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EP0299461A2
Expired / Lapsed
EP
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Electron-emitting device
Assignee: Canon Inc
•
Filing: 1988-07-13
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Granted: —
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Expires: 2008-07-13
Abstract
Abstract An electron-emitting device is provided which comprises a laminate comprising an insulating layer (5) held between a pair of electrodes (1,2) opposing each other, wherein an electron-emitting region (3) insulated from said electrodes is formed at a side end surface of the insulating layer (5) formed at the part at which the electrodes oppose each other, and electrons are emitted from said electron-emitting region (3) by applying a voltage between said electrodes. A method for preparing the electron-emitting device is also provided.
Inventors
- 👤 Seishiro Yoshioka
- 👤 Ichiro Nomura
- 👤 Hidetoshi Suzuki
- 👤 Toshihiko Takeda
- 👤 Tetsuya Kaneko
- 👤 Yoshikazu Banno
- 👤 Kojiro Yokono
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-10-30 13:20
CPC Classifications
H; H01; H01J; H01J1/00; H01J1/02; H01J1/30; H01J1/316; H01J9/00; H01J9/02; H01J9/022; H01J9/027; H01J2329/00
Claims Analysis
Total Claims: 81
Claim 1
Independent Claim
64 words
An electron-emitting device comprising a laminate comprising an insulating layer held between a pair of electrodes opposing each other, wherein an electron-emitting region insulated from said electrodes is formed at a side end surface of the insulating layer formed at the part at which the electrodes oppose each other, and electrons are emitted from said electron-emitting region by applying a voltage between said electrodes.
Claim 2
Dependent Claim
64 words
An electron-emitting device comprising a laminate comprising an insulating layer held between a pair of electrodes opposing each other, wherein an electron-emitting region insulated from said electrodes is formed at a side end surface of the insulating layer formed at the part at which the electrodes oppose each other, and electrons are emitted from said electron-emitting region by applying a voltage between said electrodes.
Claim 3
Dependent Claim
32 words
The electron-emitting device of Claim 1, wherein a pair of said electrodes, opposing each other at each end portion of the electrodes, hold said insulating layer without any overlap of said electrodes.
Claim 4
Dependent Claim
24 words
The electron-emitting device of Claim 1, wherein said electron-emitting region comprises a laminate comprising an insulating layer and a layer of an electron-emitting material.
Claim 5
Dependent Claim
26 words
The electron-emitting device of Claim 3, wherein said electron-emitting material is selected from the group consisting of borides, carbides, nitrides, metals, metal oxides, semiconductors, and carbon.
Claim 6
Dependent Claim
18 words
The electron-emitting device of Claim 4, wherein said electron-emitting material comprises at least two kinds of different materials.
Claim 7
Dependent Claim
40 words
The electron-emitting device of Claim 4, wherein said electron-emitting material is selected from the group consisting of Nb, Mo, Rh, Hf, Ta, W, Re, Ir, Pt, Ti, Au, Ag, Cu, Cr, Al, Co, Ni, Fe, Pb, Pd, Cs and Ba.
Claim 8
Dependent Claim
26 words
The electron-emitting device of Claim 4, wherein said electron-emitting material comprises a metal oxide selected from the group consisting of In₂O₃, SnO₂, BaO, MgO and Sb₂O₃.
Claim 9
Dependent Claim
17 words
The electron-emitting device of Claim 4, wherein said electron-emitting material comprises fine particles of Pd or SnO₂.
Claim 10
Dependent Claim
27 words
The electron-emitting device of Claim 1, wherein said electron-emitting region comprises a layer formed by incorporating an electron-emitting material in the insulating layer in a dispersed state.
Claim 11
Dependent Claim
26 words
The electron-emitting device of Claim 9, wherein said electron-emitting material is selected from the group consisting of borides, carbides, nitrides, metals, metal oxides, semiconductors, and carbon.
