scattered from said target on said base material, a portion irradiated with said laser beam being linearized on said target.
Claim 2
Independent Claim 53 words
A method of fabricating an oxide superconducting film using laser deposition of applying a laser beam onto a target of an oxide superconductive material through a converging lens and depositing atoms and/or molecules scattered from said target on said base material, a portion irradiated with said laser beam being linearized on said target.
Claim 3
Dependent Claim 26 words
A method of fabricating an oxide superconducting film in accordance with claim 1, wherein said laser beam applied onto said target is linearized in sectional configuration.
Claim 4
Dependent Claim 23 words
A method of fabricating an oxide superconducting film in accordance with claim 2, wherein a cylindrical lens is employed as said converging lens.
Claim 5
Dependent Claim 29 words
A method of fabricating an oxide superconducting film in accordance with claim 1, wherein said portion irradiated with said laser beam on said target is reciprocated on said target.
Claim 6
Dependent Claim 19 words
A method of fabricating an oxide superconducting film in accordance with claim 4, wherein said converging lens is reciprocated.
Claim 7
Dependent Claim 25 words
A method of fabricating an oxide superconducting film in accordance with claim 1, wherein a long flexible base material is employed as said base material.
Claim 8
Dependent Claim 58 words
A method of fabricating an oxide superconducting film in accordance with claim 6, wherein said flexible base material is formed of one of a ceramic material selected from the group of stabilized zirconia, alumina, yttria, silica and titania, and a metal material selected from the group of platinum, gold, silver, aluminum, nickel, hastelloy, inconel, incoloy and stainless steel.

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