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US5380558A Expired / Lapsed US ⏱️ 0.0 years remaining

Method of manufacturing shaped body having straight stripes

Assignee: Hoya Corp
•
Filing: 1992-03-20
•
Granted: 1995-01-10
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Expires: 2012-03-20
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Abstract

Abstract In a method of manufacturing a shaped body, the shaped body has a surface on which a plurality of concaves-convexes are formed in parallel relation to each other in the form of straight stripes. The method comprises the steps of: (i) projecting a vertical cross-sectional configuration of the shaped body, onto a thin planar plate, with an equal magnification in a horizontal direction and with an enlarged magnification in a vertical direction and, subsequently, boring or opening portions of the thin planar plate corresponding respectively to vertically elongated convex portions of the shaped body, to produce a vapor-deposition mask plate having therein openings; (ii) arranging the vapor-deposition mask plate produced by the step (1), on a planar substrate with a predetermined space left therebetween; (iii) executing vapor-deposition operation while one of the planar substrate and the vapor-deposition mask plate is fixed and the other is linearly reciprocated at a uniform velocity along a longitudinal direction of the openings, to deposit a vapor-deposition material onto the planar substrate through the openings in the vapor-deposition mask plate.

Inventors

  • 👤 Takuo Fujino

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-09 04:56
CPC Classifications
G; G02; G02B; G02B27/00; G02B27/42; G02B27/46; C; C23; C23C; C23C14/00; C23C14/04; C23C14/042; C23C14/044; G02B3/00; G02B5/00; G02B5/18; G02B5/1847; G02B5/1866; G02B5/1871; G02B6/00; G02B6/10; G02B6/12; G02B6/122; G02B6/124

Claims Analysis

Total Claims: 17
Claim 1
Independent Claim 194 words
A method of manufacturing a shaped body, said shaped body having a surface on which a plurality of concaves and convexes are formed in parallel relation to each other in the form of straight stripes, said method comprising the steps of: (i) projecting a vertical cross-sectional configuration of said shaped body, onto a thin planar plate, with an equal magnification in a horizontal direction and with an enlarged magnification of 1,000-1,000,000 times in a vertical direction and, subsequently, boring or opening portions of said thin planar plate corresponding respectively to vertically elongated convex portions of said shaped body, to produce a vapor-deposition mask plate having therein openings, each of said openings having opposite ends with different widths in the vertical direction; (ii) arranging said vapor-deposition mask plate produced by said step (i), on a planar substrate with a predetermined space left therebetween; and (iii) executing vapor-deposition operation while one of said planar substrate and said vapor-deposition mask plate is fixed and the other is linearly reciprocated at a uniform velocity along the vertical direction of said openings, to deposit a vapor-deposition material onto said planar substrate through said openings in said vapor-deposition mask plate.
Claim 2
Independent Claim 194 words
A method of manufacturing a shaped body, said shaped body having a surface on which a plurality of concaves and convexes are formed in parallel relation to each other in the form of straight stripes, said method comprising the steps of: (i) projecting a vertical cross-sectional configuration of said shaped body, onto a thin planar plate, with an equal magnification in a horizontal direction and with an enlarged magnification of 1,000-1,000,000 times in a vertical direction and, subsequently, boring or opening portions of said thin planar plate corresponding respectively to vertically elongated convex portions of said shaped body, to produce a vapor-deposition mask plate having therein openings, each of said openings having opposite ends with different widths in the vertical direction; (ii) arranging said vapor-deposition mask plate produced by said step (i), on a planar substrate with a predetermined space left therebetween; and (iii) executing vapor-deposition operation while one of said planar substrate and said vapor-deposition mask plate is fixed and the other is linearly reciprocated at a uniform velocity along the vertical direction of said openings, to deposit a vapor-deposition material onto said planar substrate through said openings in said vapor-deposition mask plate.
Claim 3
Dependent Claim 33 words
A method according to claim 1, wherein, in said step (11), said vapor-deposition mask plate is arranged in parallel relation to said planar substrate with said space at most 0.5 mm left therebetween.
Claim 4
Dependent Claim 43 words
A method according to claim 1, wherein said shaped body is selected from the group consisting of a filter, a lenticular lens, a diffraction grating, each of which is formed of glass material, and a mold which is used for manufacturing the same.
Claim 5
Dependent Claim 41 words
A method according to claim 1, wherein said shaped body is a glass-made low-pass filter having a straight stripe pattern, and wherein said shaped body has a plurality of convexes each of which is a trapezoid having a pair of inclinations.
Claim 6
Dependent Claim 21 words
A method according to claim 4, wherein said vapor-deposition mask plate is a SUS 304 plate whose thickness is 5 mm.
Claim 7
Dependent Claim 27 words
A method according to claim 1, wherein each of said openings in said vapor-deposition mask plate has a cross-section of a one-side knife or sharp edge form.
Claim 8
Dependent Claim 16 words
A method according to claim 1, wherein said planar substrate is a polished quartz glass disc.
Claim 9
Dependent Claim 23 words
A method according to claim 1, wherein quartz vapor is deposited on a surface of said planar substrate at a constant vapor-deposition speed.
Claim 10
Dependent Claim 26 words
A method according to claim 1, wherein the concaves and convexes are brought to a straight stripe pattern in which a cross-sectional configuration is substantially trapezoidal.
Claim 11
Dependent Claim 19 words
A method according to claim 1, wherein said stripe has a cross-sectional configuration which is a semi-elliptical cross-sectional configuration.
Claim 12
Dependent Claim 19 words
A method according to claim 1, wherein said stripe has a cross-sectional configuration which is a triangular cross-sectional configuration.
Claim 13
Dependent Claim 18 words
A method according to claim 1, wherein said stripe has a cross-sectional configuration which is a sine-curve configuration.
Claim 14
Dependent Claim 28 words
A method according to claim 1, wherein said stripe has a cross-sectional configuration which is a configuration in which left- and right-hand inclinations are different from each other.
Claim 15
Dependent Claim 22 words
A method according to claim 1, wherein said openlngs formed through said vapor-deposition mask plate are arranged in a single horizontal row.
Claim 16
Dependent Claim 22 words
A method according to claim 1, wherein said openings are arranged in two rows and are turned through 180 degrees every one.
Claim 17
Dependent Claim 27 words
A method according to claim 1, wherein said vapor-deposition mask plate includes a plurality of thin plates through each of which openings are formed by chemical etching.

References Cited (Backward Citations)

US4303489A Cited
JPS5545019A Cited
US4278528A Cited
US4391034A Cited
US4562093A Cited
US4704306A Cited
US4776868A Cited
US4988424A Cited
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USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1998-01-09 1998-07-11 1999-01-10 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 2002-01-09 2002-07-11 2003-01-10 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2006-01-09 2006-07-11 2007-01-10 $7700.00 Window Closed / Lapsed

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