High-speed external integrated optical modulator

Claim 2

A modulator for modulating optical waves with RF waves, comprising: a dielectric substrate; two optical waveguides situated at least partially within the substrate substantially parallel to each other; a transmission line including electrodes situated over the substrate for carrying the RF waves; a dielectric buffer layer for velocity matching the RF waves with the optical waves, situated generally between the substrate and the electrodes; and electrically floating electrode means generally situated between the substrate and the buffer layer, said floating electrode means including a series of electrically isolated floating electrode segments situated between said waveguides.

Claim 3

The modulator of claim 1 wherein said floating electrode means further includes a floating electrode associated with each waveguide, situated along side Of each waveguide opposite to said series of floating electrode segments.

Claim 4

The modulator of claim 1, wherein a portion of each of said optical waveguides is disposed above said substrate, and said portion is substantially rectangular in cross section thereby defining ridged waveguides.

Claim 5

The modulator of claim 1, wherein said optical waveguides are situated entirely within said substrate and made of titanium diffused into the dielectric substrate.

Claim 6

The modulator of claim 1, wherein the buffer layer has a dielectric constant lower than the dielectric constant of silicon dioxide.

Claim 7

The modulator of claim 1, wherein the dielectric buffer layer is a polymer.

Claim 8

The modulator of claim 1, wherein the RF transmission line has a characteristic impedance of approximately 50 Ω.

Claim 9

The modulator of claim 1, wherein the RF waves interact with the optical waves over a predetermined distance and the length of the floating electrode means is substantially equal to the interaction distance.

Claim 10

The modulator of claim 2, wherein the floating electrodes and segments are vacuum deposited onto the substrate and the RF electrodes are deposited over the buffer layer.

Claim 11

The modulator of claim 2, wherein the floating electrodes are of a generally rectangular shape and are situated substantially parallel to the waveguides.

Claim 12

A modulator for modulating optical waves with an electromagnetic signal comprising: an electro-optic substrate having at least one optical waveguide for carrying said optical waves; a buffer layer disposed over said substrate; an electric transmission line disposed over said buffer layer having a signal-carrying electrode for carrying said electromagnetic signal and at least one ground electrode selectively spaced from said signal-carrying electrode defining a shunt capacitance therebetween, said electromagnetic signal modulates said optical waves by producing an electric field between said signal-carrying electrode and said ground electrode which couples with said optical waveguide; and floating electrode means adjacent to at least one side of said waveguide for increasing the shunt capacitance between said electrodes proximate said optical waveguide for increasing the coupling between said electric field and said optical waveguide, said floating electrode means including a series of floating electrode segments disposed between said buffer layer and said substrate, generally parallel to one side of said waveguide.

Claim 13

A modulator for modulating optical waves with an electromagnetic signal comprising: an electro-optic substrate having at least one optical waveguide for carrying said optical waves; a buffer layer disposed over said substrate; an electric transmission line disposed over said buffer layer having a signal-carrying electrode for carrying said electromagnetic signal and at least one ground electrode selectively spaced from said signal-carrying electrode defining a shunt capacitance therebetween, said electromagnetic signal modulates said optical waves by producing an electric field between said signal-carrying electrode and said ground electrode which couples with said optical waveguide; and floating electrode means adjacent to at least one side of said waveguide for increasing the shunt capacitance between said electrodes proximate said optical waveguide for increasing the coupling between said electric field and said optical waveguide, said floating electrode means including a series of floating electrode segments disposed between said buffer layer and said substrate, generally parallel to one side of said waveguide.

Claim 14

A modulator according to claim 11 further comprising two optical waveguides and three RF electrodes wherein said floating electrode segments are disposed between said two optical waveguides.

Claim 15

A modulator according to claim 12 wherein said floating electrode means further includes two outer floating electrodes, each situated generally parallel to one of said two optical waveguides opposite from said floating electrode segments.

Claim 16

A modulator according to claim 11 wherein said buffer layer has a dielectric constant lower than the dielectric constant of said substrate.

Claim 17

A modulator according to claim 11 wherein said optical waveguide is a ridged waveguide.

Claim 18

An optical modulator, modulated by RF energy, comprising: a dielectric substrate; an optical waveguide situated proximate the substrate; a plurality of electrically floating electrodes placed over the substrate for intensifying an electric field generated by the RF waves proximate the optical waveguide; at least one of said floating electrodes comprised of a series of spaced electrode segments; an intermediate dielectric buffer layer placed over said floating electrodes; and a plurality of electrodes placed over the intermediate dielectric layer for carrying the modulated RF energy.

Claim 19

An optical modulator, modulated by RF energy, comprising: a dielectric substrate; an optical waveguide situated proximate the substrate; a plurality of electrically floating electrodes placed over the substrate for intensifying an electric field generated by the RF waves proximate the optical waveguide; at least one of said floating electrodes comprised of a series of spaced electrode segments; an intermediate dielectric buffer layer placed over said floating electrodes; and a plurality of electrodes placed over the intermediate dielectric layer for carrying the modulated RF energy.

Claim 20

A modulator according to claim 16 wherein said buffer layer has a dielectric constant lower than the dielectric constant of said substrate.

Claim 21

A modulator according to claim 16 wherein said optical waveguide is a ridged waveguide.