US5376231A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Substrate for recording head, recording head and method for producing same
Assignee: Canon Inc
•
Filing: 1992-04-20
•
Granted: 1994-12-27
•
Expires: 2012-04-20
Abstract
Abstract A method for producing a substrate for a recording head wherein a plurality of electro-thermal converting elements, a plurality of driving functional elements for respectively driving the electro-thermal converting elements and a plurality of wiring electrodes for respectively connecting each of the driving functional elements and each of the electro-thermal converting elements are formed on a supporting member by photolithography comprises forming the wiring electrodes by etching a material layer for the wiring electrodes while etchingwise removing a photoresist for masking the material layer for the wiring electrodes.
Inventors
- 👤 Shigeyuki Matsumoto
- 👤 Yasuhiro Naruse
- 👤 Genzo Monma
- 👤 Kei Fujita
- 👤 Seiji Kamei
- 👤 Yutaka Akino
- 👤 Yasuhiro Sekine
- 👤 Yukihiro Hayakawa
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 09:11
CPC Classifications
B; B41; B41J; B41J2/00; B41J2/005; B41J2/01; B41J2/135; B41J2/16; B41J2/1621; B41J2/1626; B41J2/1629; B41J2/14; B41J2/14016; B41J2/14088; B41J2/14112; B41J2/14129; B41J2/1601; B41J2/1604; B41J2/1628; B41J2/1631; B41J2/164; B41J2/1642; H; H10; H10P; H10P50/00; H10P50/60; H10P50/66; H10P50/663; H10P50/667; H10P95/00; B41J2202/00; B41J2202/01; B41J2202/03; B41J2202/13
Claims Analysis
Total Claims: 61
Claim 1
Independent Claim
92 words
A method for producing a substrate for a recording head having a plurality of electro-thermal converting elements, a plurality of driving functional elements for respectively driving said electro-thermal converting elements, and a plurality of wiring electrodes for respectively connecting each of said driving functional elements and each of said electro-thermal converting elements, which are formed on a supporting member by photolithography, comprising the step of: forming said wiring electrodes by etching a material layer for said wiring electrodes while etchingwise removing a photoresist for masking said material layer for said wiring electrodes.
Claim 2
Independent Claim
92 words
A method for producing a substrate for a recording head having a plurality of electro-thermal converting elements, a plurality of driving functional elements for respectively driving said electro-thermal converting elements, and a plurality of wiring electrodes for respectively connecting each of said driving functional elements and each of said electro-thermal converting elements, which are formed on a supporting member by photolithography, comprising the step of: forming said wiring electrodes by etching a material layer for said wiring electrodes while etchingwise removing a photoresist for masking said material layer for said wiring electrodes.
Claim 3
Dependent Claim
52 words
A method according to claim 1, wherein said wiring electrodes are formed by etching said material layer for said wiring electrodes while etchingwise removing said photoresist for masking said material layer for said wiring electrodes by spraying alternatively an etching liquid for said wiring electrodes and an alkaline solution comprising tetramethylammonium hydroxide.
Claim 4
Dependent Claim
50 words
A method according to claim 1, wherein said wiring electrodes are formed by etching said material layer for said electrode wiring while etchingwise removing said photoresist for masking said material layer for said wiring electrodes by spraying alternatively two kinds of alkaline solutions comprising tetramethylammonium hydroxide kept at different temperatures.
Claim 5
Dependent Claim
18 words
A method according to claim 1, wherein said material layer for said wiring electrodes is an aluminum layer.
Claim 6
Dependent Claim
18 words
A method according to claim 2, wherein a concentration of tetramethylammonium hydroxide in said alkaline solution is 1.5-3.0%.
Claim 7
Dependent Claim
18 words
A method according to claim 3, wherein a concentration of tetramethylammonium hydroxide in said alkaline solutions is 1.5-3.0%.
Claim 8
Dependent Claim
27 words
A method according to claim 2, further comprising a step of developing said photoresist for masking using an alkaline solution comprising tetramethylammonium hydroxide kept at 30°-55° C.
Claim 9
Dependent Claim
27 words
A method according to claim 3, further comprising a step of developing said photoresist for masking using an alkaline solution comprising tetramethylammonium hydroxide kept at 35°-55° C.
Claim 10
Independent Claim
138 words
A method for producing a recording head including a substrate forming step of forming a substrate for said recording head by forming on a supporting member by photolithography a plurality of electro-thermal converting elements, a plurality of driving functional elements for respectively driving said electro-thermal converting elements and a plurality of wiring electrodes for respectively connecting each of said electro-thermal converting elements and each of said driving functional elements and an ink discharging portion forming step of forming an ink discharging portion having a plurality of ink discharging openings for discharging an ink on said substrate for said recording head, comprising the step of: forming said wiring electrodes by etching a material layer for said wiring electrodes while etchingwise removing a photoresist for masking said material layer for said wiring electrodes in the step of forming said substrate.
