US4816381A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method for fabricating PLZT light valve device
Assignee: Eastman Kodak Co
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Filing: 1987-07-17
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Granted: 1989-03-28
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Expires: 2007-07-17
Abstract
Abstract A method of fabricating a modulator panel for use in a light valve device, includes forming a metal pattern of spaced address electrode and pad portions on an ingress surface of the panel; heating the panel in a nitrogen atmosphere to remove moisture from the ingress surface; spin coating the ingress surface with a photoresist composition; and exposing and developing the photoresist coating so that the developed coating remains as a moisture impermeable layer, except over the electrode pad portions of the ingress surface.
Inventors
- 👤 Joseph Y. Kaukeinen
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 15:37
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/0005; G03F7/001; G02; G02F; G02F1/00; G02F1/01; G02F1/03; G02F1/055; G02F1/0551
Claims Analysis
Total Claims: 3
Claim 1
Independent Claim
127 words
A method of fabricating a modulator panel for use in a light valve device, said method comprising: (a) precleaning an electrooptic panel with organic solvent; (b) evaporation depositing a metal pattern of spaced address electrode and pad portions on an ingress surface of said panel; (c) immersing said ingress surface in an acid etch composition to clean said surface and thereafter washing said etch from said surface with deionized water; (d) heating said panel in a nitrogen atmosphere to remove moisture from said ingress surface; (e) spin coating said ingress surface in a clean environment with a photoresist composition; (f) drying the photoresist coating; and (g) exposing and developing said photoresist to form a moisture impermeable coating over said ingress surface except over the electrode pad areas.
Claim 2
Independent Claim
127 words
A method of fabricating a modulator panel for use in a light valve device, said method comprising: (a) precleaning an electrooptic panel with organic solvent; (b) evaporation depositing a metal pattern of spaced address electrode and pad portions on an ingress surface of said panel; (c) immersing said ingress surface in an acid etch composition to clean said surface and thereafter washing said etch from said surface with deionized water; (d) heating said panel in a nitrogen atmosphere to remove moisture from said ingress surface; (e) spin coating said ingress surface in a clean environment with a photoresist composition; (f) drying the photoresist coating; and (g) exposing and developing said photoresist to form a moisture impermeable coating over said ingress surface except over the electrode pad areas.
Claim 3
Dependent Claim
15 words
The invention defined in claim 1, wherein said photoresist coating is a cross-linkable photoresist composition.
References Cited (Backward Citations)
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-03-27 | 1992-09-26 | 1993-03-28 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-03-27 | 1996-09-26 | 1997-03-28 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-03-27 | 2000-09-26 | 2001-03-28 | $7700.00 | Window Closed / Lapsed |