US5410174A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Contact structure for integrated circuits
Assignee: STMicroelectronics lnc USA
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Filing: 1993-08-04
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Granted: 1995-04-25
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Expires: 2013-08-04
Abstract
Abstract A method is provided for forming a polysilicon buried contact of an integrated circuit, and an integrated circuit formed according to the same. A field oxide region is formed over a portion of a substrate leaving an exposed active region. An oxide layer is formed over the active region. A first photoresist layer is formed and patterned over the first silicon layer. The first silicon layer is then etched to form an opening therethrough to expose a portion of the oxide layer. The oxide layer is etched through the opening to expose a portion of the substrate. a conductive etch stop layer is formed over the exposed portion of the substrate and the first photoresist layer. The first photoresist layer and the etch stop layer overlying the first photoresist layer are then removed. A second silicon layer is formed over the first silicon layer and the remaining etch stop layer. A second photoresist layer is formed and patterned over the second silicon layer. The first and second silicon layers are then etched to form a conductive structure contacting the exposed portion of the substrate through the etch stop layer.
Inventors
- 👤 Alexander Kalnitsky
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 08:16
CPC Classifications
H; H10; H10W; H10W20/00; H10W20/01; H10W20/021
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
306 words
A structure consisting of a portion of an integrated circuit device, comprising: a substrate having an upper surface; a thin oxide layer overlying a portion of the substrate upper surface; a gate electrode overlying the thin oxide layer, the gate electrode having a first polysilicon layer in contact with the thin oxide, and a second polysilicon layer overlying the first polysilicon layer and in contact therewith throughout the entire gate electrode, wherein the gate electrode has a first thickness equal to a sum of thicknesses of the first and second polysilicon layers; first and second source/drain regions within the substrate on opposite sides of the gate electrode; an interconnect electrode extending over a portion of the first source/drain region, the interconnect electrode having a first polysilicon layer separated from the substrate upper surface by the thin oxide layer, and a second polysilicon layer overlying the first polysilicon layer and in contact therewith, wherein a significant portion of the interconnect electrode has the first thickness; and a window contact on a portion of the first source/drain region, the window contact being formed from a refractory metal alloy above the substrate upper surface, the window contact further being formed at least in part within an opening through the interconnect electrode first polysilicon layer, wherein the interconnect electrode has a second thickness, less than the first thickness, over the window contact, and further wherein the interconnect electrode second polysilicon layer is in contact with the interconnect electrode first polysilicon layer throughout the entire interconnect electrode, except over the window contact; wherein the interconnect electrode extends over only part of the window contact with the interconnect electrode second polysilicon layer within the opening through the interconnect electrode first polysilicon layer, and wherein the interconnect electrode second polysilicon layer makes electrical contact with the first source/drain region through the window contact.
Claim 2
Dependent Claim
306 words
A structure consisting of a portion of an integrated circuit device, comprising: a substrate having an upper surface; a thin oxide layer overlying a portion of the substrate upper surface; a gate electrode overlying the thin oxide layer, the gate electrode having a first polysilicon layer in contact with the thin oxide, and a second polysilicon layer overlying the first polysilicon layer and in contact therewith throughout the entire gate electrode, wherein the gate electrode has a first thickness equal to a sum of thicknesses of the first and second polysilicon layers; first and second source/drain regions within the substrate on opposite sides of the gate electrode; an interconnect electrode extending over a portion of the first source/drain region, the interconnect electrode having a first polysilicon layer separated from the substrate upper surface by the thin oxide layer, and a second polysilicon layer overlying the first polysilicon layer and in contact therewith, wherein a significant portion of the interconnect electrode has the first thickness; and a window contact on a portion of the first source/drain region, the window contact being formed from a refractory metal alloy above the substrate upper surface, the window contact further being formed at least in part within an opening through the interconnect electrode first polysilicon layer, wherein the interconnect electrode has a second thickness, less than the first thickness, over the window contact, and further wherein the interconnect electrode second polysilicon layer is in contact with the interconnect electrode first polysilicon layer throughout the entire interconnect electrode, except over the window contact; wherein the interconnect electrode extends over only part of the window contact with the interconnect electrode second polysilicon layer within the opening through the interconnect electrode first polysilicon layer, and wherein the interconnect electrode second polysilicon layer makes electrical contact with the first source/drain region through the window contact.
Claim 3
Dependent Claim
15 words
The structure of claim 1, wherein the refractory metal alloy comprises a refractory metal silicide.
Claim 4
Dependent Claim
78 words
A contact structure to a source/drain region of a field effect transistor, comprising: a substrate having an upper surface; a contact layer containing a refractory metal alloy overlying a portion of the substrate, such layer having a vertically projecting portion around the periphery thereof; and a silicon interconnect electrode overlying a portion of the substrate and only a portion of the contact layer, lying directly on the contact layer and separated from the substrate by an oxide layer.
Claim 5
Dependent Claim
78 words
A contact structure to a source/drain region of a field effect transistor, comprising: a substrate having an upper surface; a contact layer containing a refractory metal alloy overlying a portion of the substrate, such layer having a vertically projecting portion around the periphery thereof; and a silicon interconnect electrode overlying a portion of the substrate and only a portion of the contact layer, lying directly on the contact layer and separated from the substrate by an oxide layer.
Claim 6
Dependent Claim
15 words
The structure of claim 3, wherein the refractory metal alloy comprises a refractory metal silicide.
Claim 7
Dependent Claim
70 words
The structure of claim 3, further comprising: a first doped region within the substrate filling a region adjacent the silicon interconnect electrode and underlying a portion of the contact layer, but not underlying the silicon interconnect electrode; and a second doped region underlying the contact layer, wherein the first and second doped regions overlap beneath those portions of the contact layer which are not overlaid by the silicon interconnect electrode.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-04-24 | 1998-10-24 | 1999-04-25 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-04-24 | 2002-10-24 | 2003-04-25 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-04-24 | 2006-10-24 | 2007-04-25 | $7700.00 | Window Closed / Lapsed |