Patent US5457318A successfully refreshed from Google Patents.
US5457318A
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Thermal detector apparatus and method using reduced thermal capacity
Assignee: L3 Technologies Inc
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Filing: 1994-04-29
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Granted: 1995-10-10
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Expires: 2014-04-29
Abstract
Abstract A thermal detection system (10) includes a focal plane array (12), a thermal isolation structure (14), and an integrated circuit substrate (16). Focal plane array (12) includes thermal sensors (28), each having an associated thermal sensitive element (30). Thermal sensitive element (30) is coupled with one side to infrared absorber and common electrode assembly (36) and on the opposite side to an associated contact pad (20) disposed on the integrated circuit substrate (16). Reticulation kerfs (52a, 52b) separate adjacent thermal sensitive elements (30a, 30b, 30c) by a distance at least half the average width (44, 46) of a single thermal sensitive element (30a, 30b, 30c). A continuous, non-reticulated optical coating (38) may be disposed over thermal sensitive elements (30a, 30b, 30c) to maximize absorption of thermal radiation incident to focal plane array (12).
Inventors
- 👤 James E. Robinson
- 👤 James F. Belcher
- 👤 Howard R. Beratan
- 👤 Steven N. Frank
- 👤 Charles M. Hanson
- 👤 Paul O. Johnson
- 👤 Robert J. S. Kyle
- 👤 Edward G. Meissner
- 👤 Robert A. Owen
- 👤 Gail D. Shelton
- 👤 William K. Walker
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 09:51
CPC Classifications
G; G01; G01J; G01J5/00; G01J5/10; G01J5/34; H; H10; H10N; H10N15/00; H10N15/10; Y; Y10; Y10T; Y10T29/00; Y10T29/49; Y10T29/49002; Y10T29/49117; Y10T29/49124; Y10T29/49126; Y10T29/4913; Y10T29/49144
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
168 words
A thermal detector including a focal plane array and an integrated circuit substrate, comprising: a plurality of thermal sensors for providing a sensor signal output representative of the amount of thermal radiation incident to the focal plane array, the thermal sensors comprising a plurality of thermal sensitive elements spatially separated by a plurality of reticulation kerfs, each reticulation kerf separating adjacent thermal sensitive elements by a distance at least half the average width of a single thermal sensitive element; an infrared absorber and common electrode assembly coupled with one side of the thermal sensitive elements; a plurality of sensor signal electrodes coupled with the other side of the thermal sensitive elements; a plurality of signal contact pads, disposed on the integrated circuit substrate and coupled with the sensor signal electrodes, for receiving the sensor signal output from the thermal sensors; and a thermal isolation structure projecting from the integrated circuit substrate adjacent to the signal contact pads for mounting the focal plane array on the integrated circuit substrate.
Claim 2
Dependent Claim
168 words
A thermal detector including a focal plane array and an integrated circuit substrate, comprising: a plurality of thermal sensors for providing a sensor signal output representative of the amount of thermal radiation incident to the focal plane array, the thermal sensors comprising a plurality of thermal sensitive elements spatially separated by a plurality of reticulation kerfs, each reticulation kerf separating adjacent thermal sensitive elements by a distance at least half the average width of a single thermal sensitive element; an infrared absorber and common electrode assembly coupled with one side of the thermal sensitive elements; a plurality of sensor signal electrodes coupled with the other side of the thermal sensitive elements; a plurality of signal contact pads, disposed on the integrated circuit substrate and coupled with the sensor signal electrodes, for receiving the sensor signal output from the thermal sensors; and a thermal isolation structure projecting from the integrated circuit substrate adjacent to the signal contact pads for mounting the focal plane array on the integrated circuit substrate.
Claim 3
Dependent Claim
23 words
The detector of claim 1, wherein the infrared absorber and common electrode assembly comprises a continuous, non-reticulated optical coating sensitive to infrared radiation.
Claim 4
Dependent Claim
41 words
The detector of claim 1, wherein each thermal sensitive element is partially defined by at least one substantially vertical wall extending from a first face coupled with a common electrode to a second face coupled with an associated sensor signal electrode.
