High-speed external modulator

Claim 2

An optical modulator for modulation of optical waves by RF energy guided for electro-optic interaction comprising: a dielectric substrate having a plurality of pathways oriented to serve respectively as an RF transmission line and an optical waveguide, said substrate dielectric being characterized by substantial electro-optic interaction, said pathways having means including overlapping portions for matching the velocity of said optical and RF waves along the overlapping portions, and a plurality of electrically floating electrodes located generally above the dielectric substrate and optical waveguide, and below a dielectric buffer layer which is situated generally below the RF transmission line.

Claim 3

The optical modulator of claim 1, wherein said velocity matching means includes means for lowering the effective dielectric constant of the RF transmission line to produce an RF wave velocity substantially equal to the optical wave velocity.

Claim 4

A modulator for modulating optical waves with RF waves, comprising: a dielectric substrate; an optical waveguide situated at least partially within the substrate; a transmission line including at least two electrodes situated over the substrate for carrying the modulating RF energy; a means for velocity matching the RF waves with the optical waves, situated generally between the substrate and the electrodes including a dielectric buffer layer; and at least one electrically floating electrode generally situated between the substrate and the buffer layer.

Claim 5

A modulator for modulating optical waves with RF waves, comprising: a dielectric substrate; an optical waveguide situated at least partially within the substrate; a transmission line including at least two electrodes situated over the substrate for carrying the modulating RF energy; a means for velocity matching the RF waves with the optical waves, situated generally between the substrate and the electrodes including a dielectric buffer layer; and at least one electrically floating electrode generally situated between the substrate and the buffer layer.

Claim 6

The modulator of claim 3, wherein the dielectric substrate is lithium niobate.

Claim 7

The modulator of claim 3, wherein the optical waveguide is titanium diffused into the dielectric substrate.

Claim 8

The modulator of claim 3, wherein the buffer layer has a dielectric constant lower than the dielectric constant of silicon dioxide.

Claim 9

The modulator of claim 3, wherein the dielectric buffer layer is a polyimide.

Claim 10

The modulator of claim 3, wherein the modulator is of the Mach-Zehnder design, having two optical waveguides and at least three RF electrodes.

Claim 11

The modulator of claim 8, wherein there are three floating electrodes situated generally parallel to the waveguides, one floating electrode between the waveguides and one each of the remaining two floating electrodes on the opposite side of each waveguide.

Claim 12

The modulator of claim 3, wherein the RF transmission line has a characteristic impedance of approximately 50Ω.

Claim 13

The modulator of claim 3, wherein the RF electrodes are gold electroplated over the buffer layer.

Claim 14

The modulator of claim 3, wherein the RF waves are in the microwave frequency range.

Claim 15

The modulator of claim 3, further comprising a transition from coaxial cable to the RF transmission line, the coaxial cable including an inner conductor, an insulating dielectric coaxially situated about the inner conductor, and an outer conductor coaxially situated about the insulating dielectric, the transition comprising: a dielectric slab, situated between the dielectric base and the ground plane, having a dielectric constant lower than the dielectric constant of the base; and a dielectric bridge having a dielectric constant greater than the dielectric constant of the base, situated over the slab and between the insulating dielectric and the base; and a conducting element positioned on the dielectric bridge, a first end of the conducting element electrically contacting the inner conductor and a second end of the conducting element electrically contacting an electrode of the transmission line.

Claim 16

An optical modulator, modulated by RF energy, comprising: a dielectric substrate; an optical waveguide situated proximate the substrate; a plurality of electrically floating electrodes placed over the substrate for intensifying an electric field generated by the RF waves proximate the optical waveguide; an intermediate dielectric layer placed over said floating electrodes; and a plurality of electrodes placed over the intermediate dielectric layer for carrying the modulated RF energy.

