US5430344A
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US
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Piezoelectric/electrostrictive element having ceramic substrate formed essentially of stabilized zirconia
Assignee: NGK Insulators Ltd
•
Filing: 1994-05-09
•
Granted: 1995-07-04
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Expires: 2014-05-09
Abstract
Abstract A piezoelectric/electrostrictive element including a thin ceramic substrate, and a piezoelectric/electrostrictive portion formed on the ceramic substrate by a film forming technique without an adhesive agent, the piezoelectric/electrostrictive portion consisting essentially of a plurality of electrodes and at least one piezoelectric/electrostrictive layer. The ceramic substrate is formed of a material which includes as a major component zirconia having a crystal phase that is stabilized by addition of at least one compound selected from the group consisting of: yttrium oxide, ytterbium oxide, cerium oxide, calcium oxide and magnesium oxide.
Inventors
- 👤 Yukihisa Takeuchi
- 👤 Koji Kimura
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 19:33
CPC Classifications
H; H10; H10N; H10N30/00; H10N30/704; H10N30/706; H10N30/20; H10N30/204; H10N30/2041; H10N30/2042; H10N30/2047
Claims Analysis
Total Claims: 39
Claim 1
Independent Claim
115 words
A piezoelectric/electrostrictive element comprising: a thin ceramic substrate; and a piezoelectric/electrostrictive portion formed on said ceramic substrate by a film forming technique without an adhesive agent such that the piezoelectric/electrostrictive portion directly contacts said ceramic substrate, said piezoelectric/electrostrictive portion consisting essentially of a plurality of electrodes, and at least one piezoelectric/electrostrictive layer which is heat-treated, wherein said ceramic substrate is formed of a material which includes as a major component zirconia having a crystal phase that is stabilized by addition of at least one compound selected from the group consisting of: yttrium oxide, ytterbium oxide, cerium oxide, calcium oxide and magnesium oxide, and said ceramic substrate has an average crystal grain size of 0.05-3 μm.
Claim 2
Dependent Claim
115 words
A piezoelectric/electrostrictive element comprising: a thin ceramic substrate; and a piezoelectric/electrostrictive portion formed on said ceramic substrate by a film forming technique without an adhesive agent such that the piezoelectric/electrostrictive portion directly contacts said ceramic substrate, said piezoelectric/electrostrictive portion consisting essentially of a plurality of electrodes, and at least one piezoelectric/electrostrictive layer which is heat-treated, wherein said ceramic substrate is formed of a material which includes as a major component zirconia having a crystal phase that is stabilized by addition of at least one compound selected from the group consisting of: yttrium oxide, ytterbium oxide, cerium oxide, calcium oxide and magnesium oxide, and said ceramic substrate has an average crystal grain size of 0.05-3 μm.
Claim 3
Dependent Claim
30 words
A piezoelectric/electrostrictive element according to claim 1, wherein said at least one compound consists of yttrium oxide, said material of said ceramic substrate containing 1.0-30 mole % of yttrium oxide.
Claim 4
Dependent Claim
21 words
A piezoelectric/electrostrictive element according to claim 2, wherein said material of said ceramic substrate contains 1.5-6 mole % of yttrium oxide.
Claim 5
Dependent Claim
21 words
A piezoelectric/electrostrictive element according to claim 3, wherein said material of said ceramic substrate contains 2-4 mole % of yttrium oxide.
Claim 6
Dependent Claim
19 words
A piezoelectric/electrostrictive element according to claim 1, wherein said ceramic substrate has a thickness not larger than 50 μm.
Claim 7
Dependent Claim
26 words
A piezoelectric/electrostrictive element according to claim 1, wherein said material of said ceramic substrate further includes at least one of aluminum oxide, titanium oxide and clay.
Claim 8
Dependent Claim
50 words
A piezoelectric/electrostrictive element according to claim 1, wherein said at least one piezoelectric/electrostrictive layer is formed of a piezoelectric/electrostrictive material which includes as a major component a mixture of lead magnesium niobate, lead nickel niobate and lead zirconate titanate, or a mixture of lead magnesium niobate and lead zirconate titanate.
Claim 9
Dependent Claim
47 words
A piezoelectric/electrostrictive element according to claim 1, wherein said at least one piezoelectric/electrostrictive layer is formed of a piezoelectric/electrostrictive material which consists of a mixture of lead magnesium niobate, lead nickel niobate and lead zirconate titanate, or a mixture of lead magnesium niobate and lead zirconate titanate.
Claim 10
Dependent Claim
24 words
A piezoelectric/electrostrictive element according to claim 1, wherein each of said at least one piezoelectric/electrostrictive layer has a thickness not larger than 50 μm.
Claim 11
Dependent Claim
19 words
A piezoelectric/electrostrictive element according to claim 1, wherein said piezoelectric/electrostrictive portion has a thickness not larger than 100 μm.
Claim 12
Dependent Claim
36 words
A piezoelectric/electrostrictive element according to claim 1, wherein said piezoelectric/electrostrictive portion consists of a plurality of piezoelectric/electrostrictive units which are formed on said ceramic substrate such that said plurality of units are laminated on each other.