Claim 5
Dependent Claim
15 words
The detector of claim 1, wherein the thermal sensitive elements are formed from pyroelectric material.
Claim 6
Dependent Claim
16 words
The detector of claim 1, wherein the thermal sensitive elements are formed from barium strontium titanate.
Claim 7
Dependent Claim
45 words
The detector of claim 1, wherein the infrared absorber and common electrode assembly comprises: a common electrode coupled with the thermal sensitive elements for supplying a voltage to the thermal sensitive elements; and an optical coating sensitive to infrared radiation disposed over the common electrode.
Claim 8
Dependent Claim
53 words
The detector of claim 1, wherein each thermal sensitive element is coupled on one side with a common electrode and on the other side with an associated sensor signal electrode, the sensor signal electrode further coupled through the thermal isolation structure with an associated signal contact pad disposed on the integrated circuit substrate.
Claim 9
Dependent Claim
139 words
A focal plane array including a plurality of thermal sensors for providing a sensor signal output representative of the amount of thermal radiation incident to the focal plane array, comprising: a common electrode for providing a voltage to the thermal sensors; an optical coating sensitive to incident infrared radiation coupled with one side of the common electrode; a plurality of thermal sensitive elements coupled with the opposite side of the common electrode, the thermal sensitive elements spatially separated by a plurality of reticulation kerfs, each reticulation kerf separating adjacent thermal sensitive elements by a distance at least half the average width of a single thermal sensitive element; and a plurality of sensor signal electrodes coupled with the thermal sensitive elements for receiving the sensor signal output representative of the amount of thermal radiation incident to the focal plane array.
Claim 10
Dependent Claim
139 words
A focal plane array including a plurality of thermal sensors for providing a sensor signal output representative of the amount of thermal radiation incident to the focal plane array, comprising: a common electrode for providing a voltage to the thermal sensors; an optical coating sensitive to incident infrared radiation coupled with one side of the common electrode; a plurality of thermal sensitive elements coupled with the opposite side of the common electrode, the thermal sensitive elements spatially separated by a plurality of reticulation kerfs, each reticulation kerf separating adjacent thermal sensitive elements by a distance at least half the average width of a single thermal sensitive element; and a plurality of sensor signal electrodes coupled with the thermal sensitive elements for receiving the sensor signal output representative of the amount of thermal radiation incident to the focal plane array.
Claim 11
Dependent Claim
43 words
The focal plane array of claim 8, wherein each thermal sensitive element is partially defined by at least one substantially vertical wall extending from a first face coupled with the common electrode to a second face coupled with an associated sensor signal electrode.
Claim 12
Dependent Claim
39 words
The focal plane array of claim 8, wherein the thermal sensitive elements are formed from pyroelectric material selected from the group consisting of barium strontium titanate, lead titanate, lead lanthanum titanate, lead zirconium titanate, and lead lanthanum zirconium titanate.
Claim 13
Dependent Claim
19 words
The focal plane array of claim 8, further comprising a thin, semi-transparent metal layer disposed over the optical coating.
References Cited (Backward Citations)
DE197806C
Cited
CA939943A
Cited
US3846820A
Cited
US4018608A
Cited
US4080532A
Cited
US4205227A
Cited
US4143269A
Cited
US4162402A
Cited
US4379232A
Cited
US4142207A
Cited
US4275302A
Cited
US4379971A
Cited
US4594507A
Cited
US4595832A
Cited
US4751387A
Cited
US4705361A
Cited
US4740700A
Cited
US4894544A
Cited
US5010251A
Cited
US5021663A
Cited
US5021663B1
Cited
US5008541A
Cited
US4927771A
Cited
US5051591A
Cited
US5264326A
Cited
US5047644A
Cited
US4994672A
Cited
GB2251952A
Cited
WO1991016607A1
Cited
US5196703A
Cited
US5238530A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-10-09 | 1999-04-10 | 1999-10-10 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-10-09 | 2003-04-10 | 2003-10-10 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-10-09 | 2007-04-10 | 2007-10-10 | $7700.00 | Window Closed / Lapsed |