Patent US2055061A successfully refreshed from Google Patents.
Patent US5379233A successfully refreshed from Google Patents.
US5379233A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method and structure for improving patterning design for processing
Assignee: LSI Corp
•
Filing: 1991-07-19
•
Granted: 1995-01-03
•
Expires: 2011-07-19
Abstract
Abstract A method of interactive feedback in semiconductor processing is provided which compensates for lithographic proximity effects, reactive ion etch loading effects, electromigration and stress due to layering.
Inventors
- 👤 Prabhakar P. Tripathi
- 👤 Bruce Whitefield
- 👤 Chi-Hung Wang
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 19:17
CPC Classifications
G; G06; G06F; G06F30/00; G06F30/30; G06F30/39; G06F30/398; H; H10; H10W; H10W20/00; H10W20/01; H10W20/031; H10W20/071; H10W20/081; H10W20/089; H10W20/092; H10W20/40
Claims Analysis
Total Claims: 17
Claim 1
Independent Claim
64 words
A circuit chip comprising: a semiconductor wafer; a working line formed on said semiconductor wafer for electrically connecting circuit elements thereon; one or more floating lines that are formed on said semiconductor wafer and positioned adjacent said working line; wherein said one or more floating lines and said working line together have a surface area of metallization at least equal to a predetermined amount.
Claim 2
Dependent Claim
64 words
A circuit chip comprising: a semiconductor wafer; a working line formed on said semiconductor wafer for electrically connecting circuit elements thereon; one or more floating lines that are formed on said semiconductor wafer and positioned adjacent said working line; wherein said one or more floating lines and said working line together have a surface area of metallization at least equal to a predetermined amount.
Claim 3
Dependent Claim
19 words
A circuit chip of claim 1, further comprising a plurality of additional working lines formed on said semiconductor wafer.
Claim 4
Dependent Claim
18 words
A circuit chip of claim 2, wherein at least one of said working lines is a lonely line.
Claim 5
Dependent Claim
21 words
A circuit chip of claim 3, wherein said floating line is positioned within a predetermined distance range from said lonely line.
Claim 6
Independent Claim
95 words
A method of circuit layout comprising the steps of: (a) determining a surface area of a layer of metallization used in said circuit layout; (b) comparing said surface area determined with a first predetermined value; (c) determining a distance between a first working line and a second working line to determine if said first or said second working line is a lonely line; (d) comparing said distance to a second predetermined value; if said distance is greater than said second predetermined value, (e) placing a dummy line at a predetermined distance from said lonely line.
Claim 7
Independent Claim
95 words
A method of circuit layout comprising the steps of: (a) determining a surface area of a layer of metallization used in said circuit layout; (b) comparing said surface area determined with a first predetermined value; (c) determining a distance between a first working line and a second working line to determine if said first or said second working line is a lonely line; (d) comparing said distance to a second predetermined value; if said distance is greater than said second predetermined value, (e) placing a dummy line at a predetermined distance from said lonely line.
Claim 8
Dependent Claim
27 words
A method of circuit layout of claim 5 further comprising step: (f) repeating steps (a) through (e) until said area is at least said first predetermined value.
Claim 9
Dependent Claim
26 words
A method of circuit layout of claim 6 further comprising step: (c1) distinguishing said dummy line from said working line; wherein step (c1) follows step (c).
Claim 10
Independent Claim
138 words
A method of circuit layout implemented by a computer comprising the steps of: (a) determining a surface area of a layer of metallization used in said circuit; (b) comparing said area determined with a first predetermined value; if said area is less than said first predetermined value, said computer proceeding with the following series of steps; (c) initializing a mesh pattern of local wires with physical wires; (d) removing an overlap between said local and said physical wires; (e) removing portions of said local wires which are within a first predetermined distance from said physical wires; (f) removing segments of said local wires of a length less than a second predetermined value; (g) creating a boundary of a second predetermined distance surrounding said physical wires; and (h) removing segments of said local wires which are outside said boundary.
Claim 11
Independent Claim
138 words
A method of circuit layout implemented by a computer comprising the steps of: (a) determining a surface area of a layer of metallization used in said circuit; (b) comparing said area determined with a first predetermined value; if said area is less than said first predetermined value, said computer proceeding with the following series of steps; (c) initializing a mesh pattern of local wires with physical wires; (d) removing an overlap between said local and said physical wires; (e) removing portions of said local wires which are within a first predetermined distance from said physical wires; (f) removing segments of said local wires of a length less than a second predetermined value; (g) creating a boundary of a second predetermined distance surrounding said physical wires; and (h) removing segments of said local wires which are outside said boundary.
Claim 12
Dependent Claim
46 words
A method of circuit layout of claim 8 further comprising the steps: (i) changing the characterization of said local wires causing said local wires to appear as physical wires; and (j) repeating steps (a) through (h) until said area is greater than said first predetermined value.
Claim 13
Dependent Claim
28 words
A method of circuit layout of claim 9 further comprising the step: (h1) distinguishing said local wires from said physical wires; wherein step (h1) follows said step (h).
Claim 14
Independent Claim
134 words
A method of circuit layout comprising the steps of: (a) determining a surface area of a layer of metallization used in said circuit; (b) comparing said area determined with a first predetermined value; if said area is less than said first predetermined value, said computer proceeding with the following series of steps; (c) initializing a mesh pattern of local wires with physical wires; (d) removing an overlap between said local and said physical wires; (e) removing portions of said local wires which are within a first predetermined distance from said physical wires; (f) removing segments of said local wires of a length less than a second predetermined value; (g) creating a boundary of a second predetermined distance surrounding said physical wires; and (h) removing segments of said local wires which are outside said boundary.
Claim 15
Independent Claim
134 words
A method of circuit layout comprising the steps of: (a) determining a surface area of a layer of metallization used in said circuit; (b) comparing said area determined with a first predetermined value; if said area is less than said first predetermined value, said computer proceeding with the following series of steps; (c) initializing a mesh pattern of local wires with physical wires; (d) removing an overlap between said local and said physical wires; (e) removing portions of said local wires which are within a first predetermined distance from said physical wires; (f) removing segments of said local wires of a length less than a second predetermined value; (g) creating a boundary of a second predetermined distance surrounding said physical wires; and (h) removing segments of said local wires which are outside said boundary.
Claim 16
Dependent Claim
46 words
A method of circuit layout of claim 11 further comprising the steps: (i) changing the characterization of said local wires causing said local wires to appear as physical wires; and (j) repeating steps (a) through (h) until said area is greater than said first predetermined value.
Claim 17
Dependent Claim
28 words
A method of circuit layout of claim 12 further comprising the step: (h1) distinguishing said local wires from said physical wires; wherein step (h1) follows said step (h).
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-01-02 | 1998-07-04 | 1999-01-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-01-02 | 2002-07-04 | 2003-01-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-01-02 | 2006-07-04 | 2007-01-03 | $7700.00 | Window Closed / Lapsed |