US5455202A
Expired / Lapsed
US
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Method of making a microelectric device using an alternate substrate
Assignee: Raytheon Co
•
Filing: 1993-01-19
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Granted: 1995-10-03
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Expires: 2013-01-19
Abstract
Abstract A microelectronic device is fabricated on a first substrate (40), and transferred to a second substrate (58). The first substrate (40) has a silicon etchable layer (42), a silicon dioxide etch-stop layer (44) overlying the etchable layer (42), and a single-crystal wafer (46) overlying the etch-stop layer (44). A microelectronic circuit element (48) is formed in the wafer (46) of the first substrate (40). The wafer (46) of the first substrate (40) is attached to an aluminum oxide temporary substrate (52), and the etchable layer (42) of the first substrate (40) is etched away down to the etch-stop layer (44) to leave a primary device structure. The etch-stop layer (44) may optionally be processed to remove all or a part of the layer. An exposed surface (56) of the primary device structure is fixed to the second substrate (58), and the temporary substrate (52) is removed.
Inventors
- 👤 Gerard T. Malloy
- 👤 Joseph J. Bendik
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 17:32
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/70; H10P72/74; H10P72/7402; H10P72/7416; H10P72/7422; H10P72/743; H10P72/7434; Y; Y10; Y10S; Y10S148/00; Y10S148/012
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
141 words
A method of fabricating a microelectronic device, comprising the steps of: furnishing a first substrate having a silicon etchable layer, a silicon dioxide etch-stop layer overlying the etchable layer, and a silicon wafer overlying the etch-stop layer and having a front exposed surface; forming a microelectronic circuit element in the wafer of the first substrate; attaching the front exposed surface of the wafer portion of the first substrate to a temporary substrate; etching away the etchable layer of the first substrate down to the etch-stop layer to leave a primary device structure; furnishing a second substrate made of a material selected from the group consisting of aluminum oxide and gallium arsenide; fixing an exposed surface of the primary device structure remote from the temporary substrate to the second substrate; and removing the temporary substrate from contact with the front exposed surface.
Claim 2
Independent Claim
141 words
A method of fabricating a microelectronic device, comprising the steps of: furnishing a first substrate having a silicon etchable layer, a silicon dioxide etch-stop layer overlying the etchable layer, and a silicon wafer overlying the etch-stop layer and having a front exposed surface; forming a microelectronic circuit element in the wafer of the first substrate; attaching the front exposed surface of the wafer portion of the first substrate to a temporary substrate; etching away the etchable layer of the first substrate down to the etch-stop layer to leave a primary device structure; furnishing a second substrate made of a material selected from the group consisting of aluminum oxide and gallium arsenide; fixing an exposed surface of the primary device structure remote from the temporary substrate to the second substrate; and removing the temporary substrate from contact with the front exposed surface.
Claim 3
Dependent Claim
23 words
The method of claim 1, wherein the step of etching away includes the step of contacting the etchable layer with a liquid etchant.
Claim 4
Dependent Claim
24 words
The method of claim 2, wherein the etchant is selected from the group consisting of aqueous potassium hydroxide solution and aqueous sodium hydroxide solution.
Claim 5
Dependent Claim
34 words
The method of claim 1, wherein the step of fixing includes the step of placing a layer of epoxy between the second substrate and the primary device structure, and degassing and curing the epoxy.
Claim 6
Dependent Claim
53 words
The method of claim 1, wherein the silicon etchable layer of the first substrate is about 500 micrometers in thickness, the silicon dioxide etch-stop layer of the first substrate is about 1 micrometer in thickness, and the wafer of the first substrate is from about 30 nanometers to about 50 micrometers in thickness.
Claim 7
Dependent Claim
12 words
The method of claim 1, wherein the wafer is a single crystal.
Claim 8
Dependent Claim
36 words
The method of claim 1, including the additional step, after the step of etching away and before the step of fixing, of processing the etch-stop layer to remove at least a portion of the etch-stop layer.
Claim 9
Dependent Claim
18 words
The method of claim 7, wherein the step of processing includes the step of removing the etch-stop layer.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-10-02 | 1999-04-03 | 1999-10-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-10-02 | 2003-04-03 | 2003-10-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-10-02 | 2007-04-03 | 2007-10-03 | $7700.00 | Window Closed / Lapsed |