Claim 13
Dependent Claim
41 words
A piezoelectric/electrostrictive element according to claim 1, wherein said piezoelectric/electrostrictive portion consists of a plurality of piezoelectric/electrostrictive units which are formed on said ceramic substrate such that said plurality of units are disposed in parallel with each other on the substrate.
Claim 14
Dependent Claim
30 words
A piezoelectric/electrostrictive element according to claim 1, wherein said ceramic substrate has at least one recess which defines at least one thin-walled portions on which said piezoelectric/electrostrictive portion is formed.
Claim 15
Dependent Claim
22 words
A piezoelectric/electrostrictive element according to claim 1, wherein said ceramic substrate has a surface roughness (Ra) within a range of 0.03-0.9 μm.
Claim 16
Dependent Claim
131 words
A piezoelectric/electrostrictive element comprising: a thin ceramic substrate; and a piezoelectric/electrostrictive portion formed on said ceramic substrate by a film forming technique without an adhesive agent such that the piezoelectric/electrostrictive portion directly contacts said ceramic substrate, said piezoelectric/electrostrictive portion consisting essentially of a plurality of electrodes, and at least one piezoelectric/electrostrictive layer which is heat-treated, wherein said ceramic substrate is formed of a material which includes as a major component zirconia having a crystal phase that is partially stabilized by addition of at least one compound selected from the group consisting of: yttrium oxide, cerium oxide, magnesium oxide and calcium oxide, said crystal phase consisting essentially of one of a tetragonal phase and a combination of at least two kinds of the tetragonal phase, a cubic phase and a monoclinic phase.
Claim 17
Dependent Claim
131 words
A piezoelectric/electrostrictive element comprising: a thin ceramic substrate; and a piezoelectric/electrostrictive portion formed on said ceramic substrate by a film forming technique without an adhesive agent such that the piezoelectric/electrostrictive portion directly contacts said ceramic substrate, said piezoelectric/electrostrictive portion consisting essentially of a plurality of electrodes, and at least one piezoelectric/electrostrictive layer which is heat-treated, wherein said ceramic substrate is formed of a material which includes as a major component zirconia having a crystal phase that is partially stabilized by addition of at least one compound selected from the group consisting of: yttrium oxide, cerium oxide, magnesium oxide and calcium oxide, said crystal phase consisting essentially of one of a tetragonal phase and a combination of at least two kinds of the tetragonal phase, a cubic phase and a monoclinic phase.
Claim 18
Dependent Claim
28 words
A piezoelectric/electrostrictive element according to claim 16, wherein said crystal phase of said ceramic substrate consists essentially of a combination of the cubic phase and the tetragonal phase.
Claim 19
Dependent Claim
22 words
A piezoelectric/electrostrictive element according to claim 15, wherein said ceramic substrate has a surface roughness (Ra) within a range of 0.03-0.9 μm.
Claim 20
Dependent Claim
30 words
A piezoelectric/electrostrictive element according to claim 15, wherein said at least one compound consists of yttrium oxide, said material of said ceramic substrate containing 2-7 mole % of yttrium oxide.
Claim 21
Dependent Claim
21 words
A piezoelectric/electrostrictive element according to claim 15, wherein said material of said ceramic substrate contains 2-4 mole % of yttrium oxide.
Claim 22
Dependent Claim
30 words
A piezoelectric/electrostrictive element according to claim 15, wherein said at least one compound consists of cerium oxide, said material of said ceramic substrate containing 6-16 mole % of cerium oxide.
Claim 23
Dependent Claim
38 words
A piezoelectric/electrostrictive element according to claim 15, wherein said at least one compound consists of magnesium oxide or calcium oxide, said material of said ceramic substrate containing 5-12 mole % of the magnesium oxide or the calcium oxide.
Claim 24
Dependent Claim
19 words
A piezoelectric/electrostrictive element according to claim 15, wherein said ceramic substrate has a thickness not larger than 50 μm.
Claim 25
Dependent Claim
20 words
A piezoelectric/electrostrictive element according to claim 15, wherein said ceramic substrate has an average crystal grain size of 0.05-3 μm.
Claim 26
Dependent Claim
19 words
A piezoelectric/electrostrictive element according to claim 23, wherein said average crystal grain size is not larger than 1 μm.
Claim 27
Dependent Claim
29 words
A piezoelectric/electrostrictive element according to claim 15, wherein a powder formed of said material of said ceramic substrate has an average crystal grain size not larger than 0.1 μm.
Claim 28
Dependent Claim
26 words
A piezoelectric/electrostrictive element according to claim 15, wherein said material of said ceramic substrate further includes at least one of aluminum oxide, titanium oxide and clay.
Claim 29
Dependent Claim
50 words
A piezoelectric/electrostrictive element according to claim 15, wherein said at least one piezoelectric/electrostrictive layer is formed of a piezoelectric/electrostrictive material which includes as a major component a mixture of lead magnesium niobate, lead nickel niobate and lead zirconate titanate, or a mixture of lead magnesium niobate and lead zirconate titanate.