Claim 12
Dependent Claim
18 words
The electron-emitting device of Claim 10, wherein said electron-emitting material comprises at least two kinds of different materials.
Claim 13
Dependent Claim
40 words
The electron-emitting device of Claim 10, wherein said electron-emitting material is selected from the group consisting of Nb, Mo, Rh, Hf, Ta, W, Re, Ir, Pt, Ti, Au, Ag, Cu, Cr, Al, Co, Ni, Fe, Pb, Pd, Cs and Ba.
Claim 14
Dependent Claim
26 words
The electron-emitting device of Claim 10, wherein said electron-emitting material comprises a metal oxide selected from the group consisting of In₂O₃, SnO₂, BaO, MgO and Sb₂O₃.
Claim 15
Dependent Claim
17 words
The electron-emitting device of Claim 10, wherein said electron-emitting material comprises fine particles of Pd or SnO₂.
Claim 16
Dependent Claim
21 words
The electron-emitting device of Claim 1, wherein an electron-emitting material is arranged on the side end surface of said insulating layer.
Claim 17
Dependent Claim
26 words
The electron-emitting device of Claim 15, wherein said electron-emitting material is selected from the group consisting of borides, carbides, nitrides, metals, metal oxides, semiconductors, and carbon.
Claim 18
Dependent Claim
18 words
The electron-emitting device of Claim 16, wherein said electron-emitting material comprises at least two kinds of different materials.
Claim 19
Dependent Claim
40 words
The electron-emitting device of Claim 16, wherein said electron-emitting material is selected from the group consisting of Nb, Mo, Rh, Hf, Ta, W, Re, Ir, Pt, Ti, Au, Ag, Cu, Cr, Al, Co, Ni, Fe, Pb, Pd, Cs and Ba.
Claim 20
Dependent Claim
26 words
The electron-emitting device of Claim 16, wherein said electron-emitting material comprises a metal oxide selected from the group consisting of In₂O₃, SnO₂, BaO, MgO and Sb₂O₃.
Claim 21
Dependent Claim
17 words
The electron-emitting device of Claim 16, wherein said electron-emitting material comprises fine particles of Pd or SnO₂.
Claim 22
Dependent Claim
23 words
The electron-emitting device of Claim 1, wherein the one or both of a pair of said electrodes are in a multiple layer constitution.
Claim 23
Dependent Claim
26 words
The electron-emitting device of Claim 21, wherein at least one layer of the multiple layers is made of a material not readily damaged by ion sputtering.
Claim 24
Dependent Claim
25 words
The electron-emitting device of Claim 22, wherein said material comprises a high-melting material selected from the group consisting of W, LaB₆, carbon, TiC and TaC.
Claim 25
Dependent Claim
23 words
The electron-emitting device of Claim 21, wherein at least one layer of said multiple layers comprises a material exhibiting a low work function.
Claim 26
Dependent Claim
23 words
The electron-emitting device of Claim 24, wherein said material is selected from the group consisting of SnO₂, In₂O₃, BaO, LaB₆, Cs, and CsO.
Claim 27
Dependent Claim
38 words
The electron-emitting device of Claim 21, wherein at least one layer of said multiple layers formed at the part at which the electrodes oppose each other; and electrons are emitted by application of a voltage between said electrodes.
Claim 28
Dependent Claim
66 words
An electron-emitting device comprising; a pair of opposing electrodes, holding therebetween a laminate comprising a layer in which an electron-emitting material is dispersed and an insulating layer; and an or the electron-emitting material provided on the side wall surface of the insulating layer, formed at the part at which the electrodes oppose each other; where electrons are emitted by application of a voltage between said electrodes.
Claim 29
Dependent Claim
66 words
An electron-emitting device comprising; a pair of opposing electrodes, holding therebetween a laminate comprising a layer in which an electron-emitting material is dispersed and an insulating layer; and an or the electron-emitting material provided on the side wall surface of the insulating layer, formed at the part at which the electrodes oppose each other; where electrons are emitted by application of a voltage between said electrodes.
