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Metal-nitrides prepared by photolytic/pyrolytic decomposition of metal-amides

Assignee: MID-AMERICA COMMERICIALIZATION CORP
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Filing: 1993-12-17
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Granted: 1995-05-23
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Expires: 2013-12-17
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Abstract

Abstract This invention is directed to a method for preparing materials comprising metal nitrides by the photolytic/pyrolytic decomposition of metal amides. The metal amides may be zirconium and/or niobium amides, which may additionally contain titanium amides.

Inventors

  • 👤 Chaitanya K. Narula
  • 👤 Michel M. Maricq

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-09 02:31
CPC Classifications
C; C01; C01B; C01B21/00; C01B21/06; C01B21/0615; C01B21/0617; C01B21/076; C01B21/0766; C23; C23C; C23C16/00; C23C16/22; C23C16/30; C23C16/34; C23C16/44; C23C16/48; C23C16/483; C01P; C01P2002/00; C01P2002/70; C01P2002/72; C01P2004/00; C01P2004/80; C01P2004/82; C01P2004/84

Claims Analysis

Total Claims: 9
Claim 1
Independent Claim 146 words
A method of preparing materials comprising metal nitrides by photolytic/pyrolytic decomposition of metal amides, which method comprises: providing metal amides selected from the group consisting of (a) Zr[R 2 N] 4 ; (b) Nb[R 2 N] 4 ; (c) mixtures of (a) and (b); and (d) mixtures of any of (a), (b), or (c) with Ti[R 2 N] 4 ; wherein R is an organic group; irradiating said metal amides to decompose at least a portion of said metal amides to an metal-organic residue; removing undecomposed metal amides from said metal-organic residue; and pyrolyzing said metal-organic residue in an inert or ammonia atmosphere at an elevated temperature to form a material comprising metal nitrides selected from the group consisting of (a) ZrN; (b) Nb 4 N 3 ; (c) mixtures of (a) and (b); and (d) mixtures of any of (a), (b), or (c) with TiN.
Claim 2
Independent Claim 146 words
A method of preparing materials comprising metal nitrides by photolytic/pyrolytic decomposition of metal amides, which method comprises: providing metal amides selected from the group consisting of (a) Zr[R 2 N] 4 ; (b) Nb[R 2 N] 4 ; (c) mixtures of (a) and (b); and (d) mixtures of any of (a), (b), or (c) with Ti[R 2 N] 4 ; wherein R is an organic group; irradiating said metal amides to decompose at least a portion of said metal amides to an metal-organic residue; removing undecomposed metal amides from said metal-organic residue; and pyrolyzing said metal-organic residue in an inert or ammonia atmosphere at an elevated temperature to form a material comprising metal nitrides selected from the group consisting of (a) ZrN; (b) Nb 4 N 3 ; (c) mixtures of (a) and (b); and (d) mixtures of any of (a), (b), or (c) with TiN.
Claim 3
Dependent Claim 19 words
The method according to claim 1, wherein said metal amides are provided deposited on a substrate comprising refractory material.
Claim 4
Dependent Claim 13 words
The method according to claim 2, wherein said substrate is in particulate form.
Claim 5
Dependent Claim 26 words
The method according to claim 2, wherein said refractory material is selected from the group consisting of magnesium oxide, aluminum oxide, silicon nitride, and titanium oxide.
Claim 6
Dependent Claim 29 words
The method according to claim 1, wherein during said irradiating step said metal amides are provided in a gas phase, liquid phase, or dissolved in an inert organic solvent.
Claim 7
Dependent Claim 23 words
The method according to claim 1, wherein said atmosphere comprises gases selected from the group consisting of nitrogen, argon, ammonia and mixtures thereof.
Claim 8
Dependent Claim 20 words
The method according to claim 6, wherein said inert atmosphere comprises nitrogen and said pyrolyzing temperature is about 600° C.
Claim 9
Dependent Claim 20 words
The method according to claim 6, wherein said atmosphere comprises an ammonia and said pyrolyzing temperature is above 1000° C.

References Cited (Backward Citations)

US4395436A Cited
US4636403A Cited
US4952556A Cited
US4925830A Cited
US4916115A Cited
US5183684A Cited
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USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1998-05-22 1998-11-21 1999-05-23 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 2002-05-22 2002-11-21 2003-05-23 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2006-05-22 2006-11-21 2007-05-23 $7700.00 Window Closed / Lapsed

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