MOCVD process using alkaline earth metal-heptane dionate compounds

Claim 1

A process for depositing an alkaline earth metal-containing layer on a substrate comprising the steps of: providing an alkaline earth metal-diketonate compound corresponding to the formula (I): M(R).sub.2 (I) M(R) 2 (I) wherein M represents calcium, strontium or barium, and R represents 2,6-dimethyl-3,5-heptane dionate, 2,2,6-trimethyl-3,5-heptane dionate or 2,2,6,6-tetramethyl-3,5-heptane dionate, said alkaline earth metal-diketonate compound being obtained by a process comprising the steps of: mixing a solution or suspension of a compound of the metal M in water or in a water-containing water-miscible solvent with a diketone selected from the group consisting of 2,6-dimethyl-3,5-heptane dione, 2,2,6-trimethyl-3,5-heptane dione and 2,2,6,6-tetramethyl-3,5-heptane dione to react said compound of the metal M with said diketone; . separating the resulting compound of Formula (I) from the mixture; and vacuum drying said separated compound of Formula (I) at a temperature of at most 60° C. until said compound of Formula (I) exhibits a 1 H-NMR spectrum in which a water proton signal cannot be detected; vaporizing said alkaline earth metal diketonate compound, and decomposing the vaporized-alkaline earth metal diketonate compound in the presence of said substrate.