US4795260A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Apparatus for locating and testing areas of interest on a workpiece
Assignee: Therma Wave Inc
•
Filing: 1987-05-15
•
Granted: 1989-01-03
•
Expires: 2007-05-15
Abstract
Abstract The subject invention relates to a method and apparatus for identifying and testing the location of areas of interest on a workpiece and specifically, unmasked areas on a semiconductor wafer. In the subject method, the surface of the wafer is scanned with a search beam of radiation. The power of the reflected search beam will be a function of the optical reflectivity of the surface of the sample. Since the optical reflectivity of the unmasked areas are different from the masked areas, the power measurement of the reflected search beam can be used to identify the location of areas to be measured. In the preferred testing procedure, an intensity modulated pump beam is used to periodically excite a region in the identified unmasked area. A probe beam is then directed within the periodically excited region and the periodic changes in the power of the reflected probe beam, induced by the pump beam, are measured to evaluate ion dopant concentrations or the effects of processing steps, such as etching, on the surface of the wafer.
Inventors
- 👤 John Schuur
- 👤 David L. Willenborg
- 👤 Michael W. Taylor
- 👤 Allan Rosencwaig
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 16:19
CPC Classifications
G; G01; G01R; G01R31/00; G01R31/28; G01R31/302; G01R31/308; G01R31/311; G01N; G01N21/00; G01N21/17; G01N2021/178; G01N21/55; G01N2021/555; G01N21/84; G01N21/88; G01N21/8851; G01N2021/8854; G01N2021/8867; G01N21/95; G01N21/9501
Claims Analysis
Total Claims: 28
Claim 1
Independent Claim
114 words
A method of testing an area of interest on a workpiece where the area of interest has an optical reflectivity different from all other areas on the workpiece and where the location of the area of interest is unknown, said method comprising the steps of: scanning the surface of the workpiece with a pair of search beams in a manner such that said search beams are reflected, with each search beam having a different wavelength; measuring the power of each of the reflected search beams as they are scanned; processing the measured power of the reflected search beams to identify the location of the area of interest; and testing the identified area of interest.
Claim 2
Independent Claim
114 words
A method of testing an area of interest on a workpiece where the area of interest has an optical reflectivity different from all other areas on the workpiece and where the location of the area of interest is unknown, said method comprising the steps of: scanning the surface of the workpiece with a pair of search beams in a manner such that said search beams are reflected, with each search beam having a different wavelength; measuring the power of each of the reflected search beams as they are scanned; processing the measured power of the reflected search beams to identify the location of the area of interest; and testing the identified area of interest.
Claim 3
Independent Claim
49 words
A method as recited in claim I wherein at least one dimension of the area of interest to be tested must fall within a set parameter and further including the step of determining said dimension of the area of interest as the search beams are scanned over the workpiece.
Claim 4
Independent Claim
125 words
A method of testing areas of interest on a workpiece where the areas of interest have an optical reflectivity different from all other areas on the workpiece and where the location of the areas of interest are unknown, said method comprising the steps of: scanning the surface of the workpiece with a pair of search beams in a manner such that said search beams are reflected, with each search beam having a different wavelength; measuring the power of each of the reflected search beams as they are scanned; processing the measured power of the reflected search beams to identify the location of areas of interest; storing the locations of the identified areas of interest; and selecting at least one of those identified areas for testing.
Claim 5
Independent Claim
125 words
A method of testing areas of interest on a workpiece where the areas of interest have an optical reflectivity different from all other areas on the workpiece and where the location of the areas of interest are unknown, said method comprising the steps of: scanning the surface of the workpiece with a pair of search beams in a manner such that said search beams are reflected, with each search beam having a different wavelength; measuring the power of each of the reflected search beams as they are scanned; processing the measured power of the reflected search beams to identify the location of areas of interest; storing the locations of the identified areas of interest; and selecting at least one of those identified areas for testing.
