Insulated-gate-type field effect transistor which has subgates that have different spacing from the substrate than the main gate

Claim 1

An insulated-gate type field effect transistor comprising: an active layer made of a semiconductor of a low impurity concentration; a source electrode and a drain electrode formed on said active layer and each of said source electrode and said drain electrode made of a metal conducting film; a main gate electrode formed between said source electrode and said drain electrode on a gate insulating film so as to face said active layer; a first subgate electrode formed between said drain electrode and said main gate electrode in said gate insulating film and spaced closer to said active layer than said main gate electrode; and a second subgate electrode formed between said source electrode and said main gate electrode in said gate insulating film and spaced closer to said active layer than said main gate electrode and said first and second subgate electrodes symmetrically arranged relative to said main gate electrode, and the thickness of said gate insulating film between a first edge of said main gate electrode and a first edge of said first subgate electrode and the thickness of said gate insulating film between a second edge of said main gate electrode and a first edge of said second subgate electrode being thinner than the thickness of said gate insulating film between a second edge of said first subgate electrode and said active layer and the thickness of said gate insulating film between a second edge of second subgate electrode and said active layer, and a planar channel formed between said source electrode and said drain electrode.