EP0408305A2
Expired / Lapsed
EP
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Piezoelectric/electrostrictive actuator
Assignee: NGK Insulators Ltd
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Filing: 1990-07-10
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Granted: —
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Expires: 2010-07-10
Abstract
Abstract A piezoelectric/electrostrictive actuator comprising a substrate (2), a plurality of electrodes (4) in the form of strips formed on at least one surface of the substrate such that the electrode strips are spaced from each other in a direction parallel to the substrate surface, and a piezoelectric/electrostrictive portion (6, 6a) which is disposed between the adjacent strips of the electrodes in the spacing direction, and in contact with the adjacent electrode strips. The piezoelectric/electrostrictive portion produces a flexural displacement or force due to at least the longitudinal mode of converse piezoelectric or electrostrictive effect upon application of a voltage between the adjacent electrode strips.
Inventors
- 👤 Yukihisa Takeuchi
- 👤 Masato Komazawa
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-01 15:29
CPC Classifications
B; B41; B41J; B41J2/00; B41J2/005; B41J2/01; B41J2/135; B41J2/14; B41J2/14201; B41J2/14274; B41J2/16; B41J2/1607; B41J2/1612; B41J2/1621; B41J2/1626; B41J2/1631; B41J2/1632; B41J2/1634; B41J2/164; B41J2/1642; B41J2/1643; B41J2/1645; B41J2/1646; H; H10; H10N; H10N30/00; H10N30/01; H10N30/07; H10N30/074; H10N30/20; H10N30/204; H10N30/2041; H10N30/2042; H10N30/2047; H10W; H10W20/00; H10W20/01; H10W20/071; H10W20/072; H10W20/40; H10W20/45; H10W20/46; B41J2/14233; B41J2002/14258; H01; H01H; H01H57/00; H01H2057/006; Y; Y10; Y10T; Y10T29/00; Y10T29/42
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
110 words
A piezoelectric/electrostrictive actuator comprising a substrate (2), a plurality of electrodes (4) in the form of strips formed on at least a portion of at least one surface of the substrate such that said strips are spaced from each other in a direction parallel to said at least one surface, and a piezoelectric/electrostrictive portion (6, 6a) which is disposed between the adjacent strips of the electrodes in said direction, and in contact with said adjacent strips, said piezoelectric/electrostrictive portion producing a flexural displacement or force due to at least a longitudinal mode of converse piezoelectric or electrostrictive effect upon application of a voltage between said adjacent strips of the electrodes.
Claim 2
Dependent Claim
110 words
A piezoelectric/electrostrictive actuator comprising a substrate (2), a plurality of electrodes (4) in the form of strips formed on at least a portion of at least one surface of the substrate such that said strips are spaced from each other in a direction parallel to said at least one surface, and a piezoelectric/electrostrictive portion (6, 6a) which is disposed between the adjacent strips of the electrodes in said direction, and in contact with said adjacent strips, said piezoelectric/electrostrictive portion producing a flexural displacement or force due to at least a longitudinal mode of converse piezoelectric or electrostrictive effect upon application of a voltage between said adjacent strips of the electrodes.
Claim 3
Dependent Claim
116 words
A piezoelectric/electrostrictive actuator according to claim 1, wherein said strips of said plurality of electrodes (4) consist of parallel elongate parts of two comb-like electrode patterns (8a, 8b) which are patterned and positioned relative to each other such that said elongate parts (4) of one of said two electrode patterns and said elongate parts (4) of the other electrode pattern are disposed alternately in said direction, each one of said two comb-like electrode patterns including a connecting portion (10) which connects said elongate parts at one of opposite ends thereof such that said elongate parts of said each one electrode pattern extend from said connecting portion thereof toward the connecting portion of the other electrode pattern.
Claim 4
Dependent Claim
81 words
A piezoelectric/electrostrictive actuator according to claim 1 or 2, wherein said strips (4) of the electrodes and said piezoelectric/electrostrictive actuating portion (6) are formed on one of opposite major surfaces of said substrate (2), said actuator further comprising a laminar structure consisting of a first electrode layer (16) formed on the other of said opposite major surfaces of the substrate, a piezoelectric/electrostrictive layer (14) formed on said first electrode layer, and a second electrode layer (16) formed on said piezoelectric/electrostrictive layer.
Claim 5
Dependent Claim
32 words
A piezoelectric/electrostrictive actuator according to claim 1 or 2, wherein said substrate (2) comprises a piezoelectric/electrostrictive plate (17) formed of a piezoelectric/electrostrictive material, and two electrode layers (16) sandwiching said piezoelectric/electrostrictive layer.
Claim 6
Dependent Claim
22 words
A piezoelectric/electrostrictive actuator according to claim 1 or 2, wherein said plurality of electrodes (4) are embedded in said piezoelectric/electrostrictive portion (6a).
Claim 7
Dependent Claim
40 words
A piezoelectric/electrostrictive actuator according to any one of claims 1-5, wherein said substrate (2) consists of a ceramic material whose major component is selected from the group consisting of aluminum oxide, magnesium oxide, zirconium oxide, aluminum nitride and silicon nitride.
Claim 8
Dependent Claim
31 words
A piezoelectric/electrostrictive actuator according to any one of claims 1-6, wherein said substrate (2) has a thickness of 100 µm or less, and a bending strength of 1200 kgf/cm² or higher.
References Cited (Backward Citations)
No citation records indexed.
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