US5158860A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Selective metallization process
Assignee: Shipley Co Inc
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Filing: 1990-11-01
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Granted: 1992-10-27
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Expires: 2010-11-01
Abstract
Abstract A process for selective metallization comprising the steps of providing a substrate coated with a photoresist, imaging the photoresist coating by exposure to pattern radiation and development, flood exposing the photoresist coating to activating radiation, depositing an electroless plating catalyst over the entire imaged photoresist coating and bared underlying substrate, removing the top surface of the flood exposed, catalyzed photoresist coating by development whereby plating catalyst remains in a desired selective pattern and depositing metal over the catalyzed surface to form a metal deposit in a selective pattern such as in a circuit pattern. The process is suitable for the manufacture of diverse articles including printed circuit boards.
Inventors
- 👤 Michael Gulla
- 👤 Prasit Sricharoenchaikit
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 09:19
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/20; G03F7/2022; C; C23; C23C; C23C18/00; C23C18/16; C23C18/1601; C23C18/1603; C23C18/1607; C23C18/1608; C23C18/1612; C23C18/18; C23C18/20; C23C18/2006; C23C18/2026; C23C18/204; C23C18/28; C23C18/285; C23C18/30; C23C18/31; C23C18/32; C23C18/38; H; H05; H05K; H05K3/00; H05K3/10; H05K3/18; H05K3/181; H05K3/182; H05K3/184; H05K2203/00; H05K2203/05; H05K2203/0502; H05K2203/0505; H05K2203/07; H05K2203/0703; H05K2203/0706; H05K2203/14; H05K2203/1415
Claims Analysis
Total Claims: 26
Claim 1
Independent Claim
189 words
A process for the formation of a metal pattern over a substrate, said process comprising the steps of: a. providing a substrate coated with a layer of a light sensitive photoresist; b. exposing said photoresist coating to activating radiation in an image pattern to form a latent image followed by development of said latent image to provide an image photoresist coating with portions of the substrate by development to form recesses; c. applying an electroless plating catalyst over the image photoresist coating whereby all surfaces, including a top surface, of the coating and bared substrate are catalyzed; d. removing the top surface of the image photoresist coating by a process comprising blanket exposure of the imaged photoresist coating to activating radiation where the radiation is at a dose below a level needed for complete exposure of the photoresist and contact with a developer for the photoresist whereby the plating catalyst is removed from the top surface of said coating to form a catalyzed surface; and e. depositing metal over the catalyzed surface to form a metal deposit in a selective pattern within the recesses of the imaged photoresist coating.
Claim 2
Dependent Claim
189 words
A process for the formation of a metal pattern over a substrate, said process comprising the steps of: a. providing a substrate coated with a layer of a light sensitive photoresist; b. exposing said photoresist coating to activating radiation in an image pattern to form a latent image followed by development of said latent image to provide an image photoresist coating with portions of the substrate by development to form recesses; c. applying an electroless plating catalyst over the image photoresist coating whereby all surfaces, including a top surface, of the coating and bared substrate are catalyzed; d. removing the top surface of the image photoresist coating by a process comprising blanket exposure of the imaged photoresist coating to activating radiation where the radiation is at a dose below a level needed for complete exposure of the photoresist and contact with a developer for the photoresist whereby the plating catalyst is removed from the top surface of said coating to form a catalyzed surface; and e. depositing metal over the catalyzed surface to form a metal deposit in a selective pattern within the recesses of the imaged photoresist coating.
Claim 3
Dependent Claim
21 words
The process of claim 1 where the step of blanket exposure precedes the step of catalysis with an electroless plating catalyst.
Claim 4
Dependent Claim
21 words
The process of claim 1 where the step of catalysis with an electroless plating catalyst precedes the step of blanket exposure.
Claim 5
Dependent Claim
18 words
The process of claim 1 where the photoresist comprises a naphthoquinone diazo photoactive compound and a novolak resin.
Claim 6
Dependent Claim
33 words
The process of claim 1 where the photoresist comprises an aqueous solution or emulsion of a polymer having carrier groups, a photoinitiator and a source of unsaturation for crosslinking the film during exposure.
Claim 7
Dependent Claim
188 words
A process for the formation of a metal pattern over a substrate, said process comprising the steps of: a. providing a substrate coated with a layer of a positive working light sensitive photoresist; b. exposing said photoresist coating to activating radiation in an image pattern to form a latent image and developing said latent image to provide an image photoresist coating with portions of the substrate bared by development to form recesses; and then, in either order: c. partial flood exposing the photoresist coating to activating radiation where the radiation is at a dose below a level needed for complete exposure of the photoresist; and d. depositing an electroless plating catalyst over the imaged photoresist coating whereby all surfaces, including a top surface, of the coating and bared substrate are catalyzed; e. removing the top surface of the photoresist coating by contact with a developer for the photoresist whereby the plating catalyst is removed from said top surface to form a catalyzed surface; and f. depositing metal over the catalyzed surface to form a metal deposit in a selective pattern within the recesses of the imaged photoresist coating.