Claim 30
Dependent Claim
64 words
An electron-emitting device comprising; a pair of opposing electrodes, holding therebetween an insulating layer containing an electron-emitting material in a dispersed state; and an or the electron-emitting material provided on the side wall surface of the insulating layer, formed at the part at which the electrodes oppose each other; where electrons are emitted by application of comprises a material having a high electrical conductivity.
Claim 31
Dependent Claim
64 words
An electron-emitting device comprising; a pair of opposing electrodes, holding therebetween an insulating layer containing an electron-emitting material in a dispersed state; and an or the electron-emitting material provided on the side wall surface of the insulating layer, formed at the part at which the electrodes oppose each other; where electrons are emitted by application of comprises a material having a high electrical conductivity.
Claim 32
Dependent Claim
31 words
The electron-emitting device of Claim 26, wherein said material is selected from the group consisting of Ag, Al, Cu, Cr, Ni, Mo, Ta, W, and an alloy of any of these.
Claim 33
Dependent Claim
92 words
An electron-emitting device comprising a laminate comprising an insulating layer interposing a layer in which an electron-emitting material is dispersed, and held between a pair of opposing electrodes, wherein said electrodes do not come into contact with the layer in which an electron-emitting material is dispersed; an end of said layer in which the electron-emitting material is dispersed is positioned at the side end surface of the insulating layer, formed at the part at which the electrodes oppose each other; and electrons are emitted by application of a voltage between said electrodes.
Claim 34
Dependent Claim
92 words
An electron-emitting device comprising a laminate comprising an insulating layer interposing a layer in which an electron-emitting material is dispersed, and held between a pair of opposing electrodes, wherein said electrodes do not come into contact with the layer in which an electron-emitting material is dispersed; an end of said layer in which the electron-emitting material is dispersed is positioned at the side end surface of the insulating layer, formed at the part at which the electrodes oppose each other; and electrons are emitted by application of a voltage between said electrodes.
Claim 35
Dependent Claim
41 words
An electron-emitting device comprising a laminate comprising an insulating layer containing an electron-emitting material in a dispersed state and held between a pair of opposing electrodes, wherein; a side end surface of the insulating layer is a voltage between said electrodes.
Claim 36
Dependent Claim
41 words
An electron-emitting device comprising a laminate comprising an insulating layer containing an electron-emitting material in a dispersed state and held between a pair of opposing electrodes, wherein; a side end surface of the insulating layer is a voltage between said electrodes.
Claim 37
Dependent Claim
33 words
An electron-emitting device comprising a device structure in which an insulating layer is formed between opposing electrodes, and fine particles are arranged inside the layer of said insulating layer in a dispersed state.
Claim 38
Dependent Claim
33 words
An electron-emitting device comprising a device structure in which an insulating layer is formed between opposing electrodes, and fine particles are arranged inside the layer of said insulating layer in a dispersed state.
Claim 39
Dependent Claim
21 words
The electron-emitting device of Claim 32, having the structure in which said fine particles are completely included into said insulating layer.
Claim 40
Dependent Claim
26 words
The electron-emitting device of Claim 32, having the structure that any of said fine particles is partly included into and partly exposed from said insulating layer.
Claim 41
Dependent Claim
30 words
The electron-emitting device of Claim 32, wherein said fine particles is composed of a substance selected from the group sonsisting of borides, carbides, nitrides, metals, metal oxides, semiconductors, and carbon.
Claim 42
Dependent Claim
17 words
The electron-emitting device of Claim 32, wherein said fine particles are dispersed between the electrodes by coating.
Claim 43
Dependent Claim
18 words
The electron-emitting device of Claim 32, wherein said fine particles are dispersed between the electrodes by vacuum deposition.
