US5451655A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Process for making thermostable coating materials
Assignee: International Business Machines Corp
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Filing: 1994-05-27
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Granted: 1995-09-19
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Expires: 2014-05-27
Abstract
Abstract Thermostable compounds are prepared by mixing perylene dianhydride with one or more aminosilanes in a molar ratio of 1:4 in an inert solvent, and the aminosilanes may comprise aminoalkylakoxysilanes. Upon heating the mixture a thermostable coating is formed. Prior to heating the mixture may be spin-applied to a substrate. The coating may be used in semiconductor device fabrication as the mixture has good spin-on characteristics with the cured compound being thermally stable over 600° C. and having good etch characteristics.
Inventors
- 👤 Harold G. Linde
- 👤 Rosemary A. Previti-Kelly
- 👤 Thomas J. Reen
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 17:17
CPC Classifications
C; C09; C09D; C09D183/00; C09D183/14; C07; C07F; C07F7/00; C07F7/02; C07F7/08; C07F7/10; C08; C08G; C08G73/00; C08G73/06; C08G73/10; C08G73/1057; C08G73/106; C08G73/1075; C08G73/1082; C08G77/00; C08G77/48; C08G77/54; Y; Y10; Y10T; Y10T428/00; Y10T428/31504; Y10T428/31652; Y10T428/31663
Claims Analysis
Total Claims: 16
Claim 1
Independent Claim
87 words
A process comprising: mixing, as reactants, perylene dianhydride with one or more aminosilanes in a molar ratio of 1:4 in an inert solvent, said aminosilanes having a formula of: ##STR6## wherein R is selected from the group consisting of H, alkyl and alkylamine; X is selected from the group consisting of alkylene of at least 2 carbons and arylene, Z is alkylene or a direct bond; Y is selected from the group consisting of alkoxy, halo and silazane; and heating said reactants thereby forming a thermostable coating.
Claim 2
Dependent Claim
87 words
A process comprising: mixing, as reactants, perylene dianhydride with one or more aminosilanes in a molar ratio of 1:4 in an inert solvent, said aminosilanes having a formula of: ##STR6## wherein R is selected from the group consisting of H, alkyl and alkylamine; X is selected from the group consisting of alkylene of at least 2 carbons and arylene, Z is alkylene or a direct bond; Y is selected from the group consisting of alkoxy, halo and silazane; and heating said reactants thereby forming a thermostable coating.
Claim 3
Dependent Claim
10 words
The process of claim 1 wherein said aminosilane is aminopropyltriethoxysilane.
Claim 4
Dependent Claim
27 words
The process of claim 2 comprising the additional step of adding from 0.5 to about 1.5 μl water per ml of aminosilane before mixing with perylene dianhydride.
Claim 5
Dependent Claim
22 words
The process of claim 2 wherein water is added to aminosilane from 1 to 2 hours before mixing with the perylene dianhydride.
Claim 6
Dependent Claim
19 words
The process of claim 4 wherein the mixture of the perylene dianhydride and aminosilane is aged prior to heating.
Claim 7
Dependent Claim
21 words
The process of claim 1 wherein, in the heating of said reactants, the temperature is increased to 100° to 200° C.
Claim 8
Dependent Claim
20 words
The process of claim 6 wherein in the heating of said reactants, the temperature is increased to approximately 150° C.
Claim 9
Dependent Claim
20 words
The process of claim 6 comprising the additional step of curing at a temperature between 500° C. and 620° C.
Claim 10
Dependent Claim
29 words
The method of claim 1 further comprising the steps of: providing a substrate incorporating integrated circuit elements; and applying said mixture to the substrate prior to heating said reactants.
Claim 11
Dependent Claim
15 words
The method according to claim 9 wherein said mixture is applied by a spin-on technique.
Claim 12
Dependent Claim
18 words
The method of claim 9 comprising the additional step of removing at least a portion of said coating.
Claim 13
Dependent Claim
22 words
The method of claim 11 wherein at least a portion of said coating is removed by 80:20 oxygen/CF 4 reactive ion etching.
Claim 14
Dependent Claim
18 words
The method of claim 11 wherein at least a portion of said coating is removed by chemical-mechanical polishing.
Claim 15
Dependent Claim
33 words
The method of claim 9 wherein said mixture is heated at a temperature of 500° C. to 620° C. for approximately 30 minutes after being applied to said substrate, thereby curing said mixture.
Claim 16
Dependent Claim
28 words
The method of claim 11 wherein the applied coating is subjected to a temperature exceeding 500° C. prior to removal of at least a portion of said film.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-09-18 | 1999-03-20 | 1999-09-19 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-09-18 | 2003-03-20 | 2003-09-19 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-09-18 | 2007-03-20 | 2007-09-19 | $7700.00 | Window Closed / Lapsed |