US4752685A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Electronic spectrometer for identifying element conditions of a sample surface by utilizing an energy spectrum of charged particles
Assignee: Canon Anelva Corp
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Filing: 1986-06-09
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Granted: 1988-06-21
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Expires: 2006-06-09
Abstract
Abstract A photoelectron spectrometer includes a target, an electron gun, a crystal plate, a spectrum-analyzer and a detector. The target and the sample to be inspected are aligned with a reference line. The electron gun is positioned on the coaxially line with respect to the reference axis. The crystal plate is arranged in a circular region with respect to the reference axis, so that X-ray beams emitted from the target are omnidirectionally irradiated to the sample surface in an electron shower form. The sensitivity of the photoelectron spectrometer is increased.
Inventors
- 👤 Yoshiro Shiokawa
- 👤 Kiyoshi Hoshino
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 12:07
CPC Classifications
H; H01; H01J; H01J49/00; H01J49/44; H01J49/46; H01J49/48; H01J49/482; H01J37/00; H01J37/252; H01J49/02; H01J49/08
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
191 words
A photoelectron spectrometer, comprising: a target; an electron gun for irradiating electron beams to the target so as to cause X-ray beams to be emitted from the target; a crystal plate for focusing the X-ray beams emitted from the target and for reflecting the focused X-ray beams to a sample for irradiating therefrom photoelectrons; a single-pass cylindrical mirror type electron analyzer for spectrum-analyzing the photoelectrons emitted from the sample, said analyzer including an inner cylindrical electrode and an outer cylindrical electrode surrounding said inner cylindrical electrode, beam passing holes formed on said inner cylindrical electrode and said outer cylindrical electrode; a detector for detecting the spectrum-analyzed photoelectrons; wherein said electron gun is arranged substantially coaxially with respect to a reference axis connecting said target and said sample; wherein said crystal plate is arranged in a circular region with respect to said reference axis; and wherein said analyzer including said inner and outer cylindrical electrodes are positioned concentrically about said reference axis such that at least one of said X-ray beams and at least some of the photoelectrons would pass through said beam passing holes of said inner and outer cylindrical electrodes.
Claim 2
Dependent Claim
191 words
A photoelectron spectrometer, comprising: a target; an electron gun for irradiating electron beams to the target so as to cause X-ray beams to be emitted from the target; a crystal plate for focusing the X-ray beams emitted from the target and for reflecting the focused X-ray beams to a sample for irradiating therefrom photoelectrons; a single-pass cylindrical mirror type electron analyzer for spectrum-analyzing the photoelectrons emitted from the sample, said analyzer including an inner cylindrical electrode and an outer cylindrical electrode surrounding said inner cylindrical electrode, beam passing holes formed on said inner cylindrical electrode and said outer cylindrical electrode; a detector for detecting the spectrum-analyzed photoelectrons; wherein said electron gun is arranged substantially coaxially with respect to a reference axis connecting said target and said sample; wherein said crystal plate is arranged in a circular region with respect to said reference axis; and wherein said analyzer including said inner and outer cylindrical electrodes are positioned concentrically about said reference axis such that at least one of said X-ray beams and at least some of the photoelectrons would pass through said beam passing holes of said inner and outer cylindrical electrodes.
Claim 3
Dependent Claim
29 words
A photoelectron spectrometer as claimed in claim 1, wherein said electron gun and said target are positioned within said inner cylindrical electrode of said cylindrical mirror type electron analyzer.
Claim 4
Dependent Claim
26 words
A photoelectron spectrometer as claimed in claim 1, wherein said target is movable in a two-dimensional direction perpendicular to a passing direction of said electron beams.
Claim 5
Dependent Claim
41 words
A photoelectron spectrometer as claimed in claim 1, wherein said electron gun comprises an ultra-small focusing type electron gun which deflects the electron beams; and wherein an electron irradiated position of said target is movable along a surface of said target.
Claim 6
Dependent Claim
43 words
A photoelectron spectrometer as claimed in claim 1, wherein said single-pass cylindrical mirror type analyzer comprises a position sensitive type detector; and wherein the energy resolution of said position sensitive type detector is varied in response to the energy scanning of said analyzer.
Claim 7
Dependent Claim
42 words
A photoelectron spectrometer as claimed in claim 1, further comprising: a differential pumping chamber surrounding said electron gun; and means for differential-pumping said differential pumping chamber and for feeding the electron beams out from an aperture formed on said differential pumping chamber.
References Cited (Backward Citations)
US3242335A
Cited
US4562352A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1991-06-21 | 1991-12-21 | 1992-06-21 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1995-06-21 | 1995-12-21 | 1996-06-21 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1999-06-21 | 1999-12-21 | 2000-06-21 | $7700.00 | Window Closed / Lapsed |