Claim 17

An optical modulator, modulated by RF energy, comprising: a dielectric substrate; an optical waveguide situated proximate the substrate; a plurality of electrically floating electrodes placed over the substrate for intensifying an electric field generated by the RF waves proximate the optical waveguide; an intermediate dielectric layer placed over said floating electrodes; and a plurality of electrodes placed over the intermediate dielectric layer for carrying the modulated RF energy.

Claim 18

The modulator of claim 14, wherein the floating electrodes are of a generally rectangular shape and are situated substantially parallel to the waveguide.

Claim 19

The modulator of claim 15, wherein the RF energy interacts with an optical wave over a predetermined distance and the length of the floating electrodes is substantially equal to the interaction distance.

Claim 20

The modulator of claim 16, wherein the intermediate layer is a polyimide.

Claim 21

The modulator of claim 14, wherein the floating electrodes are thin film electrodes which are vacuum deposited onto the substrate.

Claim 22

A transition from a coaxial cable to a coplanar transmission line, the coaxial cable including an inner conductor, an insulating dielectric coaxially situated about the inner conductor, and an outer conductor coaxially situated about the insulating dielectric; the coplanar transmission line including at least two electrically conductive strips situated above a dielectric base, the transition comprising: a dielectric slab, situated between the dielectric base and the ground plane, having a dielectric constant lower than the dielectric constant of the base; and a dielectric bridge having a dielectric constant greater than the dielectric constant of the base, situated over the slab and between the insulating dielectric and the base; and a conducting element positioned on the dielectric bridge, a first end of the conducting element electrically contacting the inner conductor and a second end of the conducting element electrically contacting the electrically conductive strip.

Claim 23

A transition from a coaxial cable to a coplanar transmission line, the coaxial cable including an inner conductor, an insulating dielectric coaxially situated about the inner conductor, and an outer conductor coaxially situated about the insulating dielectric; the coplanar transmission line including at least two electrically conductive strips situated above a dielectric base, the transition comprising: a dielectric slab, situated between the dielectric base and the ground plane, having a dielectric constant lower than the dielectric constant of the base; and a dielectric bridge having a dielectric constant greater than the dielectric constant of the base, situated over the slab and between the insulating dielectric and the base; and a conducting element positioned on the dielectric bridge, a first end of the conducting element electrically contacting the inner conductor and a second end of the conducting element electrically contacting the electrically conductive strip.

Claim 24

A modulator for modulating optical waves with an electromagnetic signal comprising: an electo-optic substrate having at least one optical waveguide for carrying said optical waves; a buffer layer disposed over said substrate; an electric transmission line disposed over said buffer layer having a signal-carrying electrode for carrying said electromagnetic signal and at least one ground electrode selectively spaced from said signal-carry electrode defining a shunt capacitance therebetween, said electromagnetic signal modulates said optical waves by producing an electric field between said signal-carrying electrode and said ground electrode which couples with said optical waveguide; and means for increasing the shunt capacitance between said electrodes proximate said optical waveguide for increasing the coupling between said electric field and said optical waveguide.

Claim 25

A modulator for modulating optical waves with an electromagnetic signal comprising: an electo-optic substrate having at least one optical waveguide for carrying said optical waves; a buffer layer disposed over said substrate; an electric transmission line disposed over said buffer layer having a signal-carrying electrode for carrying said electromagnetic signal and at least one ground electrode selectively spaced from said signal-carry electrode defining a shunt capacitance therebetween, said electromagnetic signal modulates said optical waves by producing an electric field between said signal-carrying electrode and said ground electrode which couples with said optical waveguide; and means for increasing the shunt capacitance between said electrodes proximate said optical waveguide for increasing the coupling between said electric field and said optical waveguide.

Claim 26

A modulator according to claim 20, wherein said means for increasing said shunt capacitance comprises two floating electrodes disposed between said buffer layer and said substrate, and on opposite sides of said waveguide.

Claim 27

A modulator according to claim 21 wherein said buffer layer has a dielectric constant lower than the dielectric constant of said substrate and a thickness of approximately 10 microns; and the spacing between the two floating electrodes is substantially less than the spacing between said signal carrying electrode and said ground electrode.