US3783280A
Expired / Lapsed
US
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Method and apparatus for charged particle spectroscopy
Assignee: Associated Electrical Industries Ltd
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Filing: 1972-03-21
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Granted: 1974-01-01
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Expires: 1992-03-21
Abstract
Abstract In a cylindrical mirror analyzer, charged, particles from a source are deflected in the radial electric field between a pair of coaxial tubular electrodes, and are brought to a focus. A collector aperture positioned at the focus selects particles of predetermined energy, these particles being detected by a suitable detector. The particles cross the axis at some point between the source and the focus. An apertured member located at this point prevents skew electrons (i.e. electrons not travelling in radial planes) from reaching the focus. In this way the performance of the analyzer is improved.
Inventors
- 👤 J Watson
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 20:37
CPC Classifications
H; H01; H01J; H01J49/00; H01J49/44; H01J49/46; H01J49/48; H01J49/482
Claims Analysis
Total Claims: 21
Claim 1
Independent Claim
158 words
A cylindrical mirror analyzer comprising: a pair of at least partially tubular electrodes mounted coaxially with respect to a common axIs and mutually electrically insulated so that when a voltage is applied between said electrodes a radial electrical field is established between said electrodes; source means for injecting charged particles into said radial field whereby particles emanating from said source means are deflected by said field toward said axis and particles of a predetermined energy are directed toward a focal point; a first apertured means having a collector aperture formed therein and positioned at said focal point to permit passage of substantially only said particles of predetermined energy; a detector means for detecting particles which pass through said collector aperture; and, a second apertured means having an aperture formed therein and positioned at a point where said particles of said predetermined energy which are traveling in radial planes with respect to said analyzer axis cross said analyzer axis.
Claim 2
Dependent Claim
158 words
A cylindrical mirror analyzer comprising: a pair of at least partially tubular electrodes mounted coaxially with respect to a common axIs and mutually electrically insulated so that when a voltage is applied between said electrodes a radial electrical field is established between said electrodes; source means for injecting charged particles into said radial field whereby particles emanating from said source means are deflected by said field toward said axis and particles of a predetermined energy are directed toward a focal point; a first apertured means having a collector aperture formed therein and positioned at said focal point to permit passage of substantially only said particles of predetermined energy; a detector means for detecting particles which pass through said collector aperture; and, a second apertured means having an aperture formed therein and positioned at a point where said particles of said predetermined energy which are traveling in radial planes with respect to said analyzer axis cross said analyzer axis.
Claim 3
Dependent Claim
21 words
A cylindrical mirror analyzer according to claim 1 wherein said collector aperture is positioned off-axis with respect to the analyzer axis.
Claim 4
Dependent Claim
25 words
A cylindrical mirror analyzer according to claim 2 wherein said collector aperture substantially coincides in diameter with the diameter of the inner of said electrodes.
Claim 5
Dependent Claim
22 words
A cylindrical mirror analyzer according to claim 2 wherein said collector aperture is annular and disposed symmetrically with respect to said axis.
Claim 6
Dependent Claim
23 words
A cylindrical mirror analyzer according to claim 1 wherein said second apertured means is positioned between said source means and said collector aperture.
Claim 7
Dependent Claim
28 words
A cylindrical mirror analyzer according to claim 5, wherein said second apertured means is disposed at a position reached by said particles after being deflected by said field.
Claim 8
Dependent Claim
42 words
A cylindrical mirror analyzer according to claim 6, wherein, said detector means is positioned along said axis and said particles, after passing through said second apertured means, re-enter the radial field and are deflected again by the field towards said detector means.
Claim 9
Dependent Claim
40 words
A cylindrical mirror analyzer according to claim 1, further including a third apertured means having an aperture formed therein for restricting the angle of divergence from said source means of the paths of those particles which reach said detector means.
Claim 10
Dependent Claim
25 words
A cylindrical mirror analyzer according to claim 8 wherein said aperture in said third apertured means is positioned off-axis with respect to said analyzer axis.
Claim 11
Dependent Claim
29 words
A cylindrical mirror analyzer according to claim 9 wherein said aperture in said third apertured means substantially coincides in diameter with the diameter of the inner of said electrodes.
Claim 12
Dependent Claim
20 words
A cylindrical mirror analyzer according to claim 8 wherein said third apertured means is positioned upstream of said collector aperture.
Claim 13
Dependent Claim
22 words
A cylindrical mirror analyzer, according to claim 1 further including means selectably operable to retard said particles before they enter said field.
Claim 14
Dependent Claim
19 words
A cylindrical mirror analyzer according to claim 12, wherein said means to retard the particles comprises a charged-particle lens.
Claim 15
Dependent Claim
30 words
A cylindrical mirror analyzer according to claim 13, wherein said lens is an electrostatic lens comprising a plurality of metal components having respective apertures through which the particles pass successively.
Claim 16
Dependent Claim
17 words
A cylindrical mirror analyzer according to claim 14, wherein said metal components are generally conical in shape.
Claim 17
Independent Claim
122 words
A method of operating a cylindrical mirror analyzer having a pair of tubular electrodes mounted coaxially with respect to a common axis and mutually electrically insulated, comprising the steps: a. injecting charged particles between said electrodes; b. applying a voltage between said electrodes so as to deflect said particles towards said axis thereby bringing particles of a predetermined energy to a focus; c. selecting said particles of said predetermined energy at said focus; d. positioning a member having an aperture on said axis at a said particles of predetermined energy, travelling in radial planes, cross said axis, so as to prevent at least the majority of particles travelling in skew paths from reaching said focus; and e. detecting the particles so selected.
Claim 18
Independent Claim
122 words
A method of operating a cylindrical mirror analyzer having a pair of tubular electrodes mounted coaxially with respect to a common axis and mutually electrically insulated, comprising the steps: a. injecting charged particles between said electrodes; b. applying a voltage between said electrodes so as to deflect said particles towards said axis thereby bringing particles of a predetermined energy to a focus; c. selecting said particles of said predetermined energy at said focus; d. positioning a member having an aperture on said axis at a said particles of predetermined energy, travelling in radial planes, cross said axis, so as to prevent at least the majority of particles travelling in skew paths from reaching said focus; and e. detecting the particles so selected.
Claim 19
Dependent Claim
28 words
The method of claim 16 wherein said step of selecting particles is carried out by inserting an apertured means having a collector aperture formed therein at said focus.
Claim 20
Dependent Claim
18 words
The method of claim 16, including the further step of retarding said particles before they enter said field.
Claim 21
Dependent Claim
20 words
The method of claim 18, wherein said step of retarding said particles is carried out by operating a charged-particle lens.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1976-12-31 | 1977-07-02 | 1978-01-01 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1980-12-31 | 1981-07-02 | 1982-01-01 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1984-12-31 | 1985-07-02 | 1986-01-01 | $7700.00 | Window Closed / Lapsed |