US5094974A
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Growth of III-V films by control of MBE growth front stoichiometry
Assignee: GOVERNMENT OF United States, AS REPRESENTED BY NASA ADMINISTRATOR
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Filing: 1990-02-28
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Granted: 1992-03-10
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Expires: 2010-02-28
Abstract
Abstract For the growth of strain-layer materials and high quality single and multiple quantum wells, the instantaneous control of growth front stoichiometry is critical. The process of the invention adjusts the offset or phase of MBE control shutters to program the instantaneous arrival or flux rate of In and As 4 reactants to grow InAs. The interrupted growth of first In, then As 4 , is also a key feature.
Inventors
- 👤 Frank J. Grunthaner
- 👤 John K. Liu
- 👤 Bruce R. Hancock
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 23:37
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/20; H10P14/29; H10P14/2901; H10P14/22; H10P14/2902; H10P14/2905; H10P14/2907; H10P14/2911; H10P14/2912; H10P14/32; H10P14/3202; H10P14/3214; H10P14/3221; H10P14/3242; H10P14/3244; H10P14/3251; H10P14/3252; H10P14/34; H10P14/3402; H10P14/3414; H10P14/3421; H10P14/3422; Y; Y10; Y10S; Y10S148/00; Y10S148/022; Y10S148/025; Y10S148/169
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
173 words
A method of growing strained thin films of InAs on a substrate selected from the group consisting of III-V compound semiconductors and Group IV elemental semiconductors by molecular beam epitaxy using growth front control, said InAs having a different composition than said substrate, in which introduction of a specific elemental species is controlled by sequentially opening shutters for each species for a period of time, the method comprising introducing a period of delay before opening each shutter in order to permit specific reactions to occur and thereby control the stoichiometry of said growth front as follows: (a) exposing the surface of said substrate to As 4 for a period of time to smooth said surface; (b) forming about 0.01 to 0.5 monolayers of Ga on said As 4 -smoothed substrate; (c) forming about 2 monolayers of In on said substrate; (d) delaying for a period of time, then forming about 1 monolayer of As on said substrate; and (e) repeating steps (c) and (d) as needed to form a plurality of InAs layers.
Claim 2
Independent Claim
173 words
A method of growing strained thin films of InAs on a substrate selected from the group consisting of III-V compound semiconductors and Group IV elemental semiconductors by molecular beam epitaxy using growth front control, said InAs having a different composition than said substrate, in which introduction of a specific elemental species is controlled by sequentially opening shutters for each species for a period of time, the method comprising introducing a period of delay before opening each shutter in order to permit specific reactions to occur and thereby control the stoichiometry of said growth front as follows: (a) exposing the surface of said substrate to As 4 for a period of time to smooth said surface; (b) forming about 0.01 to 0.5 monolayers of Ga on said As 4 -smoothed substrate; (c) forming about 2 monolayers of In on said substrate; (d) delaying for a period of time, then forming about 1 monolayer of As on said substrate; and (e) repeating steps (c) and (d) as needed to form a plurality of InAs layers.
Claim 3
Dependent Claim
25 words
The method of claim 1 wherein said substrate consists essentially of a material selected from the group consisting of GaAs, InP, InAs, Si, and Ge.
Claim 4
Dependent Claim
99 words
The method of claim 6 wherein (a) said surface smoothing is achieved by exposing said substrate to As 4 for several minutes; (b) said Ga is formed on said surface by exposing said surface to a pulse of Ga ranging from about 0.1 to 0.5 seconds; (c) said In is formed on said surface by exposing said surface to a pulse of In ranging from about 0.9 to 4 seconds; and (d) delaying said As exposure by about 0.2 to 3 seconds, then exposing said surface to a pulse of As 4 ranging from about 0.2 to 2 seconds.
Claim 5
Dependent Claim
42 words
The method of claim 1 wherein a plurality of GaAs layers are formed on said plurality of InAs layers by simultaneously forming about 1 monolayer each of Ga and As on said substrate, and repeating such formation following a period of delay.
Claim 6
Dependent Claim
19 words
The process of claim 4 in which said period of delay ranges from about 0.5 seconds to 2 minutes.
Claim 7
Independent Claim
149 words
A method of growing strained thin films of InAs on a GaAs substrate by molecular beam epitaxy using growth front control, in which initial introduction of As and Ga to control step density on said GaAs substrate and in which introduction of In and As species is controlled by sequentially opening shutters in order to permit specific reactions to occur and thereby control the stoichiometry of said growth front as follows: (a) exposing the surface of said GaAs substrate to As 4 for a period of time to smooth said surface; (b) forming about 0.01 to 0.5 monolayers of Ga on said As 4 -smoothed substrate; (c) forming about 2 monolayers of In on said substrate; (d) delaying for a period of time, then forming about 1 monolayer of As on said substrate; and (e) repeating steps (c) and (d) as needed to form a plurality of InAs layers.
Claim 8
Independent Claim
149 words
A method of growing strained thin films of InAs on a GaAs substrate by molecular beam epitaxy using growth front control, in which initial introduction of As and Ga to control step density on said GaAs substrate and in which introduction of In and As species is controlled by sequentially opening shutters in order to permit specific reactions to occur and thereby control the stoichiometry of said growth front as follows: (a) exposing the surface of said GaAs substrate to As 4 for a period of time to smooth said surface; (b) forming about 0.01 to 0.5 monolayers of Ga on said As 4 -smoothed substrate; (c) forming about 2 monolayers of In on said substrate; (d) delaying for a period of time, then forming about 1 monolayer of As on said substrate; and (e) repeating steps (c) and (d) as needed to form a plurality of InAs layers.
Claim 9
Dependent Claim
100 words
The method of claim 6 wherein (a) said surface smoothing is achieved by exposing said substrate to As 4 for several minutes; (b) said Ga is formed on said surface by exposing said surface to a pulse of Ga ranging from about 0.1 to 0.5 seconds; (c) said In is formed on said surface by exposing said surface to a pulse of In ranging from about 0.9 to 4 seconds; and (d) delaying said As 4 exposure by about 0.2 to 3 seconds, then exposing said surface to a pulse of As 4 ranging from about 0.2 to 2 seconds.
Claim 10
Dependent Claim
42 words
The method of claim 6 wherein a plurality of GaAs layers are formed on said plurality of InAs layers by simultaneously forming about 1 monolayer each of Ga and As on said substrate, and repeating such formation following a period of delay.
Claim 11
Dependent Claim
19 words
The process of claim 8 in which said period of delay ranges from about 0.5 seconds to 2 minutes.
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