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US5402029A
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Surface acoustic wave device using highly oriented diamond film
Assignee: Kobe Steel Ltd
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Filing: 1994-05-06
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Granted: 1995-03-28
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Expires: 2014-05-06
Abstract
Abstract A surface acoustic wave device uses a highly oriented diamond film with a planar surface, increasing the propagating velocity of a surface acoustic wave, and fabricating many devices on a large area without polishing processes. The surface acoustic wave device includes the highly oriented diamond films, a piezoelectric film and electrodes which are formed on the diamond film. In the highly oriented diamond film, 80% or more of the surface area of the diamond film is composed of the (100) faces or (111) faces of diamond; and the difference {Δα,Δβ,Δγ} between the Euler angles {α,β,γ} expressing the crystal orientations of the adjacent (100) or (111) faces of the diamond film simultaneously satisfies the relations of |Δα|≦10°, |Δβ|≦10°, and |Δγ|≦10°.
Inventors
- 👤 Rie Nakamura
- 👤 Koji Kobashi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 20:17
CPC Classifications
H; H03; H03H; H03H9/00; H03H9/02; H03H9/02535; H03H9/02543; H03H9/02582
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
87 words
A surface acoustic wave device using a highly oriented diamond film, comprising: a highly oriented diamond film formed by vapor-phase synthesis; and a piezoelectric layer and an electrode layer which are formed on said diamond film; wherein 80% or more of the surface area of said diamond film is composed of the (100) faces of diamond; and the difference {Δα,Δβ,Δγ} between the Euler angles {α,β,γ} expressing the crystal orientations of the adjacent (100) faces of said diamond film simultaneously satisfies the relations of |Δα|≦10°, |Δβ|≦10°, and |Δγ|≦10°.
Claim 2
Dependent Claim
87 words
A surface acoustic wave device using a highly oriented diamond film, comprising: a highly oriented diamond film formed by vapor-phase synthesis; and a piezoelectric layer and an electrode layer which are formed on said diamond film; wherein 80% or more of the surface area of said diamond film is composed of the (100) faces of diamond; and the difference {Δα,Δβ,Δγ} between the Euler angles {α,β,γ} expressing the crystal orientations of the adjacent (100) faces of said diamond film simultaneously satisfies the relations of |Δα|≦10°, |Δβ|≦10°, and |Δγ|≦10°.
Claim 3
Dependent Claim
90 words
A surface acoustic wave device using a highly oriented diamond film, comprising: a highly oriented diamond film formed by vapor-phase synthesis; and a piezoelectric layer and an electrode layer which are formed on said diamond film; wherein 80% or more of the surface area of said diamond film is composed of the (111) faces of diamond; and the difference {Δα,Δβ, Δγ} between the Euler angles {α, β, γ} expressing the crystal orientations of the adjacent (111) faces of said diamond film simultaneously satisfies the relations of |Δα|≦10°, |Δβ|≦110°, and |Δγ|≦10°.
Claim 4
Dependent Claim
90 words
A surface acoustic wave device using a highly oriented diamond film, comprising: a highly oriented diamond film formed by vapor-phase synthesis; and a piezoelectric layer and an electrode layer which are formed on said diamond film; wherein 80% or more of the surface area of said diamond film is composed of the (111) faces of diamond; and the difference {Δα,Δβ, Δγ} between the Euler angles {α, β, γ} expressing the crystal orientations of the adjacent (111) faces of said diamond film simultaneously satisfies the relations of |Δα|≦10°, |Δβ|≦110°, and |Δγ|≦10°.
Claim 5
Dependent Claim
100 words
A surface acoustic wave device using a highly oriented diamond film according to claim 1 or 2, wherein one or more layers of said diamond films are formed by vapor-phase synthesis on the whole or partial surfaces of said piezoelectric layer and said electrode layer, and which are clamped thereto; 80% or more of the surface area of said diamond film is composed of the (100) face of diamond; and the difference {Δα,Δβ,Δγ} between the Euler angles {(α,β,γ} expressing the crystal orientations of the adjacent (100) faces of said diamond film simultaneously satisfies the relations of |Δα|≦10°, |Δβ|≦10°, and |Δγ|≦10°.
Claim 6
Dependent Claim
100 words
A surface acoustic wave device using a highly oriented diamond film according to claim 1 or 2, wherein one or more layers of said diamond films are formed by vapor-phase synthesis on the whole or partial surfaces of said piezoelectric layer and said electrode layer, and which are clamped thereto; 80% or more of the surface area of said diamond film is composed of the (111) face of diamond; and the difference {Δα,Δβ,Δγ} between the Euler angles {α,β,γ} expressing the crystal orientations of the adjacent (111) faces of said diamond film simultaneously satisfies the relations of |Δα|≦10°, |Δβ|≦10°, and |Δγ|≦10°.
Claim 7
Dependent Claim
32 words
A surface acoustic wave device using a highly oriented diamond film according to any one of claims 1 or 2, wherein all of said highly oriented diamond films comprise insulating diamond films.
Claim 8
Dependent Claim
41 words
A surface acoustic wave device using a highly oriented diamond film according to any one of claims 1 or 2, wherein all or part of said highly oriented diamond films comprise semi-conducting diamond films doped with impurities such as boron (B).
Claim 9
Dependent Claim
27 words
A surface acoustic wave device using a highly oriented diamond film according to claim 3, wherein all of said highly oriented diamond films comprise insulating diamond films.
Claim 10
Dependent Claim
27 words
A surface acoustic wave device using a highly oriented diamond film according to claim 4, wherein all of said highly oriented diamond films comprise insulating diamond films.
Claim 11
Dependent Claim
36 words
A surface acoustic wave device using a highly oriented diamond film according to claim 3, wherein all or part of said highly oriented diamond films comprise semi-conducting diamond films doped with impurities such as boron (B).
Claim 12
Dependent Claim
36 words
A surface acoustic wave device using a highly oriented diamond film according to claim 4, wherein all or part of said highly oriented diamond films comprise semi-conducting diamond films doped with impurities such as boron (B).
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 1998-03-27 | 1998-09-26 | 1999-03-28 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-03-27 | 2002-09-26 | 2003-03-28 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-03-27 | 2006-09-26 | 2007-03-28 | $7700.00 | Window Closed / Lapsed |