EP0408306A2
Expired / Lapsed
EP
⏱️ 0.0 years remaining
Piezoelectric/electrostrictive actuator having at least one piezoelectric/electrostrictive film
Assignee: NGK Insulators Ltd
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Filing: 1990-07-10
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Granted: —
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Expires: 2010-07-10
Abstract
Abstract A piezoelectric/electrostrictive actuator including a ceramic substrate (2), and at least one piezoelectric/electrostrictive actuator unit formed on at least a portion of at least one surface of the substrate, each piezoelectric/electrostrictive actuator unit having a first electrode film (4), a piezoelectric/electrostrictive film (6) and a second electrode film (8) which are laminated in the order of description, with the piezoelectric/electrostrictive actuator unit formed on the substrate by heat treatment.
Inventors
- 👤 Yukihisa Takeuchi
- 👤 Koji Kimura
- 👤 Masato Komazawa
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-10-28 18:17
CPC Classifications
B; B41; B41J; B41J2/00; B41J2/005; B41J2/01; B41J2/135; B41J2/16; B41J2/1607; B41J2/161; B41J2/14; B41J2/14201; B41J2/14233; B41J2/14274; B41J2/1612; B41J2/1621; B41J2/1623; B41J2/1631; B41J2/1632; B41J2/1634; B41J2/164; B41J2/1642; B41J2/1643; B41J2/1645; B41J2/1646; H; H10; H10N; H10N30/00; H10N30/01; H10N30/07; H10N30/074; H10N30/20; H10N30/204; H10N30/2047; B41J2002/14258; H01; H01H; H01H57/00; H01H2057/006; H10N30/08; H10N30/085; Y; Y10; Y10T; Y10T29/00; Y10T29/42
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
66 words
A piezoelectric/electrostrictive actuator comprising a ceramic substrate (2), and at least one piezoelectric/electrostrictive actuator unit formed on at least a portion of at least one surface of the substrate, each of said at least one piezoelectric/electrostrictive actuator unit comprising a first electrode film (4), a piezoelectric/electrostrictive film (6) and a second electrode film (8) which are laminated in the order of description, without a bonding adhesive.
Claim 2
Dependent Claim
66 words
A piezoelectric/electrostrictive actuator comprising a ceramic substrate (2), and at least one piezoelectric/electrostrictive actuator unit formed on at least a portion of at least one surface of the substrate, each of said at least one piezoelectric/electrostrictive actuator unit comprising a first electrode film (4), a piezoelectric/electrostrictive film (6) and a second electrode film (8) which are laminated in the order of description, without a bonding adhesive.
Claim 3
Dependent Claim
29 words
A piezoelectric/electrostrictive actuator according to claim 1, wherein said ceramic substrate (2) has a Young's modulus within a range between 1.5 x 10⁶ kg/cm² and 4.5 x 10⁶ kg/cm².
Claim 4
Dependent Claim
33 words
A piezoelectric/electrostrictive actuator according to claim 1 or 2, which has a thickness of 300 µm or less, and wherein said ceramic substrate (2) has a bending strength of at least 1200 kgf/cm².
Claim 5
Dependent Claim
45 words
A piezoelectric/electrostrictive actuator according to any one of claims 1-3, wherein said ceramic substrate (2) is formed of a major component which consists of at least one material selected from the group consisting of aluminum oxide, magnesium oxide, zirconium oxide, aluminum nitride and silicon nitride.
Claim 6
Dependent Claim
30 words
A piezoelectric/electrostrictive actuator according to any one of claims 1-4, wherein said ceramic substrate (2) consists of a ceramic sheet containing no more than 10% by weight of silicon oxide.
Claim 7
Dependent Claim
57 words
A piezoelectric/electrostrictive actuator according to any one of claims 1-5, wherein said at least one piezoelectric/electrostrictive actuator unit consists of a plurality of piezoelectric/electrostrictive actuator units (4, 6, 8) which are formed on said ceramic substrate (2) such that said piezoelectric/electrostrictive actuator units are arranged in a direction perpendicular or parallel to a plane of said substrate.
Claim 8
Dependent Claim
24 words
A piezoelectric/electrostrictive actuator according to any one of claims 1-6, wherein said ceramic substrate (2) has a thickness of no more than 100 µm.
Claim 9
Dependent Claim
24 words
A piezoelectric/electrostrictive actuator according to any one of claims 1-7, wherein said piezoelectric/electrostrictive film (6) has a thickness of no more than 100 µm.
Claim 10
Independent Claim
59 words
A method of making a piezoelectric/electrostrictive actuator comprising assembling on a ceramic substrate (2) component layers for forming at least one piezoelectric/electrostrictive actuator unit comprising a first electrode film (4), a piezoelectric/electrostrictive film (6) and a second electrode film (8) superimposed in that order, and heat treating the assembly to integrate said substrate and said layers into a laminate.
Claim 11
Independent Claim
59 words
A method of making a piezoelectric/electrostrictive actuator comprising assembling on a ceramic substrate (2) component layers for forming at least one piezoelectric/electrostrictive actuator unit comprising a first electrode film (4), a piezoelectric/electrostrictive film (6) and a second electrode film (8) superimposed in that order, and heat treating the assembly to integrate said substrate and said layers into a laminate.
References Cited (Backward Citations)
No citation records indexed.
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