Claim 44
Dependent Claim
20 words
The electron-emitting device of Claim 32, wherein said fine particles are dispersed by thermal decomposition of an organic metal compound.
Claim 45
Dependent Claim
41 words
The electron-emitting device of Claim 32, having the device structure in which the insulating layer is formed between the opposing electrodes on a substrate, and said fine particles are arranged inside the layer of said insulating layer in a dispersed state.
Claim 46
Dependent Claim
42 words
The electron-emitting device of Claim 39, wherein said opposing electrodes are formed on the insulating layer on a substrate, and said fine particles contained in said insulating layer are those obtained by dispersing the fine particles between said electrodes followed by baking.
Claim 47
Dependent Claim
14 words
The electron-emitting device of Claim 40, wherein said insulating layer comprises a low-melting glass.
Claim 48
Dependent Claim
23 words
The electron-emitting device of Claim 40, wherein said insulating layer has a film thickness of from several ten angstroms to several ten microns.
Claim 49
Independent Claim
50 words
A method of preparing an electron-emitting device, comprising a step of forming electrodes on a substrate, and a step of coating a mixture of fine particles and an insulating material with a solvent between said electrodes, and a step of baking to form an insulating layer containing said fine particles.
Claim 50
Independent Claim
50 words
A method of preparing an electron-emitting device, comprising a step of forming electrodes on a substrate, and a step of coating a mixture of fine particles and an insulating material with a solvent between said electrodes, and a step of baking to form an insulating layer containing said fine particles.
Claim 51
Independent Claim
40 words
A method of preparing an electron-emitting device, comprising a step of forming electrodes on a substrate, a step of dispersing fine particles between said electrodes, and a step of forming an insulating layer on said fine particles having been dispersed.
Claim 52
Independent Claim
40 words
A method of preparing an electron-emitting device, comprising a step of forming electrodes on a substrate, a step of dispersing fine particles between said electrodes, and a step of forming an insulating layer on said fine particles having been dispersed.
Claim 53
Dependent Claim
32 words
The method of Claim 44, wherein said insulating layer is a layer comprised of a substance selected from the group consisting of an oxide, a nitride, a carbide or an organic polymer.
Claim 54
Dependent Claim
22 words
The method of Claim 45, wherein said insulating layer has a film thickness of from several ten angstroms to several ten microns.
Claim 55
Dependent Claim
23 words
The electron-emitting device of Claim 32, comprising a substrate comprising a porous glass in which a metal or a metal oxide is deposited.
Claim 56
Dependent Claim
15 words
The electron-emitting device of Claim 32, comprising a colored glass containing metal colloid fine particles.
Claim 57
Independent Claim
47 words
A method of preparing an electron-emitting device, comprising a step of bringing fine particles in an insulating layer to be completely included into the insulating layer, and a step of etching said insulating layer to bring the completely included fine particles partly exposed from the insulating layer.
Claim 58
Independent Claim
47 words
A method of preparing an electron-emitting device, comprising a step of bringing fine particles in an insulating layer to be completely included into the insulating layer, and a step of etching said insulating layer to bring the completely included fine particles partly exposed from the insulating layer.
Claim 59
Independent Claim
34 words
A method of preparing an electron-emitting device, comprising a step of coating on a substrate an insulating layer containing fine particles followed by baking, and a step of forming electrodes on said insulating layer.
Claim 60
Independent Claim
34 words
A method of preparing an electron-emitting device, comprising a step of coating on a substrate an insulating layer containing fine particles followed by baking, and a step of forming electrodes on said insulating layer.
Claim 61
Dependent Claim
36 words
An electron-emitting device comprising the device structure that a semiconductor layer is formed between opposing electrodes, and fine particles are arranged inside the layer, or on the layer, of said semiconductor layer in a dispersed state.
Claim 62
Dependent Claim
36 words
An electron-emitting device comprising the device structure that a semiconductor layer is formed between opposing electrodes, and fine particles are arranged inside the layer, or on the layer, of said semiconductor layer in a dispersed state.
