Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
164 words
A semiconductor device having a semiconductor body provided with a vertical field-effect transistor, which body comprises: a first semiconductor region and a second semiconductor region of a first conductivity type to provide source and drain regions; a third semiconductor region of a second conductivity type different from said first conductivity type having an intermediate portion to provide a channel portion and a surface portion; said first semiconductor region disposed on said intermediate portion; said third semiconductor region disposed on said second semiconductor region; a gate electrode separated from said intermediate portion by an insulating material, wherein said source and drain regions and said channel portion are arranged only vertically along a side surface of said gate electrode; and a buried electrode electrically connected with said second semiconductor region and said third semiconductor region via a through hole penetrating said third semiconductor region, wherein said second region and said third region are thereby short circuited; and wherein said buried electrode is formed in said body.
Claim 2
Dependent Claim
164 words
A semiconductor device having a semiconductor body provided with a vertical field-effect transistor, which body comprises: a first semiconductor region and a second semiconductor region of a first conductivity type to provide source and drain regions; a third semiconductor region of a second conductivity type different from said first conductivity type having an intermediate portion to provide a channel portion and a surface portion; said first semiconductor region disposed on said intermediate portion; said third semiconductor region disposed on said second semiconductor region; a gate electrode separated from said intermediate portion by an insulating material, wherein said source and drain regions and said channel portion are arranged only vertically along a side surface of said gate electrode; and a buried electrode electrically connected with said second semiconductor region and said third semiconductor region via a through hole penetrating said third semiconductor region, wherein said second region and said third region are thereby short circuited; and wherein said buried electrode is formed in said body.
Claim 3
Dependent Claim
12 words
A semiconductor device according to claim 1, constituting a NOT circuit element.
Claim 4
Dependent Claim
12 words
A semiconductor device according to claim 1, constituting a NOR circuit element.
Claim 5
Dependent Claim
12 words
A semiconductor device according to claim 1, constituting a NAND circuit element.
Claim 6
Dependent Claim
15 words
A semiconductor device according to claim 1, wherein said second semiconductor region is a drain.
Claim 7
Dependent Claim
29 words
A semiconductor device according to claim 1, wherein said second semiconductor region is buried within said semiconductor body, and is provided on a substrate of the second conductivity type.
Claim 8
Dependent Claim
16 words
A semiconductor device according to claim 6, wherein said buried electrode is contacted with said substrate.
Claim 9
Dependent Claim
31 words
A semiconductor device according to claim 1, wherein said second semiconductor region is buried within said semiconductor body, and is provided on a fourth semiconductor region of the second conductivity type.
Claim 10
Dependent Claim
22 words
A semiconductor device according to claim 8, wherein said fourth semiconductor region is provided on a substrate of the first conductivity type.
Claim 11
Dependent Claim
15 words
A semiconductor device according to claim 1, wherein said buried electrode is made of aluminum.
Claim 12
Dependent Claim
248 words
A semiconductor device having a semiconductor body provided with a vertical complementary MOS inverter, said body comprises: a first semiconductor region and a second semiconductor region of an N conductivity type to provide source and drain regions; a third semiconductor region of a P conductivity type having an intermediate portion to provide a channel portion and a surface portion; said first semiconductor region disposed on said intermediate portion; said third semiconductor region disposed on said second semiconductor region; a fourth semiconductor region and a fifth semiconductor region of a P conductivity type to provide source and drain regions; a sixth semiconductor region of an N conductivity type having an intermediate portion to provide a channel portion and a surface portion; said fourth semiconductor region disposed on said intermediate portion; said sixth semiconductor region disposed on said fifth semiconductor region; a common gate electrode separated from said intermediate portions of said third semiconductor region and said sixth semiconductor region by a gate insulator to provide an input-terminal, wherein each of said source and drain regions and said channel portions are arranged only vertically along opposite sides of said common gate electrodes; a first buried electrode electrically connected with said second semiconductor region and said third semiconductor region which are thereby short circuited; and a second buried electrode electrically connected with said fifth semiconductor region and said sixth semiconductor region which are thereby short circuited; wherein said first buried electrode and said second buried electrode are formed in said body.
Claim 13
Dependent Claim
248 words
A semiconductor device having a semiconductor body provided with a vertical complementary MOS inverter, said body comprises: a first semiconductor region and a second semiconductor region of an N conductivity type to provide source and drain regions; a third semiconductor region of a P conductivity type having an intermediate portion to provide a channel portion and a surface portion; said first semiconductor region disposed on said intermediate portion; said third semiconductor region disposed on said second semiconductor region; a fourth semiconductor region and a fifth semiconductor region of a P conductivity type to provide source and drain regions; a sixth semiconductor region of an N conductivity type having an intermediate portion to provide a channel portion and a surface portion; said fourth semiconductor region disposed on said intermediate portion; said sixth semiconductor region disposed on said fifth semiconductor region; a common gate electrode separated from said intermediate portions of said third semiconductor region and said sixth semiconductor region by a gate insulator to provide an input-terminal, wherein each of said source and drain regions and said channel portions are arranged only vertically along opposite sides of said common gate electrodes; a first buried electrode electrically connected with said second semiconductor region and said third semiconductor region which are thereby short circuited; and a second buried electrode electrically connected with said fifth semiconductor region and said sixth semiconductor region which are thereby short circuited; wherein said first buried electrode and said second buried electrode are formed in said body.
Claim 14
Dependent Claim
185 words
A semiconductor device having a semiconductor body provided with at least two vertical field-effect transistors said body comprising: at least two first semiconductor regions and a second semiconductor region of a first conductivity type to provide source and drain regions; a third semiconductor region of a second conductivity type different from said first conductivity type having an intermediate portion to provide at least two channel portions and a surface portion; said first semiconductor regions disposed on said intermediate portion; said third semiconductor region disposed on said second semiconductor region; at least two gate electrodes separated from said intermediate portions by an insulating material, wherein each of said source and drain regions and channel portions are arranged only vertically along a side surface of each said at least two gate electrodes; and a buried electrode electrically connected with one of said first semiconductor regions and said third semiconductor region via a through hole penetrating the one of said first semiconductor regions, wherein the one of said first region and said third region are thereby short circuited, and wherein said buried electrode is formed in said body.
Claim 15
Dependent Claim
185 words
A semiconductor device having a semiconductor body provided with at least two vertical field-effect transistors said body comprising: at least two first semiconductor regions and a second semiconductor region of a first conductivity type to provide source and drain regions; a third semiconductor region of a second conductivity type different from said first conductivity type having an intermediate portion to provide at least two channel portions and a surface portion; said first semiconductor regions disposed on said intermediate portion; said third semiconductor region disposed on said second semiconductor region; at least two gate electrodes separated from said intermediate portions by an insulating material, wherein each of said source and drain regions and channel portions are arranged only vertically along a side surface of each said at least two gate electrodes; and a buried electrode electrically connected with one of said first semiconductor regions and said third semiconductor region via a through hole penetrating the one of said first semiconductor regions, wherein the one of said first region and said third region are thereby short circuited, and wherein said buried electrode is formed in said body.