Patent US5401972A successfully refreshed from Google Patents.
US5401972A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Layout overlay for FIB operations
Assignee: FEI EFA Inc
•
Filing: 1993-09-02
•
Granted: 1995-03-28
•
Expires: 2013-09-02
Abstract
Abstract Focused ion bean (FIB) milling through a power plane of a device to expose or cut a hidden, lower-layer conductor requires accurate positioning relative to the hidden conductor of a box defining boundaries of the FIB operation. This can in general be done by aligning surface information (topology or voltage contrast) visible in a FIB or scanning electron microscope (SEM) image with an overlay image generated from stored data describing the device. The location of the hidden conductor relative to the visible surface information is determined from the stored data. Advanced integrated circuits often do not provide enough unique surface information near the FIB operation area to align the images with sufficient accuracy. In accordance with the invention, the imaging area is accurately deflected electronically (without moving the stage or changing the operating conditions of the FIB) to permit alignment over a much larger area, while maintaining pixel resolution and overlay accuracy needed to accurately position the FIB operation box.
Inventors
- 👤 Christopher G. Talbot
- 👤 Douglas Masnaghetti
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-10 01:08
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/30; H01J37/304; H01J37/3045; G; G01; G01R; G01R31/00; G01R31/28; G01R31/302; G01R31/303; H01J2237/00; H01J2237/30; H01J2237/317; H01J2237/3174; H01J2237/31742
Claims Analysis
Total Claims: 24
Claim 1
Independent Claim
192 words
A method of determining the site of a selected feature of a specimen, comprising the steps of: a. fixing a beam source (402) relative to a surface of a specimen (416) so that a beam (410) from the source can be directed at the surface over a region (506) which includes an expected site of a selected feature (504) of the specimen; b. scanning the beam over a first alignment area (514) of the surface to acquire a first contrast image in which a first feature (518) is visible and which excludes the expected site of the selected feature; c. displaying the first contrast image; d. generating from stored data describing features of the specimen a first overlay image which includes a representation of the first feature; e. displaying the first overlay image; f. registering the first overlay image with the first contrast image using as a first alignment point the representation of the first feature in the first overlay image and the first feature visible in the first contrast image; and g. determining the site of the selected feature from the stored data using the first alignment point as a reference.
Claim 2
Independent Claim
192 words
A method of determining the site of a selected feature of a specimen, comprising the steps of: a. fixing a beam source (402) relative to a surface of a specimen (416) so that a beam (410) from the source can be directed at the surface over a region (506) which includes an expected site of a selected feature (504) of the specimen; b. scanning the beam over a first alignment area (514) of the surface to acquire a first contrast image in which a first feature (518) is visible and which excludes the expected site of the selected feature; c. displaying the first contrast image; d. generating from stored data describing features of the specimen a first overlay image which includes a representation of the first feature; e. displaying the first overlay image; f. registering the first overlay image with the first contrast image using as a first alignment point the representation of the first feature in the first overlay image and the first feature visible in the first contrast image; and g. determining the site of the selected feature from the stored data using the first alignment point as a reference.
Claim 3
Dependent Claim
144 words
The method of claim 1, further comprising the steps prior to step g. of: h. scanning the beam over a second alignment area (516) of the surface to acquire a second contrast image in which a second feature (520) is visible and which excludes the expected site of the selected feature; i. displaying the second contrast image; j. generating from said stored data a second overlay image which includes a representation of the second feature; k. displaying the second overlay image; l. registering the second overlay image with the second contrast image using as a second alignment point the representation of the second feature in the second overlay image and the second feature visible in the second contrast image; and wherein step g. further comprises determining the site of the selected feature from the stored data using the second alignment point as a reference
Claim 4
Dependent Claim
142 words
The method of claim 2, further comprising the steps prior to step g. of: m. scanning the beam over a third alignment area of the surface to acquire a third contrast image in which a third feature is visible and which excludes the expected site of the selected feature; n. displaying the third contrast image; o. generating from said stored data a third overlay image which includes a representation of the third feature; p. displaying the third overlay image; q. registering the third overlay image with the third contrast image using as a third alignment point the representation of the third feature in the third overlay image and the third feature visible in the third contrast image; and wherein step g. further comprises determining tile site of the selected feature from the stored data using the third alignment point as a reference.
