Patent US5403701A successfully refreshed from Google Patents.
US5403701A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of forming small geometry patterns on piezoelectric membrane films
Assignee: Agilent Technologies Inc
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Filing: 1993-06-30
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Granted: 1995-04-04
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Expires: 2013-06-30
Abstract
Abstract A method of patterning interconnect lines on a flexible membrane film of piezoelectric material includes securing the membrane film to a temporary support structure to allow direct patterning of the interconnect lines. A barrier plane is deposited onto the membrane film. A photoresist then coats the barrier plane. In a subsequent step of photolithographically exposing the photoresist, the barrier plane acts as a screen to prevent radiation from reaching the membrane film. The barrier film is also used as a focusing and alignment structure during photolithographic exposure. Optionally, the resulting structure is soaked in chlorobenzene, with the barrier plane functioning to prevent diffusion of the chlorobenzene through the back side of the porous membrane film to form undesired development-retarding regions of the photoresist. Openings are formed in the photoresist during a development step. A metallic interconnect layer is then deposited. A portion of the interconnect layer enters the openings in the photoresist for deposit onto the barrier plane. The barrier plane ensures proper adhesion of the interconnect layer. Lift-off techniques remove the photoresist and unwanted portions of the interconnect layer. The remaining portions of the interconnect layer provide an etch mask for patterning the barrier plane.
Inventors
- 👤 Paul Lum
- 👤 Belinda J. Kendle
- 👤 Michael Greenstein
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 15:36
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/26; G03F7/38; H; H10; H10N; H10N30/00; H10N30/01; H10N30/06; H05; H05K; H05K3/00; H05K3/02; H05K3/04; H05K3/046; H05K3/048
Claims Analysis
Total Claims: 22
Claim 1
Independent Claim
147 words
A method of forming a pattern of interconnect lines on a thin flexible membrane of piezoelectric material comprising: securing a flexible piezoelectric membrane to a support structure such that said flexible piezoelectric membrane is in a taut condition, thereby reducing flexing of said membrane; forming an electrically conductive lower barrier plane on a first surface of said flexible piezoelectric membrane; forming a photoresist layer on said lower barrier plane; patterning said photoresist layer including exposing selected portions of said lower barrier plane; forming electrically conductive upper interconnect lines on said selected portions of said lower barrier plane; removing said photoresist layer, while leaving said upper interconnect lines; and removing said lower barrier plane which has been exposed after removed of said photoresist layer such that a desired interconnection pattern remains on said flexible piezoelectric membrane, including leaving said lower barrier plane covered by said upper interconnect lines.
Claim 2
Independent Claim
147 words
A method of forming a pattern of interconnect lines on a thin flexible membrane of piezoelectric material comprising: securing a flexible piezoelectric membrane to a support structure such that said flexible piezoelectric membrane is in a taut condition, thereby reducing flexing of said membrane; forming an electrically conductive lower barrier plane on a first surface of said flexible piezoelectric membrane; forming a photoresist layer on said lower barrier plane; patterning said photoresist layer including exposing selected portions of said lower barrier plane; forming electrically conductive upper interconnect lines on said selected portions of said lower barrier plane; removing said photoresist layer, while leaving said upper interconnect lines; and removing said lower barrier plane which has been exposed after removed of said photoresist layer such that a desired interconnection pattern remains on said flexible piezoelectric membrane, including leaving said lower barrier plane covered by said upper interconnect lines.
Claim 3
Dependent Claim
21 words
The method of claim 1 wherein removing said lower barrier plane includes utilizing said upper interconnect lines as an etch mask.
Claim 4
Dependent Claim
22 words
The method of claim 1 wherein forming said upper interconnect lines and removing said photoresist layer are steps of a lift-off process.
Claim 5
Dependent Claim
38 words
The method of claim 1 wherein securing said flexible piezoelectric membrane to said support structure includes providing a flexible piezoelectric membrane having a thickness of greater than 4 μm and less than 100 μm in a faint condition.
Claim 6
Dependent Claim
25 words
The method of claim 1 wherein forming said lower barrier plane includes creating marks for subsequently aligning and focusing lithographic equipment on said photoresist layer.
Claim 7
Dependent Claim
16 words
The method of claim 1 wherein patterning said photoresist layer is a step utilizing photolithographic techniques.
Claim 8
Dependent Claim
69 words
The method of claim 1 further comprising forming a second interconnection pattern on a second surface of said flexible piezoelectric membrane opposite to said first surface, said forming said second interconnection scheme including forming a second barrier plane on said second surface and patterning a second photoresist layer on said second barrier plane, including exposing portions of said second barrier plane and depositing second interconnect lines on said portions.
Claim 9
Dependent Claim
25 words
The method of claim 7 wherein forming said second interconnection pattern is preceded by a step of coating said first surface with a protective coating.
Claim 10
Dependent Claim
23 words
The method of claim 1 wherein securing said flexible piezoelectric membrane includes providing a membrane made of a polymer including poly vinylidene fluoride.
Claim 11
Dependent Claim
23 words
The method of claim 1 further comprising releasing said flexible piezoelectric membrane from said support structure following partially removing said lower barrier plane.
