US4636088A
Expired / Lapsed
US
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Method and apparatus for evaluating surface conditions of a sample
Assignee: Therma Wave Inc
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Filing: 1984-05-21
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Granted: 1987-01-13
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Expires: 2004-05-21
Abstract
Abstract An apparatus and method is disclosed for evaluating surface conditions on a sample. The system is particularly suited for detecting thin residues encountered in semiconductor lithographic and etching processes. The system is also capable of measuring ion implanted dopant concentrations prior to annealing. The apparatus includes an intensity modulated laser beam which is focused on the surface of the sample to generate periodic heating. A second light beam is focused onto the periodically heated area of the sample in a manner such that it is reflected to a detector. The intensity changes in the probe beam, resulting from the temperature induced changes of reflectivity at the surface of the sample, are measured and evaluated to determine the absence or presence of residues, or to measure the concentrations of ion implanted dopants.
Inventors
- 👤 Allan Rosencwaig
- 👤 Walter L. Smith
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 20:15
CPC Classifications
G; G01; G01N; G01N21/00; G01N21/17; G01N21/171
Claims Analysis
Total Claims: 33
Claim 1
Independent Claim
173 words
An apparatus for evaluating the surface conditions of a sample by measuring intensity variations of a reflected probe beam resulting from periodic changes in optical reflectivity of the sample induced by localized periodic heating, said apparatus comprising: means for inducing a localized periodic heating at the surface of the sample; a probe for emitting a beam of radiation; means for directing the radiation probe beam within a portion of the area periodically heated by said periodic heating means in a manner such that the radiation probe beam reflects off the surface of the sample; means for measuring the intensity variations of the reflected radiation probe beam resulting from the periodic changes in optical reflectivity of the sample induced by the periodic heating with the measured intensity changes being independent of changes in diameter or position of the probe beam; and means for processing the measured intensity variations of the reflected radiation probe beam resulting from the periodic changes in optical reflectivity of the sample to evaluate the surface conditions of the sample surface.
Claim 2
Independent Claim
173 words
An apparatus for evaluating the surface conditions of a sample by measuring intensity variations of a reflected probe beam resulting from periodic changes in optical reflectivity of the sample induced by localized periodic heating, said apparatus comprising: means for inducing a localized periodic heating at the surface of the sample; a probe for emitting a beam of radiation; means for directing the radiation probe beam within a portion of the area periodically heated by said periodic heating means in a manner such that the radiation probe beam reflects off the surface of the sample; means for measuring the intensity variations of the reflected radiation probe beam resulting from the periodic changes in optical reflectivity of the sample induced by the periodic heating with the measured intensity changes being independent of changes in diameter or position of the probe beam; and means for processing the measured intensity variations of the reflected radiation probe beam resulting from the periodic changes in optical reflectivity of the sample to evaluate the surface conditions of the sample surface.
Claim 3
Dependent Claim
36 words
An apparatus as recited in claim 1 wherein said means for directing said radiation probe beam is arranged to direct said probe beam at the center of the area periodically heated by said periodic heating means.
Claim 4
Dependent Claim
20 words
An apparatus as recited in claim 1 where said periodic heating means is defined by an intensity modulated laser beam.
Claim 5
Dependent Claim
22 words
An apparatus as recited in claim 3 wherein said radiation probe beam is directed to be coincident with the heating laser beam.
Claim 6
Dependent Claim
30 words
An apparatus as recited in claim 4 further including a means for focusing said heating laser beam and said radiation probe to a spot size of 1 micron in diameter.
Claim 7
Dependent Claim
24 words
An apparatus as recited in claim 1 wherein said means for measuring the intensity variations of the reflected radiation probe beam is a photodetector.
Claim 8
Dependent Claim
30 words
An apparatus as recited in claim 1 wherein said processor means functions by comparing the intensity variations of the reflected radiation probe beam to those obtained from a known standard.
Claim 9
Dependent Claim
47 words
An apparatus as recited in claim 1 further including a means for rastering said sample relative to said heating means and said radiation probe beam wherein said processing means functions to compare intensity variations of the reflected radiation probe beam measured over the surface of the sample.
Claim 10
Dependent Claim
16 words
An apparatus as recited in claim 1 wherein said radiation probe is defined by a laser.
Claim 11
Dependent Claim
20 words
An apparatus as recited in claim 1 wherein said probe beam is directed to underfill the surface of the photodetector.
Claim 12
Independent Claim
172 words
An apparatus for detecting residues on a sample by measuring intensity variations of a reflected probe beam resulting from periodic changes in optical reflectivity of the sample induced by localized periodic heating, said apparatus comprising: means for inducing a localized periodic heating at the surface of the sample; a probe for emitting a beam of radiation; means for directing the radiation probe beam within a portion of the area periodically heated by said periodic heating means in a manner such that the radiation probe beam reflects off the surface of the sample; means for measuring the intensity variations of the reflected radiation probe beam resulting from the periodic changes in optical reflectivity of the sample induced by the periodic heating with the measured intensity changes being independent of changes in diameter or position of the probe beam; and means for processing the measured intensity variations of the reflected radiation probe beam resulting from the periodic changes in optical reflectivity of the sample to determine if residues are present on the sample surface.
