US5416355A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Semiconductor integrated circuit protectant incorporating cold cathode field emission
Assignee: Panasonic Holdings Corp
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Filing: 1993-09-02
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Granted: 1995-05-16
•
Expires: 2013-09-02
Abstract
Abstract An electronic element is provided which includes a pair of electrodes (referred to as facing electrodes) formed within the groove of an insulating film on the substrate, the end portions of the electrodes being separated and facing each other in the groove. When a voltage of a predetermined value or more is applied between the facing electrodes, there occurs a cold cathode emission which causes a flow of electrons from one of the electrodes to the other. At that time, the facing electrodes are melted by heat generated by the applied voltage, and either a short circuit or insulation between the facing electrodes, is attained, depending on the selected structure of the element. In this way, the electronic element of the present invention can perform the protection of semiconductor devices and semiconductor circuits. Also, the electronic element of the present invention can perform the operation of selecting a desired load resistance to be applied to a specific circuit.
Inventors
- 👤 Hitoshi Kudoh
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 05:02
CPC Classifications
H; H10; H10W; H10W42/00
Claims Analysis
Total Claims: 26
Claim 1
Independent Claim
105 words
An electronic element comprising a substrate; a first insulating film having a groove with opposing side walls within said groove formed on the substrate; a pair of electrodes formed on a surface of the first insulating film and on surfaces of said opposing side walls of the groove, end portions of the electrodes being separated and facing each other along the opposing side walls in the groove; and a second insulating film formed at least on the end portions of the electrodes, the second insulating film having at least one of micro-cracks therein and a lower film density than that of the first insulating film.
Claim 2
Dependent Claim
105 words
An electronic element comprising a substrate; a first insulating film having a groove with opposing side walls within said groove formed on the substrate; a pair of electrodes formed on a surface of the first insulating film and on surfaces of said opposing side walls of the groove, end portions of the electrodes being separated and facing each other along the opposing side walls in the groove; and a second insulating film formed at least on the end portions of the electrodes, the second insulating film having at least one of micro-cracks therein and a lower film density than that of the first insulating film.
Claim 3
Dependent Claim
16 words
An electronic element according to claim 1, wherein the substrate is made of a semiconductor material.
Claim 4
Dependent Claim
94 words
An electronic element comprising a substrate; a first insulating film formed on the substrate; a second insulating film having a groove with opposing side walls within said groove formed in the second insulating film and on the first insulating film; a pair of electrodes formed on a surface of the second insulating film and on surfaces of said opposing side walls of the groove, end portions of the electrodes being separated and facing each other along the opposing side walls in the groove; and a third insulating film formed at least on the electrodes.
Claim 5
Dependent Claim
94 words
An electronic element comprising a substrate; a first insulating film formed on the substrate; a second insulating film having a groove with opposing side walls within said groove formed in the second insulating film and on the first insulating film; a pair of electrodes formed on a surface of the second insulating film and on surfaces of said opposing side walls of the groove, end portions of the electrodes being separated and facing each other along the opposing side walls in the groove; and a third insulating film formed at least on the electrodes.
Claim 6
Dependent Claim
56 words
An electronic element according to claim 3, wherein an electric field, produced by an applied voltage, enables electrons to be emitted from one of the end portions of one of the electrodes to the end portion of the other electrode by way of the third insulating film, whereby an electric current flows between the end portions.
Claim 7
Dependent Claim
98 words
An electronic element comprising a substrate; a first insulating film formed on the substrate; a second insulating film having a groove, which is formed on the first insulating film; a pair of electrodes formed on the second insulating film and the inner surface of the groove, the end portions of the electrodes being separated and facing each other in the groove; and a third insulating film formed on the electrodes and the bottom face of the groove, the portion of the third insulating film, which is positioned on the bottom face of the groove, having a triangular cross-section.
Claim 8
Dependent Claim
98 words
An electronic element comprising a substrate; a first insulating film formed on the substrate; a second insulating film having a groove, which is formed on the first insulating film; a pair of electrodes formed on the second insulating film and the inner surface of the groove, the end portions of the electrodes being separated and facing each other in the groove; and a third insulating film formed on the electrodes and the bottom face of the groove, the portion of the third insulating film, which is positioned on the bottom face of the groove, having a triangular cross-section.
Claim 9
Dependent Claim
26 words
An electronic element according to claim 5, wherein the third insulating film has a lower film density than that of the first and second insulating film.
Claim 10
Dependent Claim
15 words
An electronic element according to claim 5, wherein the third insulating film has micro-cracks therein.
Claim 11
Dependent Claim
107 words
An electronic element comprising a substrate; a first insulating film formed on the substrate; a second insulating film having a groove, which is formed on the first insulating film; a pair of electrodes formed on the second insulating film and the inner surface of the groove, the end portions of the electrodes being separated and facing each other in the groove; and a third insulating film formed on the electrodes and the bottom face of the groove, the portion of the third insulating film, which is positioned on the bottom face of the groove, having a triangular cross-section so as to form a void in the groove.
Claim 12
Dependent Claim
107 words
An electronic element comprising a substrate; a first insulating film formed on the substrate; a second insulating film having a groove, which is formed on the first insulating film; a pair of electrodes formed on the second insulating film and the inner surface of the groove, the end portions of the electrodes being separated and facing each other in the groove; and a third insulating film formed on the electrodes and the bottom face of the groove, the portion of the third insulating film, which is positioned on the bottom face of the groove, having a triangular cross-section so as to form a void in the groove.
Claim 13
Dependent Claim
17 words
An electronic element according to claim 8, wherein the inside of the void is under reduced pressure.
