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US5449799A
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Compound for depositing copper layers
Assignee: Individual
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Filing: 1993-07-06
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Granted: 1995-09-12
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Expires: 2013-07-06
Abstract
Abstract Described is the deposition of copper-containing layers on substrates by decomposition of organometallic copper compounds containing acetylacetonato or substituted acetylacetonato and isonitrile. The decomposition is preferably carried out in accordance with CVD method.
Inventors
- 👤 Christian Terfloth
- 👤 Thomas Kruck
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 09:36
CPC Classifications
C; C07; C07F; C07F1/00; C07F1/005; C23; C23C; C23C16/00; C23C16/06; C23C16/18
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
209 words
A compound represented by formula (I) R-Cu-L.sub.n (I) wherein R represents acetylacetonato, substituted acetylacetonato of the formula X 1 C(O)CX 2 C(O)X 3 , pentane-2-keto-4-ketiminato, substituted β-ketiminato of the formula X 1 C(O)CX 2 C(NX 4 )X 3 , 2,4-pentane-diketiminato or substituted β-diketiminato of the formula X 1 C(NX 4 )CX 2 C(NX 5 )X 3 , wherein X 1 and X 3 may be the same or different and represent a linear or branched alkyl having from 1 to 5 carbon atoms, halogen-substituted linear or branched alkyl having from 1 to 7 carbon atoms, aryl, substituted phenyl or organylsilyl, and X 2 , X 4 and X 5 may be the same or different and represent hydrogen, halogen, linear or branched alkyl having from 1 to 5 carbon atoms, halogen substituted linear or branched alkyl having from 1 to 7 carbon atoms, aryl or organosilyl; L represents (C 1 -C 10 -alkyl) isonitrile, halogen-substituted linear or branched alkylisonitrile having from 1 to 5 carbon atoms, arylisonitrile, or organosilylisonitrile; and n represents the number of complex-bonded groups L in the compound (I), where n may assume values of from 1 to 4; except that L is not tert-butylisonitrile or phenyl isonitrile when n is 2 and R is acetylacetonato.
Claim 2
Dependent Claim
209 words
A compound represented by formula (I) R-Cu-L.sub.n (I) wherein R represents acetylacetonato, substituted acetylacetonato of the formula X 1 C(O)CX 2 C(O)X 3 , pentane-2-keto-4-ketiminato, substituted β-ketiminato of the formula X 1 C(O)CX 2 C(NX 4 )X 3 , 2,4-pentane-diketiminato or substituted β-diketiminato of the formula X 1 C(NX 4 )CX 2 C(NX 5 )X 3 , wherein X 1 and X 3 may be the same or different and represent a linear or branched alkyl having from 1 to 5 carbon atoms, halogen-substituted linear or branched alkyl having from 1 to 7 carbon atoms, aryl, substituted phenyl or organylsilyl, and X 2 , X 4 and X 5 may be the same or different and represent hydrogen, halogen, linear or branched alkyl having from 1 to 5 carbon atoms, halogen substituted linear or branched alkyl having from 1 to 7 carbon atoms, aryl or organosilyl; L represents (C 1 -C 10 -alkyl) isonitrile, halogen-substituted linear or branched alkylisonitrile having from 1 to 5 carbon atoms, arylisonitrile, or organosilylisonitrile; and n represents the number of complex-bonded groups L in the compound (I), where n may assume values of from 1 to 4; except that L is not tert-butylisonitrile or phenyl isonitrile when n is 2 and R is acetylacetonato.
Claim 3
Dependent Claim
47 words
The compound according to claim 1, characterized in that X 1 and X 3 represent alkyl or alkyl substituted with halogen, said alkyl having been selected from the group consisting of methyl, ethyl, propyl, butyl, pentyl, isopropyl, t-butyl, and neopentyl; trifluoromethyl; nonafluorobutyl; phenyl; tolyl; trimethylsilyl; or triethysilyl.
Claim 4
Dependent Claim
45 words
The compound according to claim 1, characterized in that X 2 , X 4 and X 5 represent hydrogen; chlorine; fluorine; alkyl or alkyl-substituted with halogen, said alkyl being selected from methyl, ethyl, propyl, butyl, pentyl, and isopropyl; trifluoromethyl; triethylesilyl; phenyl; substituted phenyl; or tolyl.
Claim 5
Dependent Claim
28 words
The compound according to claim 1, wherein at least one of X 1 , X 2 , X 3 , X 4 and X 5 represent fluoro-substituted alkyl.
Claim 6
Dependent Claim
25 words
The compound according to claim 1, characterized in that L represents (C 1 -C 6 -alkyl) isontrile, fluoro-substituted linear or branched alkylisonitrile, phenylisonitrile or tolylisonitrile.
Claim 7
Dependent Claim
19 words
The compound according to claim 1, characterized in that L represents methylisonitrile, t-butylisonitrile, neopentylisonitrile, cyclohexylisonitrile, phenylisonitrile, trimethylsilylisonitrile or triethylsilylisonitrile.
Claim 8
Dependent Claim
22 words
The compound according to claim 1, characterized in that R represents trifiuoromethylacetylacetonato; hexafluorooctane-2,4-dionato; 5,5-dimethylhexane-2,4-dionato; 2,2,6,6-tetramethylheptane-3,5-dionato; benzoylacetonato; pentane-2-imine-4-ketonato; pentane-2-(N-ethyl)imine-4-ketonato, pentane-2-(N-isopropyl)imine-4-ketonato; pentane-2,4-diketiminato; or pentane-2,4-(N-ethyl)diketiminato.
Claim 9
Dependent Claim
25 words
The compound according to claim 6, characterized in that R represents trifiuoromethylacetylacetonato; hexafluorooctane-2,4-dionato; 5,5 -dimethylhexane-2,4 -dionato; 2,2,6,6-tetramethylheptane-3,5 -dionato; benzoylacetonato; pentane-2-imine-4-ketonato; pentane-2-(N-ethyl)imine-4-ketonato, pentane-2-(N-isopropyl)imine-4-ketonato; pentane-2,4-diketiminato; or pentane-2,4-(N-ethyl,N'-ethyl)diketiminato.
References Cited (Backward Citations)
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| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 1998-09-11 | 1999-03-13 | 1999-09-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-09-11 | 2003-03-13 | 2003-09-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-09-11 | 2007-03-13 | 2007-09-12 | $7700.00 | Window Closed / Lapsed |