Claim 5
Dependent Claim
34 words
The method of claim 1, where step b. further comprises acquiring the first contrast image with a resolution sufficient for registering with a predetermined accuracy the first overlay image and the first contrast image.
Claim 6
Dependent Claim
52 words
The method of claim 4, further comprising the steps prior to step b. of acquiring a large-area contrast image which includes the first alignment area (514) and said region (506) at a low resolution, the low resolution being inadequate for registering a contrast image and a layout image with said predetermined accuracy.
Claim 7
Dependent Claim
44 words
The method of claim 1, further comprising the steps of: h. acquiring and displaying a contrast image of said region (506); and i. superposing on tile displayed contrast image of said region an overlay showing the site of the hidden feature of the device.
Claim 8
Dependent Claim
45 words
The method of claim 1, wherein the beam source comprises a FIB column responsive to deflection control signals for controllably scanning the beam over the surface, and wherein step b. further comprises generating deflection control signals for scanning the beam over the first alignment area.
Claim 9
Dependent Claim
56 words
The method of claim 7, wherein generating deflection control signals for scanning the beam over the first alignment area comprises generating deflection control signals for scanning the beam over the region, and summing the deflection signals for scanning the beam over the region with offset signals to thereby scan the beam over the first alignment area.
Claim 10
Dependent Claim
23 words
The method of claim 7, wherein scanning the beam over the first alignment area comprises maintaining unchanged operating conditions of the beam source.
Claim 11
Dependent Claim
24 words
The method of claim 1, wherein step c. further comprises acquiring the first contrast image with an X-Y aspect ratio of other than 1:1.
Claim 12
Dependent Claim
32 words
The method of claim 10, wherein step e. further comprises displaying the first overlay image with an X-Y aspect ratio equal to the X-Y aspect ratio of the acquired first contrast image.
Claim 13
Dependent Claim
68 words
The method of claim 1, wherein the sample comprises a multi-layered IC device having offsets between layers of the device, wherein said stored data comprises layout information for each layer of the IC device and offset information describing the offsets between the layers of the device, and wherein step g. further comprises determining the site of the selected feature from the layout information and from the offset information.
Claim 14
Dependent Claim
32 words
The method of claim 1, wherein the stored data describing features of the specimen comprises a CAD description of the specimen, and wherein the first overlay image comprises a CAD layout image.
Claim 15
Dependent Claim
31 words
The method of claim 1, wherein the stored data describing features of the specimen comprises an optical description of the specimen, and wherein the first overlay image comprises an optical image.
Claim 16
Dependent Claim
46 words
The method of claim 1, wherein the beam source further comprises an electron-beam column responsive to deflection control signals for controllably scanning an electron beam over the surface, and wherein step b. comprises generating deflection control signals for scanning the beam over the first alignment area.
Claim 17
Independent Claim
192 words
A method of determining the site of a selected feature of a specimen, comprising the steps of: a. fixing a beam source (402) relative to a surface of a specimen (416) so that a beam (410) from the source can be directed at the surface over a region (506) which includes an expected site of a selected feature (504) of the specimen; b. scanning the beam over a first alignment area (514) of the surface to acquire a first contrast image having an X-Y aspect ratio of other than 1:1 and in which a first feature (518) is visible; c. displaying the first contrast image; d. generating from stored data describing features of the specimen a first overlay image which includes a representation of the first feature; e. displaying the first overlay image; f. registering the first overlay image with the first contrast image using as a first alignment point the representation of the first feature in the first overlay image and the first feature visible in the first contrast image; and g. determining the site of the selected feature from the stored data using the first alignment point as a reference.