Claim 13
Independent Claim
172 words
An apparatus for detecting residues on a sample by measuring intensity variations of a reflected probe beam resulting from periodic changes in optical reflectivity of the sample induced by localized periodic heating, said apparatus comprising: means for inducing a localized periodic heating at the surface of the sample; a probe for emitting a beam of radiation; means for directing the radiation probe beam within a portion of the area periodically heated by said periodic heating means in a manner such that the radiation probe beam reflects off the surface of the sample; means for measuring the intensity variations of the reflected radiation probe beam resulting from the periodic changes in optical reflectivity of the sample induced by the periodic heating with the measured intensity changes being independent of changes in diameter or position of the probe beam; and means for processing the measured intensity variations of the reflected radiation probe beam resulting from the periodic changes in optical reflectivity of the sample to determine if residues are present on the sample surface.
Claim 14
Dependent Claim
36 words
An apparatus as recited in claim 11, wherein said means for directing said radiation probe beam is arranged to direct said probe beam at the center of the area periodically heated by said periodic heating means.
Claim 15
Dependent Claim
20 words
An apparatus as recited in claim 11, wherein said periodic heating means is defined by an intensity modulated laser beam.
Claim 16
Dependent Claim
37 words
An apparatus as recited in claim 13, further including a means for focusing said intensity modulated laser beam and said radiation probe beam in a coincident manner and to a spot size of 1 micron in diameter.
Claim 17
Dependent Claim
20 words
An apparatus as recited in claim 14 wherein said probe beam is directed to underfill the surface of the photodetector.
Claim 18
Independent Claim
170 words
An apparatus for measuring dopant concentrations in a sample by measuring intensity variations of a reflected probe beam resulting from periodic changes in optical reflectivity of the sample induced by periodic heating, said apparatus comprising: means for inducing a localized periodic heating at the surface of the sample; a probe for emitting a beam of radiation; means for directing the radiation probe beam within a portion of the area periodically heated by said periodic heating means in a manner such that the radiation probe beam reflects off the surface of the sample; means for measuring the intensity variations of the reflected radiation probe beam resulting from the periodic changes in optical reflectivity of the sample induced by the periodic heating with the measured intensity changes being independent of changes in diameter or position of the probe beam; and means for processing the measured intensity variations of the reflected radiation probe beam resulting from the periodic changes in optical reflectivity of the sample to evaluate the dopant concentrations in the sample.
Claim 19
Independent Claim
170 words
An apparatus for measuring dopant concentrations in a sample by measuring intensity variations of a reflected probe beam resulting from periodic changes in optical reflectivity of the sample induced by periodic heating, said apparatus comprising: means for inducing a localized periodic heating at the surface of the sample; a probe for emitting a beam of radiation; means for directing the radiation probe beam within a portion of the area periodically heated by said periodic heating means in a manner such that the radiation probe beam reflects off the surface of the sample; means for measuring the intensity variations of the reflected radiation probe beam resulting from the periodic changes in optical reflectivity of the sample induced by the periodic heating with the measured intensity changes being independent of changes in diameter or position of the probe beam; and means for processing the measured intensity variations of the reflected radiation probe beam resulting from the periodic changes in optical reflectivity of the sample to evaluate the dopant concentrations in the sample.
Claim 20
Dependent Claim
36 words
An apparatus as recited in claim 16, wherein said means for directing said radiation probe beam is arranged to direct said probe beam at the center of the area periodically heated by said periodic heating means.
Claim 21
Dependent Claim
22 words
An apparatus as recited in claim 16, wherein said means for inducing the localized periodic heating is an intensity modulated laser beam.
Claim 22
Dependent Claim
20 words
An apparatus as recited in claim 16 wherein said probe beam is directed to underfill the surface of the photodetector.
Claim 23
Independent Claim
156 words
A method for evaluating the surface conditions on a sample by measuring intensity variations of a reflected probe beam resulting from the periodic changes in optical reflectivity of the sample induced by localized periodic heating, said method comprising the steps of: inducing a periodic localized heating on the surface of the sample; directing a radiation beam within a portion of the area periodically heated by the periodic heat source in a manner such that the radiation beam reflects from the surface of the sample; measuring the intensity variations of the reflected radiation beam resulting from said periodic changes in optical reflectivity of the sample induced by said periodic heating with the measured intensity changes being independent of changes in diameter or position of the probe beam; and processing the measured intensity variations of the reflected radiation beam resulting from the periodic changes in optical reflectivity of the sample to evaluate the conditions of the sample surface.
