US4968992A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method for manufacturing a liquid jet recording head having a protective layer formed by etching
Assignee: Canon Inc
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Filing: 1989-07-18
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Granted: 1990-11-06
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Expires: 2009-07-18
Abstract
Abstract A method of manufacturing a substrate for a liquid jet recording head comprises forming an upper layer with a bulging portion on a thermal energy generating member on a support, and etching the upper layer to remove the bulging portion and form a protective layer on the support and energy generating member. An ink jet recording head is formed by connecting the support and a grooved member.
Inventors
- 👤 Hirokazu Komuro
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 13:07
CPC Classifications
B; B41; B41J; B41J2/00; B41J2/005; B41J2/01; B41J2/135; B41J2/14; B41J2/14016; B41J2/14088; B41J2/14112; B41J2/14129; B41J2/16; B41J2/1601; B41J2/1603; B41J2/1604; B41J2/1621; B41J2/1626; B41J2/1628; B41J2/1629; B41J2/1631; B41J2/164; B41J2/1642; B41J2/1646
Claims Analysis
Total Claims: 21
Claim 1
Independent Claim
132 words
A method for manufacturing a liquid jet recording head having a liquid path in communication with a discharge port for discharging liquid and comprising a support member, with thermal energy generating means on said support member for generating thermal energy to discharge the liquid, and a grooved member in which grooves are provided to form the liquid path walls, the method comprising the steps of: providing said support member having said thermal energy generating means thereon; forming an upper layer on said thermal energy generating means, said upper layer having a bulging portion at said thermal energy generating means; forming a protective layer by etching said upper layer to remove said bulging portion; and connecting said support member and said grooved member with said energy generating means being positioned inside said grooves.
Claim 2
Independent Claim
132 words
A method for manufacturing a liquid jet recording head having a liquid path in communication with a discharge port for discharging liquid and comprising a support member, with thermal energy generating means on said support member for generating thermal energy to discharge the liquid, and a grooved member in which grooves are provided to form the liquid path walls, the method comprising the steps of: providing said support member having said thermal energy generating means thereon; forming an upper layer on said thermal energy generating means, said upper layer having a bulging portion at said thermal energy generating means; forming a protective layer by etching said upper layer to remove said bulging portion; and connecting said support member and said grooved member with said energy generating means being positioned inside said grooves.
Claim 3
Independent Claim
86 words
A method for manufacturing a substrate for a liquid jet recording head having a support member, with thermal energy generating means on said support member for generating thermal energy to discharge liquid, the method comprising the steps of: providing said support member having said thermal generating means thereon; forming an upper layer on said thermal energy generating means, said upper layer having a bulging portion at said thermal energy generating means; and forming a protective layer by etching said upper layer to remove said bulging portion.
Claim 4
Independent Claim
86 words
A method for manufacturing a substrate for a liquid jet recording head having a support member, with thermal energy generating means on said support member for generating thermal energy to discharge liquid, the method comprising the steps of: providing said support member having said thermal generating means thereon; forming an upper layer on said thermal energy generating means, said upper layer having a bulging portion at said thermal energy generating means; and forming a protective layer by etching said upper layer to remove said bulging portion.
Claim 5
Dependent Claim
30 words
A method according to claim 1 or 2, wherein said thermal energy generating means is formed on said support member by forming thereon a heat resistive layer and an electrode.
Claim 6
Dependent Claim
21 words
A method according to claim 1 or 2, wherein said protective layer forming step is performed by a dry etching method.
Claim 7
Dependent Claim
22 words
A method according to claim 2, wherein the thickness of said upper layer is about two times of that of said electrode.
Claim 8
Dependent Claim
24 words
A method according to claim 1 or 2, further comprising the step of forming a heat accumulation layer under said thermal energy generating means.
Claim 9
Dependent Claim
22 words
A method according to claim 4, further comprising the step of forming a heat accumulation layer under said thermal energy generating means.
Claim 10
Dependent Claim
21 words
A method according to claim 5, further the step of forming a heat accumulation layer under said thermal energy generating means.
Claim 11
Dependent Claim
16 words
A method according to claim 4, wherein said dry etching method is a sputter etching method.
Claim 12
Dependent Claim
17 words
A method according to claim 4, wherein said dry etching method is a reactive ion etching method.
Claim 13
Dependent Claim
21 words
A method according to claim 1 or 2, wherein said protective layer forming step is performed by a wet etching method.
Claim 14
Dependent Claim
20 words
A method according to claim 1 or 2, wherein said upper layer is made of Si 3 N 4 .
Claim 15
Dependent Claim
18 words
A method according to claim 1 or 2, wherein said upper layer is made of SiO 2 .
Claim 16
Dependent Claim
16 words
A method according to claim 1 or 2, wherein said upper layer is made of SiON.
Claim 17
Dependent Claim
20 words
A method according to claim 1 or 2, wherein said upper layer is made of Ta 2 O 5 .
Claim 18
Dependent Claim
22 words
A method according to claim 2, wherein the thickness of said protective layer is about 1.5 times of that of said electrode.
Claim 19
Dependent Claim
23 words
A method according to claim 1 or 2, wherein said upper layer forming step and said protective layer forming step are repeatedly performed.
Claim 20
Dependent Claim
17 words
A method according to claim 1, wherein said grooved member comprises a cover plate having grooves therein.
Claim 21
Dependent Claim
19 words
A method according to claim 1, wherein said grooved member comprises a photosensitive resin having a grooved pattern therethrough.
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| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 1993-11-05 | 1994-05-07 | 1994-11-06 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-11-05 | 1998-05-07 | 1998-11-06 | $3760.00 | Window Closed / Lapsed |
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