Claim 6
Dependent Claim
49 words
A method as recited in claim 3 wherein at least one dimension of the areas of interest to be tested must fall within a set parameter and further including the step of determining said dimension of the areas of interest as the search beams are scanned over the workpiece.
Claim 7
Independent Claim
140 words
An apparatus for testing areas of interest on a workpiece where the areas of interest have an optical reflectivity different from all other areas on the workpiece and where the location of the areas of interest are unknown, said apparatus comprising: means for generating a first search beam of radiation, said first search beam having a first wavelength; means for generating a second search beam of radiation, said second search beam having a second wavelength different from said first wavelength; means for scanning said search beams over the surface of the workpiece such that they are reflected; means for measuring the power of the reflected search beams; processor means for identifying an area of interest on the workpiece based on the measured power of the reflected search beams; and means for testing the workpiece at the identified area of interest.
Claim 8
Independent Claim
140 words
An apparatus for testing areas of interest on a workpiece where the areas of interest have an optical reflectivity different from all other areas on the workpiece and where the location of the areas of interest are unknown, said apparatus comprising: means for generating a first search beam of radiation, said first search beam having a first wavelength; means for generating a second search beam of radiation, said second search beam having a second wavelength different from said first wavelength; means for scanning said search beams over the surface of the workpiece such that they are reflected; means for measuring the power of the reflected search beams; processor means for identifying an area of interest on the workpiece based on the measured power of the reflected search beams; and means for testing the workpiece at the identified area of interest.
Claim 9
Dependent Claim
27 words
An apparatus as recited in claim 5 wherein said means for testing includes measuring the power of one of said beams of radiation with said measuring means.
Claim 10
Dependent Claim
26 words
An apparatus as recited in claim 5 wherein data representative of the optical reflectivity of the surface of the workpiece is stored in said processor means.
Claim 11
Dependent Claim
32 words
An apparatus as recited in claim 5 wherein said processor means stores the location of areas of interest that have been identified and selects certain of said identified areas for subsequent testing.
Claim 12
Dependent Claim
21 words
An apparatus as recited in claim 5 wherein the means for generating one of said beams is an argon ion laser.
Claim 13
Dependent Claim
21 words
An apparatus as recited in claim 5 wherein the means for generating one of said beams is a helium neon laser.
Claim 14
Independent Claim
141 words
A method of evaluating surface conditions within the unmasked areas on a masked semiconductor wafer comprising the steps of: scanning the surface of the wafer with first and second search beams of radiation in a manner such that the beams are reflected, with each said beam having a different wavelength; measuring the power of the reflected search beams as they are scanned; processing the measured power of the reflected search beams to identify the location of unmasked areas on the wafer; periodically exciting the surface of the wafer within an identified unmasked area; directing said first beam of radiation within the region that is being periodically excited such that the first beam is reflected; and measuring the periodic reflected power of the first beam induced by the periodic excitation of the wafer to evaluate the surface conditions within the unmasked area.
Claim 15
Independent Claim
141 words
A method of evaluating surface conditions within the unmasked areas on a masked semiconductor wafer comprising the steps of: scanning the surface of the wafer with first and second search beams of radiation in a manner such that the beams are reflected, with each said beam having a different wavelength; measuring the power of the reflected search beams as they are scanned; processing the measured power of the reflected search beams to identify the location of unmasked areas on the wafer; periodically exciting the surface of the wafer within an identified unmasked area; directing said first beam of radiation within the region that is being periodically excited such that the first beam is reflected; and measuring the periodic reflected power of the first beam induced by the periodic excitation of the wafer to evaluate the surface conditions within the unmasked area.
Claim 16
Dependent Claim
43 words
A method as recited in claim 11 wherein said step of periodically exciting the surface of the wafer is performed by intensity modulating said second beam of radiation and directing said intensity modulated second beam of radiation onto the surface of the wafer.
Claim 17
Dependent Claim
36 words
A method as recited in claim 11 further including the step of storing the locations of the unmasked ares of interest that are identified and selecting at least one of those identified areas for subsequent evaluation.