Claim 24
Independent Claim
156 words
A method for evaluating the surface conditions on a sample by measuring intensity variations of a reflected probe beam resulting from the periodic changes in optical reflectivity of the sample induced by localized periodic heating, said method comprising the steps of: inducing a periodic localized heating on the surface of the sample; directing a radiation beam within a portion of the area periodically heated by the periodic heat source in a manner such that the radiation beam reflects from the surface of the sample; measuring the intensity variations of the reflected radiation beam resulting from said periodic changes in optical reflectivity of the sample induced by said periodic heating with the measured intensity changes being independent of changes in diameter or position of the probe beam; and processing the measured intensity variations of the reflected radiation beam resulting from the periodic changes in optical reflectivity of the sample to evaluate the conditions of the sample surface.
Claim 25
Dependent Claim
25 words
A method as recited in claim 16 wherein said radiation beam is directed at the center of the periodically heated area on the sample surface.
Claim 26
Dependent Claim
31 words
A method as recited in claim 16 wherein said processing step is carried out by comparing the intensity variations of the reflected radiation beam to those obtained from a known standard.
Claim 27
Dependent Claim
42 words
A method as recited in claim 16 further including the step of rastering the sample relative to the periodic heat source wherein said processing step includes comparing the intensity variations of the reflected radiation beam measured over the surface of the sample.
Claim 28
Independent Claim
156 words
A method for detecting residues on a sample by measuring intensity variations of a reflected probe beam resulting from the periodic changes in optical reflectivity of the sample induced by localized periodic heating, said method comprising the steps of: inducing a periodic localized heating on the surface of the sample; directing a radiation beam within a portion of the area periodically heated by the periodic heat source in a manner such that the radiation beam reflects from the surface of the sample; measuring the intensity variations of the reflected radiation beam resulting from said periodic changes in optical reflectivity of the sample induced by said periodic heating with the measured intensity changes being independent of changes in diameter or position of the probe beam; and processing the measured intensity variations of the reflected radiation beam resulting from the periodic changes in optical reflectivity of the sample to determine if residues are present on the sample surface.
Claim 29
Independent Claim
156 words
A method for detecting residues on a sample by measuring intensity variations of a reflected probe beam resulting from the periodic changes in optical reflectivity of the sample induced by localized periodic heating, said method comprising the steps of: inducing a periodic localized heating on the surface of the sample; directing a radiation beam within a portion of the area periodically heated by the periodic heat source in a manner such that the radiation beam reflects from the surface of the sample; measuring the intensity variations of the reflected radiation beam resulting from said periodic changes in optical reflectivity of the sample induced by said periodic heating with the measured intensity changes being independent of changes in diameter or position of the probe beam; and processing the measured intensity variations of the reflected radiation beam resulting from the periodic changes in optical reflectivity of the sample to determine if residues are present on the sample surface.
Claim 30
Dependent Claim
27 words
A method as recited in claim 24 wherein said radiation beam is directed at the center of the periodically heated area on the surface of the sample.
Claim 31
Independent Claim
155 words
A method for measuring dopant concentrations in a sample by measuring intensity variations of a reflected probe beam resulting from the periodic changes in optical reflectivity of the sample induced by localized periodic heating, said method comprising the steps of: inducing a periodic localized heating on the surface of the sample; directing a radiation beam within a portion of the area periodically heated by the periodic heat source in a manner such that the radiation beam reflects from the surface of the sample; measuring the intensity variations of the reflected radiation beam resulting from said periodic changes in optical reflectivity of the sample induced by said periodic heating with the measured intensity changes being independent of changes in diameter or position of the probe beam; and processing the measured intensity variations of the reflected radiation beam resulting from the periodic changes in optical reflectivity of the sample to evaluate the dopant concentrations in the sample.
Claim 32
Independent Claim
155 words
A method for measuring dopant concentrations in a sample by measuring intensity variations of a reflected probe beam resulting from the periodic changes in optical reflectivity of the sample induced by localized periodic heating, said method comprising the steps of: inducing a periodic localized heating on the surface of the sample; directing a radiation beam within a portion of the area periodically heated by the periodic heat source in a manner such that the radiation beam reflects from the surface of the sample; measuring the intensity variations of the reflected radiation beam resulting from said periodic changes in optical reflectivity of the sample induced by said periodic heating with the measured intensity changes being independent of changes in diameter or position of the probe beam; and processing the measured intensity variations of the reflected radiation beam resulting from the periodic changes in optical reflectivity of the sample to evaluate the dopant concentrations in the sample.
Claim 33
Dependent Claim
25 words
A method as recited in claim 26 wherein said radiation beam is directed at the center of the periodically heated area on the sample surface.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1990-01-12 | 1990-07-14 | 1991-01-13 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1994-01-12 | 1994-07-14 | 1995-01-13 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1998-01-12 | 1998-07-14 | 1999-01-13 | $7700.00 | Window Closed / Lapsed |