US5220627A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Electrically controlled optical device
Assignee: NTT Inc
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Filing: 1992-04-03
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Granted: 1993-06-15
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Expires: 2012-04-03
Abstract
Abstract An electrically controlled optical device effective index includes a traveling wave electrode, a shield conductor and a thick buffer layer of a low dielectric constant. The thickness of an overlaid layer disposed between the traveling wave electrode and the shield conductor as well as the thickness of the buffer layer is so determined that an effective index of a microwave transmitted through the traveling wave electrode approaches an effective index of light transmitted through an optical waveguide, and that a microwave conductor loss is reduced, and that a characteristic impedance of said traveling wave electrode approaches a characteristic impedance of an associated external microwave circuit.
Inventors
- 👤 Kenji Kawano
- 👤 Toshinori Nozawa
- 👤 Hiromichi Jumonji
- 👤 Tsutomu Kitou
- 👤 Osamu Mitomi
- 👤 Toshio Suzuki
- 👤 Mitsuaki Yanagihashi
- 👤 Kazuto Noguchi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 19:54
CPC Classifications
G; G02; G02F; G02F1/00; G02F1/01; G02F1/21; G02F1/225; G02F1/2255; G02F1/03; G02F1/035; G02F1/0356
Claims Analysis
Total Claims: 32
Claim 1
Independent Claim
49 words
A method of producing an electrically controlled optical device, comprising the steps of: forming at least one optical waveguide, a buffer layer and electrodes on a surface of a substrate having electro-optic effects; and subsequently fixing an electrical conductor in the vicinity of said electrodes to cover said electrodes.
Claim 2
Independent Claim
49 words
A method of producing an electrically controlled optical device, comprising the steps of: forming at least one optical waveguide, a buffer layer and electrodes on a surface of a substrate having electro-optic effects; and subsequently fixing an electrical conductor in the vicinity of said electrodes to cover said electrodes.
Claim 3
Dependent Claim
13 words
A method according to claim 1, wherein said conductor has a groove therein.
Claim 4
Dependent Claim
18 words
A method according to claim 1, wherein an overlaid layer is provided between said electrodes and said conductor.
Claim 5
Dependent Claim
37 words
A method according to claim 1, wherein said substrate is made of a substrate material, and further comprising the step of forming said conductor by metallizing a a support base which is made of said substrate material.
Claim 6
Independent Claim
116 words
A method of producing an electrically controlled optical device, comprising the steps of: (a) forming first and second parallel optical waveguides in a substrate of electro-optical material; (b) depositing polytetrafluoroethylene-type resin on the substrate to provide a buffer layer; (c) forming a travelling wave electrode structure on the buffer layer, the travelling wave electrode structure including two earth electrodes and a center electrode between the earth electrodes, the center electrode having a predetermined width and being spaced apart from the earth electrodes by gaps that are wider than the width of the center electrode; and (d) attaching a shield member to the earth electrodes, the shield member having a metallic portion which covers the center electrode.
Claim 7
Independent Claim
116 words
A method of producing an electrically controlled optical device, comprising the steps of: (a) forming first and second parallel optical waveguides in a substrate of electro-optical material; (b) depositing polytetrafluoroethylene-type resin on the substrate to provide a buffer layer; (c) forming a travelling wave electrode structure on the buffer layer, the travelling wave electrode structure including two earth electrodes and a center electrode between the earth electrodes, the center electrode having a predetermined width and being spaced apart from the earth electrodes by gaps that are wider than the width of the center electrode; and (d) attaching a shield member to the earth electrodes, the shield member having a metallic portion which covers the center electrode.
Claim 8
Dependent Claim
13 words
The method of claim 5, wherein step (b) is conducted by spin coating.
Claim 9
Dependent Claim
12 words
The method of claim 5, wherein step (b) is conducted by sputtering.
Claim 10
Dependent Claim
25 words
The method of claim 5, further comprising the step of etching the substrate to provide recessed regions adjacent the waveguides before step (b) is conducted.
Claim 11
Dependent Claim
61 words
The method of claim 5, wherein the shield member is a generally U-shaped metal element having a flat top portion with a predetermined thickness and having legs with a predetermined thickness, the thicknesses of the top portion and legs being substantially the same, and wherein step (d) is conducted by attaching the legs of the metal element to the earth electrodes.
Claim 12
Dependent Claim
36 words
The method of claim 5, wherein the shield member is a flat metal plate, and wherein step (d) is conducted by forming spacers on the earth electrodes, and mounting the flat metal plate on the spacers.
Claim 13
Dependent Claim
21 words
The method of claim 10, wherein the step of forming spacers on the earth electrodes is conducted by photolithography and plating.
Claim 14
Dependent Claim
62 words
The method of claim 5, wherein the shield member is a metal element having a flat top portion with a predetermined thickness and having legs with a predetermined thickness, the thickness of the legs being substantially greater than the thickness of the top portion, and wherein step (d) is conducted by attaching the legs of the metal element to the earth electrodes.
Claim 15
Dependent Claim
28 words
The method of claim 12, further comprising the step of making the metal element by etching a recess in a metal plate to provide the flat top portion.