Claim 8
Dependent Claim
188 words
A process for the formation of a metal pattern over a substrate, said process comprising the steps of: a. providing a substrate coated with a layer of a positive working light sensitive photoresist; b. exposing said photoresist coating to activating radiation in an image pattern to form a latent image and developing said latent image to provide an image photoresist coating with portions of the substrate bared by development to form recesses; and then, in either order: c. partial flood exposing the photoresist coating to activating radiation where the radiation is at a dose below a level needed for complete exposure of the photoresist; and d. depositing an electroless plating catalyst over the imaged photoresist coating whereby all surfaces, including a top surface, of the coating and bared substrate are catalyzed; e. removing the top surface of the photoresist coating by contact with a developer for the photoresist whereby the plating catalyst is removed from said top surface to form a catalyzed surface; and f. depositing metal over the catalyzed surface to form a metal deposit in a selective pattern within the recesses of the imaged photoresist coating.
Claim 9
Dependent Claim
21 words
The process of claim 6 where the step of flood exposure precedes the step of catalysis with an electroless plating catalyst.
Claim 10
Dependent Claim
21 words
The process of claim 6 where the step of catalysis with an electroless plating catalyst precedes the step of flood exposure.
Claim 11
Dependent Claim
18 words
The process of claim 6 where the photoresist comprises a naphthoquinone diazo photoactive compound and a novolak resin.
Claim 12
Dependent Claim
15 words
The process of claim 6 where the electroless plating catalyst is a noble metal catalyst.
Claim 13
Dependent Claim
12 words
The process of claim 10 where the catalyst is a tin-palladium colloid.
Claim 14
Dependent Claim
19 words
The process of claim 6 where the plating metal is selected from the group consisting of copper and nickel.
Claim 15
Dependent Claim
17 words
The process of claim 12 where the catalyst has an average particle size not exceeding 50 Angstroms.
Claim 16
Dependent Claim
27 words
The process of claim 6 where the substrate is a printed circuit board substrate and the line widths of the metal deposit do not exceed 1 mil.
Claim 17
Dependent Claim
21 words
The process of claim 6 where the substrate is a semiconductor substrate and the line widths do not exceed 5 microns.
Claim 18
Dependent Claim
167 words
A process for the formation of a printed circuit board, said process comprising the steps of: a. providing a circuit board substrate coated with a layer of a light sensitive positive acting photoresist; b. exposing the photoresist coating to activating radiation to form an image corresponding to a desired circuit and developing said image to form an image photoresist coating with recesses baring the substrate in said pattern; c. flood exposing the photoresist coating to activating radiation where the radiation is at a dose below a level needed for complete exposure of the photoresist; d. depositing an electroless plating catalyst over all surfaces, including a top surface, of the image photoresist coating and bared substrate; e. developing the top surface of the photoresist coating whereby there remains a relief image free of plating catalyst with plating catalyst remaining in a desired circuit pattern forming the catalyzed surface; and f. depositing metal over the catalyzed surface to form a metal circuit within the recesses of the relief image.
Claim 19
Dependent Claim
167 words
A process for the formation of a printed circuit board, said process comprising the steps of: a. providing a circuit board substrate coated with a layer of a light sensitive positive acting photoresist; b. exposing the photoresist coating to activating radiation to form an image corresponding to a desired circuit and developing said image to form an image photoresist coating with recesses baring the substrate in said pattern; c. flood exposing the photoresist coating to activating radiation where the radiation is at a dose below a level needed for complete exposure of the photoresist; d. depositing an electroless plating catalyst over all surfaces, including a top surface, of the image photoresist coating and bared substrate; e. developing the top surface of the photoresist coating whereby there remains a relief image free of plating catalyst with plating catalyst remaining in a desired circuit pattern forming the catalyzed surface; and f. depositing metal over the catalyzed surface to form a metal circuit within the recesses of the relief image.
Claim 20
Dependent Claim
15 words
The process of claim 16 where the electroless plating catalyst is a noble metal catalyst.
Claim 21
Dependent Claim
12 words
The process of claim 17 where the catalyst is a tin-palladium colloid.
Claim 22
Dependent Claim
24 words
The process of claim 16 including a step of acceleration with an acidic solution of a noble metal after catalysis and prior to metallization.
Claim 23
Dependent Claim
11 words
The process of claim 16 where the plating metal is nickel.
Claim 24
Dependent Claim
26 words
The process of claim 16 including a step of replacing photoresist following metal deposition with an organic dielectric material having a dielectric constant not exceeding 3.5.
Claim 25
Dependent Claim
27 words
The process of claim 16 where the substrate is a printed circuit board substrate and the line widths of the metal deposit do not exceed 3 mils.
Claim 26
Dependent Claim
17 words
The process of claim 22 where the widths of the metal deposit do not exceed 1 mil.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-10-27 | 1996-04-27 | 1996-10-27 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-10-27 | 2000-04-27 | 2000-10-27 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-10-27 | 2004-04-27 | 2004-10-27 | $7700.00 | Window Closed / Lapsed |