Claim 18
Independent Claim
192 words
A method of determining the site of a selected feature of a specimen, comprising the steps of: a. fixing a beam source (402) relative to a surface of a specimen (416) so that a beam (410) from the source can be directed at the surface over a region (506) which includes an expected site of a selected feature (504) of the specimen; b. scanning the beam over a first alignment area (514) of the surface to acquire a first contrast image having an X-Y aspect ratio of other than 1:1 and in which a first feature (518) is visible; c. displaying the first contrast image; d. generating from stored data describing features of the specimen a first overlay image which includes a representation of the first feature; e. displaying the first overlay image; f. registering the first overlay image with the first contrast image using as a first alignment point the representation of the first feature in the first overlay image and the first feature visible in the first contrast image; and g. determining the site of the selected feature from the stored data using the first alignment point as a reference.
Claim 19
Dependent Claim
32 words
The method of claim 16, wherein step e. further comprises displaying the first overlay image with an X-Y aspect ratio equal to the X-Y aspect ratio of the acquired first contrast image.
Claim 20
Dependent Claim
45 words
The method of claim 16, wherein the beam source comprises a FIB column responsive to deflection control signals for controllably scanning the beam over the surface, and wherein step b. further comprises generating deflection control signals for scanning the beam over the first alignment area.
Claim 21
Dependent Claim
46 words
The method of claim 16, wherein the beam source comprises an electron-beam column responsive to deflection control signals for controllably scanning an electron beam over the surface, and wherein step b. further comprises generating deflection control signals for scanning the beam over the first alignment area.
Claim 22
Dependent Claim
32 words
The method of claim 16, wherein the stored data describing features of the specimen comprises a CAD description of the specimen, and wherein the first overlay image comprises a CAD layout image.
Claim 23
Dependent Claim
146 words
Apparatus for positioning a beam relative to a selected feature of a specimen, comprising: a. a focused-particle beam column (402) responsive to deflection control signals for controllably scanning a beam (410) over a region of a surface of a specimen (416); b. a source (438) of an X-deflection control signal; c. a source (604) of an X-offset control signal; d. a first junction (608) for combining the X-deflection control signal with the X-deflection offset signal to produce a resultant X-axis signal and for supplying the resultant X-axis signal to the focused-particle beam column; e. a source (440) of a Y-deflection control signal; f. a source (606) of a Y-offset control signal; and g. a second junction (614) for combining the Y-deflection control signal with the Y-deflection offset signal to produce a resultant Y-axis signal and for supplying the resultant Y-axis signal to the focused-particle beam column.
Claim 24
Dependent Claim
146 words
Apparatus for positioning a beam relative to a selected feature of a specimen, comprising: a. a focused-particle beam column (402) responsive to deflection control signals for controllably scanning a beam (410) over a region of a surface of a specimen (416); b. a source (438) of an X-deflection control signal; c. a source (604) of an X-offset control signal; d. a first junction (608) for combining the X-deflection control signal with the X-deflection offset signal to produce a resultant X-axis signal and for supplying the resultant X-axis signal to the focused-particle beam column; e. a source (440) of a Y-deflection control signal; f. a source (606) of a Y-offset control signal; and g. a second junction (614) for combining the Y-deflection control signal with the Y-deflection offset signal to produce a resultant Y-axis signal and for supplying the resultant Y-axis signal to the focused-particle beam column.
References Cited (Backward Citations)
US4683378A
Cited
US4971444A
Cited
US4795260A
Cited
US5004927A
Cited
JPH0282516A
Cited
US5054097A
Cited
JPH03209813A
Cited
US5140164A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-03-27 | 1998-09-26 | 1999-03-28 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-03-27 | 2002-09-26 | 2003-03-28 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-03-27 | 2006-09-26 | 2007-03-28 | $7700.00 | Window Closed / Lapsed |