Claim 11
Independent Claim
138 words
A method for producing a recording head including a substrate forming step of forming a substrate for said recording head by forming on a supporting member by photolithography a plurality of electro-thermal converting elements, a plurality of driving functional elements for respectively driving said electro-thermal converting elements and a plurality of wiring electrodes for respectively connecting each of said electro-thermal converting elements and each of said driving functional elements and an ink discharging portion forming step of forming an ink discharging portion having a plurality of ink discharging openings for discharging an ink on said substrate for said recording head, comprising the step of: forming said wiring electrodes by etching a material layer for said wiring electrodes while etchingwise removing a photoresist for masking said material layer for said wiring electrodes in the step of forming said substrate.
Claim 12
Dependent Claim
54 words
A method according to claim 9, wherein in the wiring electrode etching step, said wiring electrodes are formed by etching said material layer while etchingwise removing said photoresist for masking said material layer for said wiring electrodes by spraying alternatively an etching liquid for said wiring electrodes and an alkaline solution comprising tetramethylammonium hydroxide.
Claim 13
Dependent Claim
52 words
A method according to claim 9, wherein in the wiring electrode etching step, said wiring electrodes are formed by etching said material layer while etchingwise removing said photoresist for masking said material layer for said wiring electrodes by spraying alternatively two kinds of alkaline solutions comprising tetramethylammonium hydroxide kept at different temperatures.
Claim 14
Dependent Claim
18 words
A method according to claim 9, wherein said material layer for said wiring electrodes is an aluminum layer.
Claim 15
Dependent Claim
18 words
A method according to claim 10, wherein a concentration of tetramethylammonium hydroxide in said alkaline solution is 1.5-3.0%.
Claim 16
Dependent Claim
18 words
A method according to claim 11, wherein a concentration of tetramethylammonium hydroxide in said alkaline solution is 1.5-3.0%.
Claim 17
Dependent Claim
27 words
A method according to claim 10, further comprising a step of developing said photoresist for masking using an alkaline solution comprising tetramethylammonium hydroxide kept at 30°-55° C.
Claim 18
Dependent Claim
27 words
A method according to claim 11, further comprising a step of developing said photoresist for masking using an alkaline solution comprising tetramethylammonium hydroxide kept at 30°-50° C.
Claim 19
Independent Claim
93 words
A method for producing a substrate for an ink jet recording head having a group of electro-thermal converting elements, a group of functional elements for respectively driving each of said group of electro-thermal converting elements, and a group of wiring electrodes for connecting each of said group of functional elements and said electro-thermal converting elements, which are formed on a supporting member by photolithography, comprising the step of: forming stepwise the connecting face of each electrode of said group of wiring electrodes by etching plural times while etchingwise removing a photoresist for masking.
Claim 20
Independent Claim
93 words
A method for producing a substrate for an ink jet recording head having a group of electro-thermal converting elements, a group of functional elements for respectively driving each of said group of electro-thermal converting elements, and a group of wiring electrodes for connecting each of said group of functional elements and said electro-thermal converting elements, which are formed on a supporting member by photolithography, comprising the step of: forming stepwise the connecting face of each electrode of said group of wiring electrodes by etching plural times while etchingwise removing a photoresist for masking.
Claim 21
Dependent Claim
42 words
A method according to claim 17, wherein in the wiring electrode group etching step, the side face of each electrode of said group of wiring electrodes together with the connecting face of said electrode is etched plural times to be shaped stepwise.
Claim 22
Dependent Claim
51 words
A method according to claim 17, wherein in the wiring electrode group etching step, the etching is effected by immersing a material layer for said wiring electrodes alternatively in an etching liquid for said wiring electrodes and in an aqueous solution comprising tetramethyl ammonium hydroxide for etching said photoresist for masking.
Claim 23
Dependent Claim
14 words
A method according to claim 17, wherein said material for wiring electrodes is aluminum.
Claim 24
Independent Claim
129 words
A method for producing an ink jet recording head including a substrate forming step of forming by photolithography a substrate by forming a group of electro-thermal converting elements, a group of functional elements for respectively driving each of said group of electro-thermal converting elements, and a group of wiring electrodes for connecting each of said group of functional elements and said electro-thermal converting elements on a supporting member and an ink discharge portion forming step of forming an ink discharging portion having a plurality of ink discharging openings for discharging an ink on said substrate comprising a step of: forming stepwise the connecting face of each electrode of said group of wiring electrodes by etching plural times while etchingwise removing a photoresist for masking in the substrate forming step.
