US5170407A
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Elimination of heterojunction band discontinuities
Assignee: Nokia Bell Labs
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Filing: 1991-10-11
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Granted: 1992-12-08
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Expires: 2011-10-11
Abstract
Abstract Conduction band or valence band discontinuities occurring at the junction of two unipolar heterogeneous semiconductors can be eliminated by compositional grading of the heterointerface and appropriate doping of the interfacial region. The compositional potential of graded junction and an interface dipole potential generated by modulation doping of the interfacial region are selected such that they exactly compensate each other. The compositional grading of the interface is achieved by semiparabolic grading of narrow regions immediately adjacent each side of the interface. The modulation doping is achieved by doping the two materials with suitable dopants, donors for the conductance band or acceptors for the valence band, depending on the polarity of the structure. This reduces the resistance in periodic semiconductor multilayer structures leading to low-resistance distributed Bragg reflectors.
Inventors
- 👤 Erdmann F. Schubert
- 👤 Li-Wei Tu
- 👤 George J. Zydzik
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 06:29
CPC Classifications
H; H01; H01S; H01S5/00; H01S5/06; H01S5/10; H01S5/18; H01S5/183; H01S5/18361; H01S5/04; H01S5/042; H01S5/0421; H01S5/30; H01S5/305; H01S5/32; H01S5/3211
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
167 words
An optical device including at least one multilayer distributed Bragg reflector mirror consisting of a plurality of pairs of semiconductor layers stacked one upon another, one layer in each pair having an index of refraction which is different from the index of refraction of the other layer of the pair, any two adjacent layers forming a heterojunction, one of the two adjacent layers having a first composition and a first bandgap and the other of the two adjacent layers having a second composition and a second bandgap, the second bandgap being greater than the first bandgap, characterized in that a region on both sides of each heterojunction is semiparabolically composition graded beginning with the composition of one layer and ending with the composition of the other layer, and a selected one of these regions of each heterojunction is modulation doped with dopants creating an electric dipole, whereby one of the conduction band, E c and valence band, E v is smoothed out and the other becomes flat.
Claim 2
Dependent Claim
167 words
An optical device including at least one multilayer distributed Bragg reflector mirror consisting of a plurality of pairs of semiconductor layers stacked one upon another, one layer in each pair having an index of refraction which is different from the index of refraction of the other layer of the pair, any two adjacent layers forming a heterojunction, one of the two adjacent layers having a first composition and a first bandgap and the other of the two adjacent layers having a second composition and a second bandgap, the second bandgap being greater than the first bandgap, characterized in that a region on both sides of each heterojunction is semiparabolically composition graded beginning with the composition of one layer and ending with the composition of the other layer, and a selected one of these regions of each heterojunction is modulation doped with dopants creating an electric dipole, whereby one of the conduction band, E c and valence band, E v is smoothed out and the other becomes flat.
Claim 3
Dependent Claim
35 words
The optical device of claim 1, in which the modulated dopant concentration is produced by doping a region on the wide-gap side of the heterojunction and retaining undoped a region on the narrow-gap material side.
Claim 4
Dependent Claim
27 words
The optical device of claim 2 in which said dopant is an acceptor, and the E c band is smoothed out and E v band becomes flat.
Claim 5
Dependent Claim
28 words
The optical device of claim 2 in which said dopant is a donor and the E v band is smoothed out and the E c band becomes flat.
Claim 6
Dependent Claim
27 words
The optical device of claim 1, in which the layers of the DBR are deposited and the regions adjacent the heterojunction are semiparabolically graded by MBE technique.
Claim 7
Dependent Claim
63 words
The optical device of claim 1, in which said device is a surface emitting laser, said DBR mirror is a unipolar, p-type structure, the edge of conduction band, E c , is smoothed out and the edge of valence band, E v , is flat, and the DBR mirror structure has a lower mirror resistance value relative to an ungraded and/or unmodulated structure.
Claim 8
Independent Claim
174 words
The method of reducing resistance to a current flow across a unipolar structure having a plurality of pairs of semiconductor layers stacked one upon another, one layer in each pair having an index of refraction which is different from the index of refraction of the other layer of the pair, any two adjacent layers forming a heterojunction, one of the two adjacent layers having a first composition and a first bandgap and the other of the two adjacent layers having a second composition and a second bandgap, the second bandgap being wider than the first bandgap characterized by reducing the resistance of the structure by grading the composition of a region on each side of each heterojunction semiparabolically beginning with the composition of one layer and ending with the composition of the other layer and modulation doping a selected one of these regions of each heterojunction with dopants creating an electric dipole, whereby one of the conduction band, E c , and valence band, E v is smoothed out and the other becomes flat.
Claim 9
Independent Claim
174 words
The method of reducing resistance to a current flow across a unipolar structure having a plurality of pairs of semiconductor layers stacked one upon another, one layer in each pair having an index of refraction which is different from the index of refraction of the other layer of the pair, any two adjacent layers forming a heterojunction, one of the two adjacent layers having a first composition and a first bandgap and the other of the two adjacent layers having a second composition and a second bandgap, the second bandgap being wider than the first bandgap characterized by reducing the resistance of the structure by grading the composition of a region on each side of each heterojunction semiparabolically beginning with the composition of one layer and ending with the composition of the other layer and modulation doping a selected one of these regions of each heterojunction with dopants creating an electric dipole, whereby one of the conduction band, E c , and valence band, E v is smoothed out and the other becomes flat.
Claim 10
Dependent Claim
34 words
The method of claim 7, in which the modulated dopant concentration is produced by doping a region on the wide-gap side of the heterojunction and retaining undoped a region on the narrow-gap material side.
Claim 11
Dependent Claim
26 words
The method of claim 8 in which said dopant is an acceptor, and the E c band is smoothed out and E v band becomes flat.
Claim 12
Dependent Claim
27 words
The method of claim 8 in which said dopant is a donor and the E v band is smoothed out and the E c band becomes flat.
Claim 13
Dependent Claim
23 words
The method of claim 7, in which the layers are deposited and the regions adjacent the heterojunction are semiparabolically graded by MBE technique.
Claim 14
Dependent Claim
60 words
A method of claim 7, in which said device is a surface emitting laser, said DBR mirror is a unipolar, p-type structure, the edge of conduction band, E c , is smoothed out and the edge of valence band, E v is flat, and the DBR mirror structure has a lower resistance value relative to an ungraded and/or unmodulated structure.
References Cited (Backward Citations)
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