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US5369274A
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Method and an apparatus for the examination of structures on membrane surfaces
Assignee: Fraunhofer-Gesellschaft zur Förderung der Angewandten Forschung eV
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Filing: 1989-06-16
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Granted: 1994-11-29
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Expires: 2009-06-16
Abstract
Abstract A commercially available Auger apparatus is developed in such a manner thatt is suitable for carrying out a high-resolution x-ray photoelectron spectroscopy. As a result, the stress to the material is low while the resolution capacity is high. The primary electron beam of an Auger probe impinges on the rear surface of the membrane and induces an x-ray radiation. This x-ray radiations triggers photoelectrons from the membrane surface which are used for the analysis of the uppermost atom layers of the surface. By means of a sample holder, which is designed as a Faraday cage, the electrons are kept back which are emitted from the rear surface of the membrane. The method is suitable for examining very fine structures in the μ- and sub-μ-range.
Inventors
- 👤 Wilhelm Brunger
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 14:16
CPC Classifications
G; G01; G01N; G01N23/00; G01N23/22; G01N23/227; G01N23/2273; H; H01; H01J; H01J37/00; H01J37/252
Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
129 words
A method for the examination of membrane surfaces using photoelectron spectroscopy wherein a primary electron beam is beamed into a local area of a membrane to be examined from which x-rays are released which in turn trigger photoelectrons which are analyzed by a spectrometer, the method comprising the steps of: impinging said primary electron beam on a rear surface of the membrane at a presettable first angle; emitting photoelectrons from a front surface of the membrane as a result of said impinging of said primary electron beam; observing the photoelectrons emitted from said front surface at a presettable second angle; emitting secondary electrons from said rear surface of the membrane; and keeping back said secondary electrons emitted from said rear surface so as not to impinge on the spectrometer.
Claim 2
Independent Claim
129 words
A method for the examination of membrane surfaces using photoelectron spectroscopy wherein a primary electron beam is beamed into a local area of a membrane to be examined from which x-rays are released which in turn trigger photoelectrons which are analyzed by a spectrometer, the method comprising the steps of: impinging said primary electron beam on a rear surface of the membrane at a presettable first angle; emitting photoelectrons from a front surface of the membrane as a result of said impinging of said primary electron beam; observing the photoelectrons emitted from said front surface at a presettable second angle; emitting secondary electrons from said rear surface of the membrane; and keeping back said secondary electrons emitted from said rear surface so as not to impinge on the spectrometer.
Claim 3
Dependent Claim
39 words
A method according to claim 1, further comprising the step of reducing an electron energy of said primary electron beam so far that no electrons of said primary electron beam are emitted from said front surface of the membrane.
Claim 4
Independent Claim
147 words
A method for the examination of membrane surfaces using photoelectron spectroscopy wherein a primary electron beam is beamed into a local area of a membrane to be examined from which x-rays are released which in turn trigger photoelectrons which are analyzed by a spectrometer, the method comprising the steps of: impinging said primary electron beam on a rear surface of the membrane at a presettable first angle; emitting photoelectrons from a front surface of the membrane as a result of said impinging of said primary electron beam; observing the photoelectrons emitted from said front surface at a presettable second angle, wherein the first angle of the primary electron beam and the second angle of the photoelectrons approximately coincide; emitting secondary electrons from said rear surface of the membrane; and keeping back said secondary electrons emitted from said rear surface so as not to impinge on the spectrometer.
Claim 5
Independent Claim
147 words
A method for the examination of membrane surfaces using photoelectron spectroscopy wherein a primary electron beam is beamed into a local area of a membrane to be examined from which x-rays are released which in turn trigger photoelectrons which are analyzed by a spectrometer, the method comprising the steps of: impinging said primary electron beam on a rear surface of the membrane at a presettable first angle; emitting photoelectrons from a front surface of the membrane as a result of said impinging of said primary electron beam; observing the photoelectrons emitted from said front surface at a presettable second angle, wherein the first angle of the primary electron beam and the second angle of the photoelectrons approximately coincide; emitting secondary electrons from said rear surface of the membrane; and keeping back said secondary electrons emitted from said rear surface so as not to impinge on the spectrometer.
Claim 6
Dependent Claim
39 words
A method according to claim 3, further comprising the step of reducing an electron energy of said primary electron beam so far that no electrons of said primary electron beam are emitted from said front surface of the membrane.
Claim 7
Independent Claim
71 words
An apparatus for examining a structure on a membrane having a device for measuring Auger electrons, comprising: a sample holder having a duct having a first surface and a second surface, said duct forming an inlet side and an outlet side; an inlet screen equipped with said duct on said inlet side; and wherein said membrane is mounted at said outlet side of said duct with the structure to be examined.
Claim 8
Independent Claim
71 words
An apparatus for examining a structure on a membrane having a device for measuring Auger electrons, comprising: a sample holder having a duct having a first surface and a second surface, said duct forming an inlet side and an outlet side; an inlet screen equipped with said duct on said inlet side; and wherein said membrane is mounted at said outlet side of said duct with the structure to be examined.
Claim 9
Dependent Claim
52 words
An apparatus according to claim 5, wherein said duct has an inlet opening and an outlet opening situated in said first and second surfaces, respectively, said first and second surfaces enclosing an angle α approximately as large as an angle η formed between an impinging primary electron beam and an observing directions.
Claim 10
Dependent Claim
13 words
An apparatus according to claim 6, wherein the angle α amounts to 60°.
Claim 11
Dependent Claim
36 words
An apparatus according to claim 7, wherein said sample holder is rotated around an axis which bisects the angle α between the first and second surfaces in which the first and second duct openings are situated.
Claim 12
Dependent Claim
36 words
An apparatus according to claim 6, wherein said sample holder is rotated around an axis which bisects the angle α between the first and second surfaces in which the first and second duct openings are situated.
Claim 13
Dependent Claim
36 words
An apparatus according to claim 6, wherein said sample holder is rotated around an axis which bisects the angle α between the first and second surfaces in which the first and second duct openings are situated.
Claim 14
Dependent Claim
35 words
An apparatus according to claim 6, wherein said angle η formed between said impinging primary electron beam and said observing directions is optimized by tilting said sample holder so that said spectrometer's intensity becomes maximal.
Claim 15
Dependent Claim
14 words
An apparatus according to claim 5, wherein said sample holder is formed of metal.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-11-28 | 1998-05-30 | 1998-11-29 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-11-28 | 2002-05-30 | 2002-11-29 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-11-28 | 2006-05-30 | 2006-11-29 | $7700.00 | Window Closed / Lapsed |