US5379719A
Expired / Lapsed
US
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Method of deposition by molecular beam epitaxy
Assignee: National Technology and Engineering Solutions of Sandia LLC
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Filing: 1993-07-26
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Granted: 1995-01-10
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Expires: 2013-07-26
Abstract
Abstract A method is described for reproducibly controlling layer thickness and varying layer composition in an MBE deposition process. In particular, the present invention includes epitaxially depositing a plurality of layers of material on a substrate with a plurality of growth cycles whereby the average of the instantaneous growth rates for each growth cycle and from one growth cycle to the next remains substantially constant as a function of time.
Inventors
- 👤 Scott A. Chalmers
- 👤 Kevin P. Killeen
- 👤 Kevin L. Lear
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 21:01
CPC Classifications
C; C30; C30B; C30B29/00; C30B29/10; C30B29/40; C30B23/00; C30B23/002
Claims Analysis
Total Claims: 24
Claim 1
Independent Claim
105 words
A method of molecular beam epitaxial (MBE) deposition with a MBE system having at least one source cell, comprising the following steps: a) varying operating temperatures of each source cell between a first and second temperature so as to yield a plurality of different instantaneous growth rates in each growth cycle and at least two growth cycles for depositing a layer of material on a substrate; and b) controlling the temperature of each source cell such that the average of the different instantaneous growth rates remains substantially constant as a function of time for each growth cycle and from one growth cycle to the next.
Claim 2
Independent Claim
105 words
A method of molecular beam epitaxial (MBE) deposition with a MBE system having at least one source cell, comprising the following steps: a) varying operating temperatures of each source cell between a first and second temperature so as to yield a plurality of different instantaneous growth rates in each growth cycle and at least two growth cycles for depositing a layer of material on a substrate; and b) controlling the temperature of each source cell such that the average of the different instantaneous growth rates remains substantially constant as a function of time for each growth cycle and from one growth cycle to the next.
Claim 3
Dependent Claim
18 words
The method of claim 1, further including controlling the number of growth cycles to achieve a layer thickness.
Claim 4
Dependent Claim
22 words
The method of claim 1, further including depositing a layer on the substrate having a varying composition of at least two materials.
Claim 5
Dependent Claim
24 words
The method of claim 1, further including, depositing at least two layers of alternating composition on the substrate employing at least two growth cycles.
Claim 6
Dependent Claim
23 words
The method of claim 4, further including controlling the temperature of each source cell so as to vary the composition of each layer.
Claim 7
Dependent Claim
26 words
The method of claim 4, further including varying the different instantaneous growth rate of each source cell so as to vary the composition of each layer.
Claim 8
Dependent Claim
23 words
The method of claim 4, further including forming an interlayer between each layer having a composition graduated from one layer to the next.
Claim 9
Dependent Claim
28 words
The method of claim 7, further including forming an interlayer between each layer composed of at least two, piece-wise linear compositions graduated from one layer to the next.
Claim 10
Dependent Claim
24 words
The method of claim 8, wherein the operating temperature of each source cell is varied so as to vary the composition of the interlayer.
Claim 11
Independent Claim
150 words
A method for forming distributed Bragg reflectors (DBRs) with a molecular beam epitaxial (MBE) deposition system having at least two source cells, comprising the steps of: a) varying the operating temperature of a first source cell between a first temperature and a second temperature and generating a plurality of different instantaneous growth rates in each growth cycle for depositing a layer of a first material on a substrate; b) varying the operating temperature of a second source cell between a third temperature and a fourth temperature and generating a plurality of different instantaneous growth rates for depositing a layer of a second material on the first layer; and c) controlling the temperatures of each source cell such that the average of the different instantaneous growth rates for each source cell remains substantially constant as a function of time for each growth cycle and from one growth cycle to the next.
Claim 12
Independent Claim
150 words
A method for forming distributed Bragg reflectors (DBRs) with a molecular beam epitaxial (MBE) deposition system having at least two source cells, comprising the steps of: a) varying the operating temperature of a first source cell between a first temperature and a second temperature and generating a plurality of different instantaneous growth rates in each growth cycle for depositing a layer of a first material on a substrate; b) varying the operating temperature of a second source cell between a third temperature and a fourth temperature and generating a plurality of different instantaneous growth rates for depositing a layer of a second material on the first layer; and c) controlling the temperatures of each source cell such that the average of the different instantaneous growth rates for each source cell remains substantially constant as a function of time for each growth cycle and from one growth cycle to the next.
Claim 13
Dependent Claim
18 words
The method of claim 10, further including producing a plurality of alternating layers of first and second materials.
Claim 14
Dependent Claim
21 words
The method of claim 11 further including controlling the number of layers of first and second materials to achieve a thickness.
Claim 15
Dependent Claim
25 words
The method of claim 11 further including controlling the composition of the layers of first and second materials to achieve a DBR center reflection wavelength.
Claim 16
Dependent Claim
20 words
The method of claim 13, further including controlling the center reflection wavelength to within ±2% for a plurality of DBRs.
Claim 17
Dependent Claim
29 words
The method of claim 10, further including forming an interlayer between each layer of first and second materials having a composition linearly graduated from one layer to the next.
Claim 18
Dependent Claim
26 words
The method of claim 10, further including forming an interlayer between each layer of first and second materials having at least two piece-wise linearly graduated compositions.
Claim 19
Dependent Claim
31 words
The method of claim 10 wherein the temperatures of each source cell are ramped through a periodic profile so as to minimize overshoots in the measured temperature of each source cell.
Claim 20
Dependent Claim
19 words
The method of claim 17, wherein the temperature profiles for each source cell are approximately 180° out of phase.
Claim 21
Independent Claim
113 words
A method for epitaxially depositing at least one layer of material on a substrate, comprising the following steps: a) varying the operating temperature of at least one source cell in a molecular beam epitaxial (MBE) deposition apparatus between a first and a second temperature during a growth cycle so as to yield a plurality of variations in growth rates of the layer of material deposited during the growth cycle; and b) controlling the temperature of the at least one source cell in the MBE deposition apparatus such that an average of the plurality of variations in growth rates remains substantially constant for each growth cycle and from one growth cycle to the next.
Claim 22
Independent Claim
113 words
A method for epitaxially depositing at least one layer of material on a substrate, comprising the following steps: a) varying the operating temperature of at least one source cell in a molecular beam epitaxial (MBE) deposition apparatus between a first and a second temperature during a growth cycle so as to yield a plurality of variations in growth rates of the layer of material deposited during the growth cycle; and b) controlling the temperature of the at least one source cell in the MBE deposition apparatus such that an average of the plurality of variations in growth rates remains substantially constant for each growth cycle and from one growth cycle to the next.
Claim 23
Dependent Claim
23 words
The method of claim 19, further including controlling the temperature of each source cell so as to vary the composition of each layer.
Claim 24
Dependent Claim
28 words
The method of claim 20, further including forming an interlayer between each layer composed of at least two, piece-wise linear compositions graduated from one layer to the next.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-01-09 | 1998-07-11 | 1999-01-10 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-01-09 | 2002-07-11 | 2003-01-10 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-01-09 | 2006-07-11 | 2007-01-10 | $7700.00 | Window Closed / Lapsed |