US5238713A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Spin-on method and apparatus for applying coating material to a substrate, including an air flow developing and guiding step/means
Assignee: Tokyo Ohka Kogyo Co Ltd
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Filing: 1991-11-15
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Granted: 1993-08-24
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Expires: 2011-11-15
Abstract
Abstract A coating apparatus comprises a spinning chuck rotatably supported within an enclosure and securely holding a substrate thereon. A coating material is applied onto the surface of the substrate and distributed over the substrate by centrifugal forces. An annular air duct is disposed in surrounding and spaced relation to the spinning chuck, and a disk is placed between the air duct and the spinning chuck and has a plurality of guide vanes. Fans are provided in the air duct to develop a positive flow of air over the substrate. The flow of air is guided by the guide vanes in a direction identical to the direction of rotation of the substrate so as to eliminate undesirable deposition from the end edges of the substrate.
Inventors
- 👤 Hiroyoshi Sago
- 👤 Hideyuki Mizuki
- 👤 Katsuhiko Kudo
- 👤 Muneo Nakayama
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 17:51
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/04; H10P72/0448
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
81 words
A method for applying a coating material to a substrate, comprising the steps of: spinning a substrate; applying a liquid coating material onto a surface of the substrate; developing and guiding a flow of air over the substrate primarily in a direction identical to the direction of rotation of the substrate so as to assist in ejecting the coating material from edge portions of the substrate said air flow developing and guiding step being achieved independently of said substrate spinning step.
Claim 2
Independent Claim
81 words
A method for applying a coating material to a substrate, comprising the steps of: spinning a substrate; applying a liquid coating material onto a surface of the substrate; developing and guiding a flow of air over the substrate primarily in a direction identical to the direction of rotation of the substrate so as to assist in ejecting the coating material from edge portions of the substrate said air flow developing and guiding step being achieved independently of said substrate spinning step.
Claim 3
Dependent Claim
13 words
A method according to claim 1, wherein said substrate is polygonal in shape.
Claim 4
Dependent Claim
11 words
A method according to claim 2, wherein said substrate is square.
Claim 5
Independent Claim
104 words
An apparatus for applying a coating material to a substrate, comprising: means for supporting a substrate within a enclosure; means for spinning the substrate; means for applying a liquid coating material onto a surface of the substrate; means for developing a flow of air over the substrate; means for guiding the flow of air primarily in a direction identical to the direction of rotation of the substrate so as to assist in ejecting the coating material from edge portions of the substrate and said air flow developing means and said air flow guiding means being independent of said substrate and said substrate spinning means.
Claim 6
Independent Claim
104 words
An apparatus for applying a coating material to a substrate, comprising: means for supporting a substrate within a enclosure; means for spinning the substrate; means for applying a liquid coating material onto a surface of the substrate; means for developing a flow of air over the substrate; means for guiding the flow of air primarily in a direction identical to the direction of rotation of the substrate so as to assist in ejecting the coating material from edge portions of the substrate and said air flow developing means and said air flow guiding means being independent of said substrate and said substrate spinning means.
Claim 7
Dependent Claim
12 words
Apparatus according to claim 2, wherein said substrate is polygonal in shape.
Claim 8
Dependent Claim
10 words
Apparatus according to claim 5, wherein said substrate is square.
Claim 9
Dependent Claim
28 words
Apparatus according to claim 2, wherein said air flow developing means and said air flow guiding means are disposed radially outwardly of the substrate in surrounding relation thereto.
References Cited (Backward Citations)
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Cited
US4393807A
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US4374873A
Cited
US4528934A
Cited
US4510176A
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Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-08-23 | 1997-02-22 | 1997-08-24 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-08-23 | 2001-02-22 | 2001-08-24 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-08-23 | 2005-02-22 | 2005-08-24 | $7700.00 | Window Closed / Lapsed |