Patent US5472502A successfully refreshed from Google Patents.
US5472502A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Apparatus and method for spin coating wafers and the like
Assignee: Semiconductor Systems Inc
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Filing: 1993-08-30
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Granted: 1995-12-05
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Expires: 2013-08-30
Abstract
Abstract An apparatus and method are provided for controlling the rate of drying of a high-viscosity chemical applied to a substantially flat surface of a spinning article. The rate of drying of the chemical is controlled by controlling the saturation level of a solvent in the local atmosphere in which the article is spinning, i.e., in the air space adjacent to the surface of the article. By spinning the article in a solvent-laden vapor, the evaporation of solvent from the chemical is slowed and therefore the rate at which the chemical dries and thickens is also slowed. Spreading of the chemical may also be facilitated and premature drying of the chemical may be avoided by applying to the surface of the article a thin layer of the solvent prior to application of the chemical.
Inventors
- 👤 William T. Batchelder
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 07:35
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/04; H10P72/0448; B; B05; B05D; B05D1/00; B05D1/002; B05D1/005
Claims Analysis
Total Claims: 24
Claim 1
Independent Claim
84 words
An apparatus for applying a layer of a liquid to a surface of an article, said apparatus comprising: means for spinning said article about an axis; means for depositing on said article surface a quantity of said liquid such that spinning said article surface spreads said liquid over said article surface; means for dispersing a gas containing a solvent in close proximity to said article surface so as to retard the drying of said liquid during spreading, said means for dispersing comprising a showerhead.
Claim 2
Independent Claim
84 words
An apparatus for applying a layer of a liquid to a surface of an article, said apparatus comprising: means for spinning said article about an axis; means for depositing on said article surface a quantity of said liquid such that spinning said article surface spreads said liquid over said article surface; means for dispersing a gas containing a solvent in close proximity to said article surface so as to retard the drying of said liquid during spreading, said means for dispersing comprising a showerhead.
Claim 3
Dependent Claim
12 words
The apparatus of claim 1 wherein said article surface is substantially planar.
Claim 4
Dependent Claim
12 words
The apparatus of claim 1 wherein said showerhead comprises a gas-permeable surface.
Claim 5
Dependent Claim
19 words
The apparatus of claim 3 wherein said gas-permeable surface is at least about the size of said article surface.
Claim 6
Dependent Claim
42 words
The apparatus of claim 3 wherein said gas-permeable surface is circular and has a diameter that is no more than about 110% of the diameter of an area defined by said article surface when said article surface is spun about a center.
Claim 7
Dependent Claim
20 words
The apparatus of claim 3 wherein said gas-permeable surface is positioned approximately one-half of an inch from said article surface.
Claim 8
Dependent Claim
17 words
The apparatus of claim 3 wherein said gas-permeable surface is positioned substantially parallel to said article surface.
Claim 9
Independent Claim
149 words
An apparatus for applying a layer of a liquid to a surface of an article wherein said liquid includes a solvent, said apparatus comprising: a chuck for receiving and securing said article; means for spinning said chuck so as to spin said article surface about an axis; means for depositing on said article surface a quantity of said liquid such that spinning said article surface will spread said liquid over said article surface; a showerhead having a chamber and a gas-permeable surface which is positioned in proximity to said article surface along said axis; a solvent vapor source for forming a solvent vapor; means connected between said solvent vapor source and said showerhead for introducing said solvent vapor into said chamber so as to allow said solvent vapor to permeate said gas-permeable surface into close proximity to said article surface so as to retard the drying of said liquid.
Claim 10
Independent Claim
149 words
An apparatus for applying a layer of a liquid to a surface of an article wherein said liquid includes a solvent, said apparatus comprising: a chuck for receiving and securing said article; means for spinning said chuck so as to spin said article surface about an axis; means for depositing on said article surface a quantity of said liquid such that spinning said article surface will spread said liquid over said article surface; a showerhead having a chamber and a gas-permeable surface which is positioned in proximity to said article surface along said axis; a solvent vapor source for forming a solvent vapor; means connected between said solvent vapor source and said showerhead for introducing said solvent vapor into said chamber so as to allow said solvent vapor to permeate said gas-permeable surface into close proximity to said article surface so as to retard the drying of said liquid.
Claim 11
Dependent Claim
22 words
The apparatus of claim 8 wherein said showerhead extends parallel to said article surface so as to cover a substantial portion thereof.
Claim 12
Dependent Claim
12 words
The apparatus of claim 8 wherein said article surface is substantially planar.
Claim 13
Dependent Claim
19 words
The apparatus of claim 8 wherein said gas-permeable surface is at least about the size of said article surface.
Claim 14
Dependent Claim
42 words
The apparatus of claim 11 wherein said gas-permeable surface is circular and has a diameter that is no more than about 110% of the diameter of an area defined by said article surface when said article surface is spun about a center.
Claim 15
Dependent Claim
19 words
The apparatus of claim 8 wherein said gas-permeable surface is positioned within about one-half inch from said article surface.
Claim 16
Dependent Claim
17 words
The apparatus of claim 8 wherein said gas-permeable surface is positioned substantially parallel to said article surface.
Claim 17
Independent Claim
79 words
A method for applying a layer of a liquid to a surface of an article, said method comprising: spinning said article surface about an axis; depositing on said article surface a quantity of said liquid such that spinning said article surface will spread said liquid over said article surface; dispersing through a showerhead a gas containing a solvent to a region in close proximity to said article surface so as to retard the drying of said liquid during spreading.
Claim 18
Independent Claim
79 words
A method for applying a layer of a liquid to a surface of an article, said method comprising: spinning said article surface about an axis; depositing on said article surface a quantity of said liquid such that spinning said article surface will spread said liquid over said article surface; dispersing through a showerhead a gas containing a solvent to a region in close proximity to said article surface so as to retard the drying of said liquid during spreading.
Claim 19
Dependent Claim
21 words
The method of claim 15 further comprising the step of applying a quantity of a second solvent to said article surface.
Claim 20
Dependent Claim
23 words
The method of claim 16 wherein said step of applying a quantity of said solvent is performed prior to said step of depositing.
Claim 21
Dependent Claim
35 words
The method of claim 16 further comprising the step of spinning said article surface so as to spread said solvent over said article surface to form a thin layer of solvent on said article surface.
Claim 22
Independent Claim
121 words
A method for applying a thin layer of a liquid to a surface of an article, said method comprising: applying a quantity of a solvent to said article surface so as to form a coating of said solvent on said article surface; applying a quantity of said liquid to said coating of said solvent so as to thin said liquid at the point of contact between said liquid and said article surface; and spinning said article surface so as to spread said liquid over said article surface, wherein said step of applying a quantity of said solvent is performed so as to form a uniform coating of solvent on said article surface wherein said coating is approximately 1,000 Å in thickness.
Claim 23
Independent Claim
121 words
A method for applying a thin layer of a liquid to a surface of an article, said method comprising: applying a quantity of a solvent to said article surface so as to form a coating of said solvent on said article surface; applying a quantity of said liquid to said coating of said solvent so as to thin said liquid at the point of contact between said liquid and said article surface; and spinning said article surface so as to spread said liquid over said article surface, wherein said step of applying a quantity of said solvent is performed so as to form a uniform coating of solvent on said article surface wherein said coating is approximately 1,000 Å in thickness.
Claim 24
Dependent Claim
16 words
The method of claim 16 wherein said first-mentioned solvent and said second solvent are the same.
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