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US5380558A
Expired / Lapsed
US
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Method of manufacturing shaped body having straight stripes
Assignee: Hoya Corp
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Filing: 1992-03-20
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Granted: 1995-01-10
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Expires: 2012-03-20
Abstract
Abstract In a method of manufacturing a shaped body, the shaped body has a surface on which a plurality of concaves-convexes are formed in parallel relation to each other in the form of straight stripes. The method comprises the steps of: (i) projecting a vertical cross-sectional configuration of the shaped body, onto a thin planar plate, with an equal magnification in a horizontal direction and with an enlarged magnification in a vertical direction and, subsequently, boring or opening portions of the thin planar plate corresponding respectively to vertically elongated convex portions of the shaped body, to produce a vapor-deposition mask plate having therein openings; (ii) arranging the vapor-deposition mask plate produced by the step (1), on a planar substrate with a predetermined space left therebetween; (iii) executing vapor-deposition operation while one of the planar substrate and the vapor-deposition mask plate is fixed and the other is linearly reciprocated at a uniform velocity along a longitudinal direction of the openings, to deposit a vapor-deposition material onto the planar substrate through the openings in the vapor-deposition mask plate.
Inventors
- 👤 Takuo Fujino
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 05:05
CPC Classifications
G; G02; G02B; G02B27/00; G02B27/42; G02B27/46; C; C23; C23C; C23C14/00; C23C14/04; C23C14/042; C23C14/044; G02B3/00; G02B5/00; G02B5/18; G02B5/1847; G02B5/1866; G02B5/1871; G02B6/00; G02B6/10; G02B6/12; G02B6/122; G02B6/124
Claims Analysis
Total Claims: 17
Claim 1
Independent Claim
194 words
A method of manufacturing a shaped body, said shaped body having a surface on which a plurality of concaves and convexes are formed in parallel relation to each other in the form of straight stripes, said method comprising the steps of: (i) projecting a vertical cross-sectional configuration of said shaped body, onto a thin planar plate, with an equal magnification in a horizontal direction and with an enlarged magnification of 1,000-1,000,000 times in a vertical direction and, subsequently, boring or opening portions of said thin planar plate corresponding respectively to vertically elongated convex portions of said shaped body, to produce a vapor-deposition mask plate having therein openings, each of said openings having opposite ends with different widths in the vertical direction; (ii) arranging said vapor-deposition mask plate produced by said step (i), on a planar substrate with a predetermined space left therebetween; and (iii) executing vapor-deposition operation while one of said planar substrate and said vapor-deposition mask plate is fixed and the other is linearly reciprocated at a uniform velocity along the vertical direction of said openings, to deposit a vapor-deposition material onto said planar substrate through said openings in said vapor-deposition mask plate.
Claim 2
Independent Claim
194 words
A method of manufacturing a shaped body, said shaped body having a surface on which a plurality of concaves and convexes are formed in parallel relation to each other in the form of straight stripes, said method comprising the steps of: (i) projecting a vertical cross-sectional configuration of said shaped body, onto a thin planar plate, with an equal magnification in a horizontal direction and with an enlarged magnification of 1,000-1,000,000 times in a vertical direction and, subsequently, boring or opening portions of said thin planar plate corresponding respectively to vertically elongated convex portions of said shaped body, to produce a vapor-deposition mask plate having therein openings, each of said openings having opposite ends with different widths in the vertical direction; (ii) arranging said vapor-deposition mask plate produced by said step (i), on a planar substrate with a predetermined space left therebetween; and (iii) executing vapor-deposition operation while one of said planar substrate and said vapor-deposition mask plate is fixed and the other is linearly reciprocated at a uniform velocity along the vertical direction of said openings, to deposit a vapor-deposition material onto said planar substrate through said openings in said vapor-deposition mask plate.
Claim 3
Dependent Claim
33 words
A method according to claim 1, wherein, in said step (11), said vapor-deposition mask plate is arranged in parallel relation to said planar substrate with said space at most 0.5 mm left therebetween.
Claim 4
Dependent Claim
43 words
A method according to claim 1, wherein said shaped body is selected from the group consisting of a filter, a lenticular lens, a diffraction grating, each of which is formed of glass material, and a mold which is used for manufacturing the same.
Claim 5
Dependent Claim
41 words
A method according to claim 1, wherein said shaped body is a glass-made low-pass filter having a straight stripe pattern, and wherein said shaped body has a plurality of convexes each of which is a trapezoid having a pair of inclinations.
Claim 6
Dependent Claim
21 words
A method according to claim 4, wherein said vapor-deposition mask plate is a SUS 304 plate whose thickness is 5 mm.
Claim 7
Dependent Claim
27 words
A method according to claim 1, wherein each of said openings in said vapor-deposition mask plate has a cross-section of a one-side knife or sharp edge form.
Claim 8
Dependent Claim
16 words
A method according to claim 1, wherein said planar substrate is a polished quartz glass disc.
Claim 9
Dependent Claim
23 words
A method according to claim 1, wherein quartz vapor is deposited on a surface of said planar substrate at a constant vapor-deposition speed.
Claim 10
Dependent Claim
26 words
A method according to claim 1, wherein the concaves and convexes are brought to a straight stripe pattern in which a cross-sectional configuration is substantially trapezoidal.
Claim 11
Dependent Claim
19 words
A method according to claim 1, wherein said stripe has a cross-sectional configuration which is a semi-elliptical cross-sectional configuration.
Claim 12
Dependent Claim
19 words
A method according to claim 1, wherein said stripe has a cross-sectional configuration which is a triangular cross-sectional configuration.
Claim 13
Dependent Claim
18 words
A method according to claim 1, wherein said stripe has a cross-sectional configuration which is a sine-curve configuration.
Claim 14
Dependent Claim
28 words
A method according to claim 1, wherein said stripe has a cross-sectional configuration which is a configuration in which left- and right-hand inclinations are different from each other.
Claim 15
Dependent Claim
22 words
A method according to claim 1, wherein said openlngs formed through said vapor-deposition mask plate are arranged in a single horizontal row.
Claim 16
Dependent Claim
22 words
A method according to claim 1, wherein said openings are arranged in two rows and are turned through 180 degrees every one.
Claim 17
Dependent Claim
27 words
A method according to claim 1, wherein said vapor-deposition mask plate includes a plurality of thin plates through each of which openings are formed by chemical etching.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-01-09 | 1998-07-11 | 1999-01-10 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-01-09 | 2002-07-11 | 2003-01-10 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-01-09 | 2006-07-11 | 2007-01-10 | $7700.00 | Window Closed / Lapsed |