Claim 30
Dependent Claim
47 words
A piezoelectric/electrostrictive element according to claim 15, wherein said at least one piezoelectric/electrostrictive layer is formed of a piezoelectric/electrostrictive material which consists of a mixture of lead magnesium niobate, lead nickel niobate and lead zirconate titanate, or a mixture of lead magnesium niobate and lead zirconate titanate.
Claim 31
Dependent Claim
19 words
A piezoelectric/electrostrictive element according to claim 15, wherein said piezoelectric/electrostrictive layer has a thickness not larger than 50 μm.
Claim 32
Dependent Claim
19 words
A piezoelectric/electrostrictive clement according to claim 15, wherein said piezoelectric/electrostrictive portion has a thickness not larger than 100 μm.
Claim 33
Dependent Claim
36 words
A piezoelectric/electrostrictive element according to claim 15, wherein said piezoelectric/electrostrictive portion consists of a plurality of piezoelectric/electrostrictive units which are formed on said ceramic substrate such that said plurality of units are laminated on each other.
Claim 34
Dependent Claim
41 words
A piezoelectric/electrostrictive element according to claim 15, wherein said piezoelectric/electrostrictive portion consists of a plurality of piezoelectric/electrostrictive units which are formed on said ceramic substrate such that said plurality of units are disposed in parallel with each other on the substrate.
Claim 35
Dependent Claim
30 words
A piezoelectric/electrostrictive element according to claim 15, wherein said ceramic substrate has at least one recess which defines at least one thin-walled portions on which said piezoelectric/electrostrictive portion is formed.
Claim 36
Dependent Claim
145 words
A piezoelectric/electrostrictive element comprising: a thin ceramic substrate; and a piezoelectric/electrostrictive portion formed on said ceramic substrate by a film forming technique without an adhesive agent such that the piezoelectric/electrostrictive portion directly contacts said ceramic substrate, said piezoelectric/electrostrictive portion consisting essentially of a plurality of electrodes, and at least one piezoelectric/electrostrictive layer which is heat-treated, wherein said ceramic substrate is formed of a material which includes as a major component zirconia having a crystal phase that is partially stabilized by addition of at least one compound selected from the group consisting of: yttrium oxide, cerium oxide, magnesium oxide and calcium oxide, said crystal phase consisting essentially of one of a tetragonal phase and a combination of at least two kinds of the tetragonal phase, a cubic phase and a monoclinic phase, said ceramic substrate having a surface roughness (Ra) within a range of 0.03-0.9 μm.
Claim 37
Dependent Claim
145 words
A piezoelectric/electrostrictive element comprising: a thin ceramic substrate; and a piezoelectric/electrostrictive portion formed on said ceramic substrate by a film forming technique without an adhesive agent such that the piezoelectric/electrostrictive portion directly contacts said ceramic substrate, said piezoelectric/electrostrictive portion consisting essentially of a plurality of electrodes, and at least one piezoelectric/electrostrictive layer which is heat-treated, wherein said ceramic substrate is formed of a material which includes as a major component zirconia having a crystal phase that is partially stabilized by addition of at least one compound selected from the group consisting of: yttrium oxide, cerium oxide, magnesium oxide and calcium oxide, said crystal phase consisting essentially of one of a tetragonal phase and a combination of at least two kinds of the tetragonal phase, a cubic phase and a monoclinic phase, said ceramic substrate having a surface roughness (Ra) within a range of 0.03-0.9 μm.
Claim 38
Dependent Claim
104 words
A piezoelectric/electrostrictive element consisting essentially of: a thin ceramic substrate; and a piezoelectric/electrostrictive portion formed on said ceramic substrate by a film forming technique without an adhesive agent such that the piezoelectric/electrostrictive portion directly contacts said ceramic substrate, said piezoelectric/electrostrictive portion consisting essentially of a plurality of electrodes, and at least one piezoelectric/electrostrictive layer which is heat-treated, wherein said ceramic substrate is formed of a material which includes as a major component zirconia having a crystal phase that is stabilized by addition of at least one compound selected from the group consisting of: yttrium oxide, ytterbium oxide, cerium oxide, calcium oxide and magnesium oxide.
Claim 39
Dependent Claim
104 words
A piezoelectric/electrostrictive element consisting essentially of: a thin ceramic substrate; and a piezoelectric/electrostrictive portion formed on said ceramic substrate by a film forming technique without an adhesive agent such that the piezoelectric/electrostrictive portion directly contacts said ceramic substrate, said piezoelectric/electrostrictive portion consisting essentially of a plurality of electrodes, and at least one piezoelectric/electrostrictive layer which is heat-treated, wherein said ceramic substrate is formed of a material which includes as a major component zirconia having a crystal phase that is stabilized by addition of at least one compound selected from the group consisting of: yttrium oxide, ytterbium oxide, cerium oxide, calcium oxide and magnesium oxide.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-07-03 | 1999-01-02 | 1999-07-04 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-07-03 | 2003-01-02 | 2003-07-04 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-07-03 | 2007-01-02 | 2007-07-04 | $7700.00 | Window Closed / Lapsed |