Claim 63
Dependent Claim
20 words
The electron-emitting device of Claim 51, having the structure that said fine particles are completely included into said semiconductor layer.
Claim 64
Dependent Claim
24 words
The electron-emitting device of Claim 51, having the structure that said fine particles are partly contained in said semiconductor layer and partly exposed therefrom.
Claim 65
Dependent Claim
30 words
The electron-emitting device of Claim 51, wherein said fine particles are made of a substance selected from the group consisting of borides, carbides, nitrides, metals, metal oxides, semiconductors, and carbon.
Claim 66
Dependent Claim
17 words
The electron-emitting device of Claim 51, wherein said fine particles are dispersed between said electrode by coating.
Claim 67
Dependent Claim
18 words
The electron-emitting device of Claim 51, wherein said fine particles are dispersed between said electrode by vacuum deposition.
Claim 68
Dependent Claim
20 words
The electron-emitting device of Claim 51, wherein said fine particles are dispersed by thermal decomposition of an organic metal compound.
Claim 69
Dependent Claim
48 words
The electron-emitting device of Claim 51, having the device structure in which the electrodes are formed on a substrate, the semiconductor layer is formed between said electrodes, and the fine particles are arranged inside the layer, or on the layer, of said semiconductor layer in a dispersed state.
Claim 70
Independent Claim
41 words
A method of preparing electron-emitting device, comprising a step of forming electrodes on a substrate, and a step of coating between said electrodes a fine particle dispersion containing an organic binder followed by baking to effect dispersion of the fine particles.
Claim 71
Independent Claim
41 words
A method of preparing electron-emitting device, comprising a step of forming electrodes on a substrate, and a step of coating between said electrodes a fine particle dispersion containing an organic binder followed by baking to effect dispersion of the fine particles.
Claim 72
Dependent Claim
31 words
The method of Claim 59, wherein said organic binder is selected from the group consisting of a butyral resins, acryl resins, vinyl chloride-vinyl acetate copolymers, phenol resins, nylons, polyesters and urethanes.
Claim 73
Independent Claim
36 words
A method of preparing electron-emitting device, comprising a step of forming a semiconductor layer on a substrate, a step of forming electrodes on said semiconductor layer, and a step of dispersing fine particles between said electrodes.
Claim 74
Independent Claim
36 words
A method of preparing electron-emitting device, comprising a step of forming a semiconductor layer on a substrate, a step of forming electrodes on said semiconductor layer, and a step of dispersing fine particles between said electrodes.
Claim 75
Dependent Claim
26 words
The method of Claim 61, wherein said semiconductor layer comprises a layer comprised of an amorphous silicon semiconductor, a crystallized silicon semiconductor, or a compound semiconductor.
Claim 76
Dependent Claim
20 words
The method of Claim 61, wherein said semiconductor layer has a film thickness of from 50 angstroms to 10 µm.
Claim 77
Independent Claim
46 words
A method of preparing an electron-emitting device, comprising a step of bringing fine particles to be completely included into a semiconductor layer, and a step of etching said fine particles having been completely included into it to bring them to partly expose from said semiconductor layer.
Claim 78
Independent Claim
46 words
A method of preparing an electron-emitting device, comprising a step of bringing fine particles to be completely included into a semiconductor layer, and a step of etching said fine particles having been completely included into it to bring them to partly expose from said semiconductor layer.
Claim 79
Dependent Claim
22 words
An electron-emitting device comprising electrodes having minute spacing, between which at least two kinds of fine particles of different materials are arranged.
Claim 80
Dependent Claim
22 words
An electron-emitting device comprising electrodes having minute spacing, between which at least two kinds of fine particles of different materials are arranged.
Claim 81
Dependent Claim
15 words
The electron-emitting device of Claim 65, wherein said different materials comprise materials having different conductivity.
References Cited (Backward Citations)
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