Claim 25
Independent Claim
129 words
A method for producing an ink jet recording head including a substrate forming step of forming by photolithography a substrate by forming a group of electro-thermal converting elements, a group of functional elements for respectively driving each of said group of electro-thermal converting elements, and a group of wiring electrodes for connecting each of said group of functional elements and said electro-thermal converting elements on a supporting member and an ink discharge portion forming step of forming an ink discharging portion having a plurality of ink discharging openings for discharging an ink on said substrate comprising a step of: forming stepwise the connecting face of each electrode of said group of wiring electrodes by etching plural times while etchingwise removing a photoresist for masking in the substrate forming step.
Claim 26
Dependent Claim
42 words
A method according to claim 21, wherein in the wiring electrode group etching step, the side face of each electrode of said group of wiring electrodes together with the connecting face of said electrode is etched plural times to be shaped stepwise.
Claim 27
Dependent Claim
51 words
A method according to claim 12, wherein in the wiring electrode group etching step, the etching is effected by immersing a material layer for said wiring electrodes alternatively in an etching liquid for said wiring electrodes and in an aqueous solution comprising tetramethyl ammonium hydroxide for etching said photoresist for masking.
Claim 28
Dependent Claim
14 words
A method according to claim 21, wherein said material for wiring electrodes is aluminum.
Claim 29
Independent Claim
105 words
A method for producing a substrate for a recording head having a plurality of electro-thermal converting elements, driving functional elements for respectively driving said electro-thermal converting elements, a plurality of wiring electrodes for respectively connecting each of said driving functional elements and each of said electro-thermal converting elements and an electrical isolation film formed on said wiring elements, which are formed on a supporting member by photolithography, comprising the step of: forming said electrical isolation film by depositing a material for said electrical isolation film on said wiring electrodes while changing a temperature of the supporting member from a low temperature to a high temperature.
Claim 30
Independent Claim
105 words
A method for producing a substrate for a recording head having a plurality of electro-thermal converting elements, driving functional elements for respectively driving said electro-thermal converting elements, a plurality of wiring electrodes for respectively connecting each of said driving functional elements and each of said electro-thermal converting elements and an electrical isolation film formed on said wiring elements, which are formed on a supporting member by photolithography, comprising the step of: forming said electrical isolation film by depositing a material for said electrical isolation film on said wiring electrodes while changing a temperature of the supporting member from a low temperature to a high temperature.
Claim 31
Dependent Claim
37 words
A method according to claim 25, wherein the material for said electrical isolation film is deposited on said wiring electrodes while changing stepwise the temperature of the supporting member from a low temperature to a high temperature.
Claim 32
Dependent Claim
37 words
A method according to claim 25, wherein the material for said electrical isolation film is deposited on said wiring electrodes while changing the temperature of the supporting member continuously from a low temperature to a high temperature.
Claim 33
Dependent Claim
44 words
A method according to claim 25, wherein the material for said electrical isolation film is deposited on said wiring electrodes at a supporting member temperature of 150°-250° C. and then further deposited thereon at a supporting member temperature of 250°-450° C. of support temperature.
Claim 34
Dependent Claim
20 words
A method according to claim 25, wherein the deposition of the electrical isolation film is deposited by a CVD method.
Claim 35
Dependent Claim
15 words
A method according to claim 29, wherein the CVD method is a plasma CVD method.
Claim 36
Dependent Claim
13 words
A method according to claim 25, wherein said electrical isolation film is SiO.
Claim 37
Dependent Claim
13 words
A method according to claim 25, wherein said electrical isolation film is SiN.
Claim 38
Dependent Claim
15 words
A method according to claim 25, wherein said electrical isolation film is SiO 2 .
Claim 39
Dependent Claim
13 words
A method according to claim 25, wherein said electrical isolation film is SiON.
Claim 40
Independent Claim
58 words
A method for producing a substrate for a recording head comprising a plurality of electro-thermal converting elements and driving functional elements for driving each said electro-thermal converting elements, the method comprising the steps of: forming a P-type semiconductor layer by epitaxial growth on a P-type semiconductor supporting member: and forming said driving functional elements utilizing said P-type semiconductor.
Claim 41
Independent Claim
58 words
A method for producing a substrate for a recording head comprising a plurality of electro-thermal converting elements and driving functional elements for driving each said electro-thermal converting elements, the method comprising the steps of: forming a P-type semiconductor layer by epitaxial growth on a P-type semiconductor supporting member: and forming said driving functional elements utilizing said P-type semiconductor.