Claim 12
Independent Claim
157 words
A method of forming small geometry conductive patterns on a piezoelectric membrane film comprising the steps of: (1) providing a membrane film made of a piezoelectric material having a thickness less than 100 μm; (2) supporting said membrane film in a fixed planar position; (3) forming a conductive barrier film on a first surface of said membrane film; (4) forming a resist layer on said barrier film; (5) photolithographically patterning said resist layer to form a desired configuration of resist and to expose regions of said conductive barrier film; (6) forming a conductive film on said configuration of resist and said regions of said conductive barrier film; (7) removing said configuration of resist while leaving said conductive film on said regions of said conductive barrier film; and (8) etching said conductive barrier film to remove portions of said conduction barrier film not covered by said conductive film, thereby forming a multi-film pattern for the conduction of signals.
Claim 13
Independent Claim
157 words
A method of forming small geometry conductive patterns on a piezoelectric membrane film comprising the steps of: (1) providing a membrane film made of a piezoelectric material having a thickness less than 100 μm; (2) supporting said membrane film in a fixed planar position; (3) forming a conductive barrier film on a first surface of said membrane film; (4) forming a resist layer on said barrier film; (5) photolithographically patterning said resist layer to form a desired configuration of resist and to expose regions of said conductive barrier film; (6) forming a conductive film on said configuration of resist and said regions of said conductive barrier film; (7) removing said configuration of resist while leaving said conductive film on said regions of said conductive barrier film; and (8) etching said conductive barrier film to remove portions of said conduction barrier film not covered by said conductive film, thereby forming a multi-film pattern for the conduction of signals.
Claim 14
Dependent Claim
14 words
The method of claim 11 wherein forming said conductive barrier film includes depositing chromium.
Claim 15
Dependent Claim
22 words
The method of claim 11 wherein forming said multi-film pattern includes fabricating interconnect lines having a width of less than 25.4 μm.
Claim 16
Dependent Claim
24 words
The method of claim 11 wherein forming said conductive barrier film includes forming alignment and focusing marks for said patterning of said resist layer.
Claim 17
Dependent Claim
20 words
The method of claim 11 further comprising forming a second multi-film pattern on a second surface of said membrane film.
Claim 18
Independent Claim
196 words
A method of forming a pattern of interconnect lines on a thin flexible membrane of piezoelectric material comprising the steps of: (1) securing a flexible piezoelectric membrane to a support structure such that said flexible piezoelectric membrane is stretched into a taut condition; (2) on a first side of said flexible piezoelectric membrane, forming a conductive barrier plane; (3) depositing a photoresist on said conductive barrier plane; (4) photolithographically patterning said photoresist to define openings to selected regions of said conductive barrier plane; (5) forming an interconnect layer atop the patterned photoresist and said selected regions of said conductive barrier plane; (6) utilizing lift-off techniques to remove the patterned photoresist and to remove interconnect layer material that is atop the patterned photoresist, thereby leaving raised areas of interconnect layer atop said selected portions of said barrier plane; (7) etching said barrier plane using said raised areas of interconnect layer as an etch mask, thereby forming a two-layer interconnect scheme; and (8) on a second side of said flexible piezoelectric membrane, forming a conductive barrier plane; (9) repeating steps (3) to (7), thereby forming a two-layer interconnect scheme on said second side of said flexible piezoelectric membrane.
Claim 19
Independent Claim
196 words
A method of forming a pattern of interconnect lines on a thin flexible membrane of piezoelectric material comprising the steps of: (1) securing a flexible piezoelectric membrane to a support structure such that said flexible piezoelectric membrane is stretched into a taut condition; (2) on a first side of said flexible piezoelectric membrane, forming a conductive barrier plane; (3) depositing a photoresist on said conductive barrier plane; (4) photolithographically patterning said photoresist to define openings to selected regions of said conductive barrier plane; (5) forming an interconnect layer atop the patterned photoresist and said selected regions of said conductive barrier plane; (6) utilizing lift-off techniques to remove the patterned photoresist and to remove interconnect layer material that is atop the patterned photoresist, thereby leaving raised areas of interconnect layer atop said selected portions of said barrier plane; (7) etching said barrier plane using said raised areas of interconnect layer as an etch mask, thereby forming a two-layer interconnect scheme; and (8) on a second side of said flexible piezoelectric membrane, forming a conductive barrier plane; (9) repeating steps (3) to (7), thereby forming a two-layer interconnect scheme on said second side of said flexible piezoelectric membrane.
Claim 20
Dependent Claim
27 words
The method of claim 16 further comprising forming a protective layer on said first side of said flexible piezoelectric membrane following step (7) and preceding step (8).
Claim 21
Dependent Claim
30 words
The method of claim 16 wherein said conductive barrier plane is formed by depositing a film including chromium and said interconnect layer is formed by depositing a film including gold.
Claim 22
Dependent Claim
15 words
The method of claim 16 wherein forming said conductive barrier plane includes forming focus marks.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-04-03 | 1998-10-03 | 1999-04-04 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-04-03 | 2002-10-03 | 2003-04-04 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-04-03 | 2006-10-03 | 2007-04-04 | $7700.00 | Window Closed / Lapsed |