Claim 14
Dependent Claim
87 words
An electronic element comprising a substrate; a first insulating film formed on the substrate; a second insulating film having a groove, which is formed on the first insulating film; a pair of electrodes formed on the second insulating film and the inner surface of the groove, the end portions of the electrodes being separated and facing each other in the groove; and a third insulating film formed at least on the electrodes, wherein a current flowing between the electrodes corresponds to two-thirds power of an applied voltage.
Claim 15
Dependent Claim
87 words
An electronic element comprising a substrate; a first insulating film formed on the substrate; a second insulating film having a groove, which is formed on the first insulating film; a pair of electrodes formed on the second insulating film and the inner surface of the groove, the end portions of the electrodes being separated and facing each other in the groove; and a third insulating film formed at least on the electrodes, wherein a current flowing between the electrodes corresponds to two-thirds power of an applied voltage.
Claim 16
Dependent Claim
81 words
An electronic element comprising a substrate; a first insulating film formed on the substrate; a second insulating film having a groove, which is formed on the first insulating film; a pair of electrodes formed on the second insulating film and the inner surface of the groove, the end portions of the electrodes being separated and facing each other in the groove; a third insulating film formed at least on the electrodes; and a conductive film formed on the third insulating film.
Claim 17
Dependent Claim
81 words
An electronic element comprising a substrate; a first insulating film formed on the substrate; a second insulating film having a groove, which is formed on the first insulating film; a pair of electrodes formed on the second insulating film and the inner surface of the groove, the end portions of the electrodes being separated and facing each other in the groove; a third insulating film formed at least on the electrodes; and a conductive film formed on the third insulating film.
Claim 18
Dependent Claim
83 words
An electronic element comprising a substrate; a first insulating film formed on the substrate; a second insulating film having a groove, which is formed on the first insulating film; a pair of electrodes formed on the second insulating film and the inner surface of the groove, the end portions of the electrodes being separated and facing each other in the groove; and a third insulating film formed at least on the electrodes, wherein the substrate is provided with at least one semiconductor device.
Claim 19
Dependent Claim
83 words
An electronic element comprising a substrate; a first insulating film formed on the substrate; a second insulating film having a groove, which is formed on the first insulating film; a pair of electrodes formed on the second insulating film and the inner surface of the groove, the end portions of the electrodes being separated and facing each other in the groove; and a third insulating film formed at least on the electrodes, wherein the substrate is provided with at least one semiconductor device.
Claim 20
Dependent Claim
88 words
An electronic element comprising a substrate; a first insulating film formed on the substrate; a second insulating film having a groove, which is formed on the first insulating film; a pair of electrodes formed on the second insulating film and the inner surface of the groove, the end portions of the electrodes being separated and facing each other in the groove; a third insulating film formed at least on the electrodes; and a conductive film formed on the third insulating film, wherein the electronic element has switching characteristics.
Claim 21
Dependent Claim
88 words
An electronic element comprising a substrate; a first insulating film formed on the substrate; a second insulating film having a groove, which is formed on the first insulating film; a pair of electrodes formed on the second insulating film and the inner surface of the groove, the end portions of the electrodes being separated and facing each other in the groove; a third insulating film formed at least on the electrodes; and a conductive film formed on the third insulating film, wherein the electronic element has switching characteristics.
Claim 22
Dependent Claim
104 words
An electronic element comprising a substrate; a first insulating film formed on the substrate; a second insulating film having a groove, which is formed on the first insulating film; a pair of electrodes formed on the second insulating film and the inner surface of the groove, the end portions of the electrodes being separated and facing each other in the groove; a third insulating film formed at least on the electrodes; and a conductive film formed on the third insulating film, wherein the substrate is provided with at least one semiconductor device, and the electronic element performs the operation of switching the semiconductor device.
Claim 23
Dependent Claim
104 words
An electronic element comprising a substrate; a first insulating film formed on the substrate; a second insulating film having a groove, which is formed on the first insulating film; a pair of electrodes formed on the second insulating film and the inner surface of the groove, the end portions of the electrodes being separated and facing each other in the groove; a third insulating film formed at least on the electrodes; and a conductive film formed on the third insulating film, wherein the substrate is provided with at least one semiconductor device, and the electronic element performs the operation of switching the semiconductor device.
Claim 24
Dependent Claim
35 words
An electronic element according to claim 1, wherein an electric current flows between said end portions of said electrodes when a voltage applied between said electrodes becomes equal to or more than a predetermined value.
Claim 25
Dependent Claim
134 words
An electronic element comprising: a substrate; a first insulating film formed on the substrate; a second insulating film having a groove therein formed on the first insulating film, said groove having opposing side walls within said second insulating film; a pair of electrodes formed on the second insulating film and on surfaces of said opposing side walls in the groove, end portions of the electrodes being separated and facing each other in the groove; and a third insulating film formed at least on the electrodes, wherein an electric field, produced by an applied voltage, enables electrons to be emitted from one of the end portions of one of the electrodes to the end portion of the other electrode by way of the third insulating film, whereby an electric current flows between the end portions.
Claim 26
Dependent Claim
134 words
An electronic element comprising: a substrate; a first insulating film formed on the substrate; a second insulating film having a groove therein formed on the first insulating film, said groove having opposing side walls within said second insulating film; a pair of electrodes formed on the second insulating film and on surfaces of said opposing side walls in the groove, end portions of the electrodes being separated and facing each other in the groove; and a third insulating film formed at least on the electrodes, wherein an electric field, produced by an applied voltage, enables electrons to be emitted from one of the end portions of one of the electrodes to the end portion of the other electrode by way of the third insulating film, whereby an electric current flows between the end portions.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-05-15 | 1998-11-14 | 1999-05-16 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-05-15 | 2002-11-14 | 2003-05-16 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-05-15 | 2006-11-14 | 2007-05-16 | $7700.00 | Window Closed / Lapsed |