Claim 42
Independent Claim
141 words
A method for producing recording head including a substrate forming step of forming a substrate for said recording head by forming a plurality of electro-thermal converting elements, driving functional elements for driving said each electro-thermal converting element, a plurality of wiring electrodes for connecting said each driving functional element and said electro-thermal converting element and an electrical isolation film provided on said wiring electrodes on a supporting member and an ink discharge portion forming step of forming an ink discharging portion having a plurality of ink discharging openings for discharging an ink on said substrate for said recording head, comprising the step of: forming said electrical isolation film by depositing a material for said electrical isolation on said wiring electrodes while changing a temperature of the supporting member from a low temperature to a high temperature in the substrate forming step.
Claim 43
Independent Claim
141 words
A method for producing recording head including a substrate forming step of forming a substrate for said recording head by forming a plurality of electro-thermal converting elements, driving functional elements for driving said each electro-thermal converting element, a plurality of wiring electrodes for connecting said each driving functional element and said electro-thermal converting element and an electrical isolation film provided on said wiring electrodes on a supporting member and an ink discharge portion forming step of forming an ink discharging portion having a plurality of ink discharging openings for discharging an ink on said substrate for said recording head, comprising the step of: forming said electrical isolation film by depositing a material for said electrical isolation on said wiring electrodes while changing a temperature of the supporting member from a low temperature to a high temperature in the substrate forming step.
Claim 44
Dependent Claim
48 words
A method for producing utilizing a photolithography a support for a recording head according to claim 36, wherein the material for said electrical isolation film is deposited on said wiring electrodes while changing stepwise the temperature of the supporting member from a low temperature to a high temperature.
Claim 45
Dependent Claim
37 words
A method according to claim 36, wherein the material for said electrical isolation film is deposited on said wiring electrodes while changing the temperature of the supporting member continuously from a low temperature to a high temperature.
Claim 46
Dependent Claim
44 words
A method according to claim 36, wherein the material for said electrical isolation film is deposited on said wiring electrodes at a supporting member temperature of 150°-250° C. and then further deposited thereon at a supporting member temperature of 250°-450° C. of support temperature.
Claim 47
Dependent Claim
20 words
A method according to claim 36, wherein the deposition of the electrical isolation film is deposited by a CVD method.
Claim 48
Dependent Claim
15 words
A method according to claim 40, wherein the CVD method is a plasma CVD method.
Claim 49
Dependent Claim
13 words
A method according to claim 36, wherein said electrical isolation film is SiO.
Claim 50
Dependent Claim
13 words
A method according to claim 36, wherein said electrical isolation film is SiN.
Claim 51
Dependent Claim
15 words
A method according to claim 36, wherein said electrical isolation film is SiO 2 .
Claim 52
Dependent Claim
13 words
A method according to claim 36, wherein said electrical isolation film is SiON.
Claim 53
Dependent Claim
44 words
A substrate for a recording head produced according to the method of claim 1, wherein the edge faces of said wiring electrodes have an angle of from 30 degree to 75 degree to the normal line of the surface of said electro-thermal converting element.
Claim 54
Dependent Claim
41 words
A recording head produced according to the method of claim 9, wherein, the edge faces of said wiring electrodes have an angle of from 30 degree to 75 degree to the normal line of the surface of said electro-thermal converting element.
Claim 55
Dependent Claim
34 words
A recording apparatus comprising the recording head of claim 47 and means for transferring a recording medium to be recorded by the ink discharged from said head while being opposed to said recording head.
Claim 56
Dependent Claim
28 words
A substrate for a recording head produced by the method according to claim 17, wherein the edge faces of said wiring electrodes are in the form of steps.
Claim 57
Dependent Claim
28 words
A substrate for a recording head produced by the method according to claim 21, wherein the edge faces of said wiring electrodes are in the form of steps.
Claim 58
Dependent Claim
34 words
A recording apparatus comprising the recording head of claim 50 and means for transferring a recording medium to be recorded by the ink discharged from said head while being opposed to said recording head.
Claim 59
Dependent Claim
14 words
A substrate for a recording head produced by the method according to claim 25.
Claim 60
Dependent Claim
11 words
A recording head produced by the method according to claim 36.
Claim 61
Dependent Claim
34 words
A recording apparatus comprising the recording head of claim 53 and means for transferring a recording medium to be recorded by the ink discharged from said head, while being opposed to said recording head.
References Cited (Backward Citations)
US4723129A
Cited
US4740796A
Cited
JPS5456847A
Cited
US4459600A
Cited
US4345262A
Cited
US4463359A
Cited
US4313124A
Cited
JPS5772867A
Cited
US4429321A
Cited
US4558333A
Cited
JPS59123670A
Cited
JPS59138461A
Cited
WO1985000928A1
Cited
JPS6071260A
Cited
EP0159621A2
Cited
US4968992A
Cited
EP0268021A2
Cited
US5007984A
Cited
EP0378439A2
Cited
US4957592A
Cited
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