Claim 18
Dependent Claim
47 words
A method as recited in claim 11 wherein at least one dimension of the unmasked areas to be tested must fall within a set parameter and further including the step of determining said dimension of the unmasked area as the search beam is scanned over the wafer.
Claim 19
Dependent Claim
38 words
An method as recited in claim 11 wherein the periodic variations in the reflected power of the first beam induced by the periodic excitation are used to evaluate ion dopant concentrations in the unmasked areas on the wafer.
Claim 20
Dependent Claim
38 words
An method as recited in claim 11 wherein the periodic variations in the reflected power of the first beam induced by the periodic excitation are used to evaluate effects of etching in the unmasked areas on the wafer.
Claim 21
Independent Claim
206 words
An apparatus for evaluating surface conditions within the unmasked areas on a masked semiconductor wafer comprising: means for generating a pump beam of radiation having a first wavelength; means for intensity modulating the pump beam; means for generating a probe beam of radiation having a wavelength different from the pump beam; means for scanning said beams with respect to said wafer such that they are reflected; means for measuring the power of the reflected radiation beams; and processor means for controlling the operation of said beam generating means, modulating means, scanning means and measuring means, with both of said radiation beams being used as search beams that are scanned over the surface of the wafer, with the reflected power of the search beams being used to identify the location of unmasked areas on the wafer, and with selected ones of said identified areas being evaluated by intensity modulating and directing said pump beam onto an unmasked area and directing the probe beam into the region within that unmasked area that is being periodically excited by the pump beam, with the periodic changes in power of the reflected probe beam induced by the intensity modulated pump beam being used to evaluate the surface conditions on the wafer.
Claim 22
Independent Claim
206 words
An apparatus for evaluating surface conditions within the unmasked areas on a masked semiconductor wafer comprising: means for generating a pump beam of radiation having a first wavelength; means for intensity modulating the pump beam; means for generating a probe beam of radiation having a wavelength different from the pump beam; means for scanning said beams with respect to said wafer such that they are reflected; means for measuring the power of the reflected radiation beams; and processor means for controlling the operation of said beam generating means, modulating means, scanning means and measuring means, with both of said radiation beams being used as search beams that are scanned over the surface of the wafer, with the reflected power of the search beams being used to identify the location of unmasked areas on the wafer, and with selected ones of said identified areas being evaluated by intensity modulating and directing said pump beam onto an unmasked area and directing the probe beam into the region within that unmasked area that is being periodically excited by the pump beam, with the periodic changes in power of the reflected probe beam induced by the intensity modulated pump beam being used to evaluate the surface conditions on the wafer.
Claim 23
Dependent Claim
26 words
An apparatus as recited in claim 17 wherein data representative of the optical reflectivity of the surface of the wafer is stored in said processor means.
Claim 24
Dependent Claim
31 words
An apparatus as recited in claim 18 wherein said data corresponds to the oxide thickness on a semiconductor wafer and said processor means calculates the data representative of the optical reflectivity.
Claim 25
Dependent Claim
39 words
An apparatus as recited in claim 17 wherein the periodic changes in the reflected power of the probe beam induced by the modulated pump beam are used to evaluate ion dopant concentrations in the unmasked areas on the wafer.
Claim 26
Dependent Claim
40 words
An apparatus as recited in claim 17 wherein the periodic changes in the reflected power of the probe beam induced by the modulated pump beam are used to evaluate the effects of etching on the unmasked areas on the wafer.
Claim 27
Dependent Claim
20 words
An apparatus as recited in claim 17 wherein the means for generating said pump beam is an argon ion laser.
Claim 28
Dependent Claim
20 words
An apparatus as recited in claim 17 wherein the means for generating said probe beam is a helium nean laser.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-01-03 | 1992-07-04 | 1993-01-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-01-03 | 1996-07-04 | 1997-01-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-01-03 | 2000-07-04 | 2001-01-03 | $7700.00 | Window Closed / Lapsed |