Claim 16
Dependent Claim
88 words
The method of claim 5, wherein the substrate is made of a substrate material, wherein the shield member comprises a support base made of the substrate material and a metal element attached to the support base, the metal element having a flat top portion with a predetermined thickness and having legs with a predetermined thickness, the thickness of the legs being substantially greater than the thickness of the top portion, and wherein step (d) is conducted by attaching the legs of the metal element to the earth electrodes.
Claim 17
Dependent Claim
37 words
The method of claim 14, further comprising the step of making the shield member by depositing a metal layer on the support base and forming a recess in the metal layer to provide the flat top portion.
Claim 18
Dependent Claim
70 words
The method of claim 5, wherein the substrate is made of a substrate material, wherein the shield member comprises a support base made of the substrate material and a metal element attached to the support base, the metal element having a flat top portion and legs connected to the flat top portion, and wherein step (d) is conducted by attaching the legs of the metal element to the earth electrodes.
Claim 19
Dependent Claim
37 words
The method of claim 16, further comprising the step of making the shield member by etching a recess in the support base, and depositing a metal layer on the etched support base to provide the metal element.
Claim 20
Independent Claim
118 words
A method of producing an electrically controlled optical device, comprising the steps of: (a) forming first and second parallel optical waveguides in a substrate of electro-optical material; (b) depositing S i O 2 on the substrate to provide a buffer layer; (c) forming a travelling wave electrode structure on the buffer layer, the travelling wave electrode structure including two earth electrodes and a center electrode between the earth electrodes, the center electrode having a predetermined width and being spaced apart from the earth electrodes by gaps that are wider than the width of the center electrode; and (d) attaching a shield member to the earth electrodes, the shield member having a metallic portion which covers the center electrode.
Claim 21
Independent Claim
118 words
A method of producing an electrically controlled optical device, comprising the steps of: (a) forming first and second parallel optical waveguides in a substrate of electro-optical material; (b) depositing S i O 2 on the substrate to provide a buffer layer; (c) forming a travelling wave electrode structure on the buffer layer, the travelling wave electrode structure including two earth electrodes and a center electrode between the earth electrodes, the center electrode having a predetermined width and being spaced apart from the earth electrodes by gaps that are wider than the width of the center electrode; and (d) attaching a shield member to the earth electrodes, the shield member having a metallic portion which covers the center electrode.
Claim 22
Dependent Claim
15 words
The method of claim 18, wherein step (b) is conducted by plasma chemical vapor deposition.
Claim 23
Dependent Claim
25 words
The method of claim 18, further comprising the step of etching the substrate to provide recessed regions adjacent the waveguides before step (b) is conducted.
Claim 24
Dependent Claim
61 words
The method of claim 18, wherein the shield member is a generally U-shaped metal element having a flat top portion with a predetermined thickness and having legs with a predetermined thickness, the thicknesses of the top portion and legs being substantially the same, and wherein step (d) is conducted by attaching the legs of the metal element to the earth electrodes.
Claim 25
Dependent Claim
36 words
The method of claim 18, wherein the shield member is a flat metal plate, and wherein step (d) is conducted by forming spacers on the earth electrodes, and mounting the flat metal plate on the spacers.
Claim 26
Dependent Claim
21 words
The method of claim 22, wherein the step of forming spacers on the earth electrodes is conducted by photolithography and plating.
Claim 27
Dependent Claim
62 words
The method of claim 18, wherein the shield member is a metal element having a flat top portion with a predetermined thickness and having legs with a predetermined thickness, the thickness of the legs being substantially greater than the thickness of the top portion, and wherein step (d) is conducted by attaching the legs of the metal element to the earth electrodes.
Claim 28
Dependent Claim
28 words
The method of claim 24, further comprising the step of making the metal element by etching a recess in a metal plate to provide the flat top portion.
Claim 29
Dependent Claim
88 words
The method of claim 18, wherein the substrate is made of a substrate material, wherein the shield member comprises a support base made of the substrate material and a metal element attached to the support base, the metal element having a flat top portion with a predetermined thickness and having legs with a predetermined thickness, the thickness of the legs being substantially greater than the thickness of the top portion, and wherein step (d) is conducted by attaching the legs of the metal element to the earth electrodes.
Claim 30
Dependent Claim
37 words
The method of claim 26, further comprising the step of making the shield member by depositing a metal layer on the support base and forming a recess in the metal layer to provide the flat top portion.
Claim 31
Dependent Claim
70 words
The method of claim 18, wherein the substrate is made of a substrate material, wherein the shield member comprises a support base made of the substrate material and a metal element attached to the support base, the metal element having a flat top portion and legs connected to the flat top portion, and wherein step (d) is conducted by attaching the legs of the metal element to the earth electrodes.
Claim 32
Dependent Claim
37 words
The method of claim 28, further comprising the step of making the shield member by etching a recess in the support base, and depositing a metal layer on the etched support base to provide the metal element.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-06-14 | 1996-12-14 | 1997-06-15 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-06-14 | 2000-12-14 | 2001-06-15 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-06-14 | 2004-12-14 | 2005-06-15 | $7700.00 | Window Closed / Lapsed |