Patent US5360524A successfully refreshed from Google Patents.
US5360524A
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Method for planarization of submicron vias and the manufacture of semiconductor integrated circuits
Assignee: Tokyo Electron Ltd
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Filing: 1993-04-13
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Granted: 1994-11-01
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Expires: 2013-04-13
Abstract
Abstract Submicron vias are filled by sputter deposition of a conductor such as aluminum onto a substrate such as silicon or silicon oxides. The deposited aluminum film is deposited at a first lower temperature and then the temperature is increased. The differential coefficient of thermal expansion of the substrate relative to the metal conductor forces the conductor to expand into the via. Maintaining an effective thickness and controlling the temperature increase from the first temperature to the second temperature, effectively and reliably fills submicron vias having aspect ratios up to 4. The present invention is particularly useful with filling vias having re-entrant angles of up to 20 DEG .
Inventors
- 👤 Rudi Hendel
- 👤 Hyman Levinstein
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 00:59
CPC Classifications
H; H10; H10W; H10W20/00; H10W20/01; H10W20/031; H10W20/056; H10W20/059; C; C23; C23C; C23C14/00; C23C14/04; C23C14/046; C23C14/06; C23C14/14; C23C14/18; C23C14/185; C23C14/22; C23C14/34; C23C14/3492; C23C14/54; C23C14/541; H10P; H10P95/00; H10P95/04
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
138 words
A method of filling submicron vias in a substrate comprising: depositing a layer of a metal conductor having a coefficient of thermal expansion on to said substrate at a first temperature wherein said layer covers said vias and leaves a void space in said vias and wherein said substrate has a lower coefficient of thermal expansion than the metal conductor; heating the substrate and the deposited conductor to a second temperature wherein the layer of the deposited metal conductor is effectively thick so that thermal stress created by increasing the temperature from the first temperature to the second temperature and the relative coefficient of thermal expansions of the conductor and the substrate causes the conductor to expand and uniformly fill the void in said submicron vias, wherein said layer of metal conductor is at least about 2,000 Å.
Claim 2
Independent Claim
138 words
A method of filling submicron vias in a substrate comprising: depositing a layer of a metal conductor having a coefficient of thermal expansion on to said substrate at a first temperature wherein said layer covers said vias and leaves a void space in said vias and wherein said substrate has a lower coefficient of thermal expansion than the metal conductor; heating the substrate and the deposited conductor to a second temperature wherein the layer of the deposited metal conductor is effectively thick so that thermal stress created by increasing the temperature from the first temperature to the second temperature and the relative coefficient of thermal expansions of the conductor and the substrate causes the conductor to expand and uniformly fill the void in said submicron vias, wherein said layer of metal conductor is at least about 2,000 Å.
Claim 3
Dependent Claim
20 words
The method claimed in claim 1 wherein said via has a diameter of from about 0.8 to about 0.1 micron.
Claim 4
Dependent Claim
20 words
The method claimed in claim 2 wherein said via has an aspect ratio of from about 1 to about 4.
Claim 5
Dependent Claim
31 words
The method claimed in claim 2 wherein said via has a re-entrant profile of from about 0° to about 20° measured from a line perpendicular to a plane of said substrate.
Claim 6
Dependent Claim
17 words
The method claimed in claim 4 wherein said via has a re-entrant profile of 5° to 10°.
Claim 7
Dependent Claim
23 words
The method claimed in claim 1 wherein said metal conductor is selected from the group consisting of aluminum, Al-Si, Al-Cu, Al-Si-Cu and Al-Ti.
Claim 8
Dependent Claim
32 words
The method claimed in claim 1 wherein said substrate is selected from the group consisting of silicon, boron and phosphorus doped silica, quartz, TEOS, spin-on glass and Si 3 N 4 .
Claim 9
Dependent Claim
27 words
The method claimed in claim 1 wherein a re-entrant profile is established in said vias prior to depositing said metal conductor by sputter depositing a barrier layer.
Claim 10
Dependent Claim
21 words
The method claimed in claim 8 wherein said barrier layer is selected from the group consisting of TiN, ZrN, and RuO.
Claim 11
Dependent Claim
20 words
The method claimed in claim 1 wherein additional metal is sputtered onto said deposited metal as said conductor is heated.
Claim 12
Dependent Claim
24 words
The method claimed in claim 1 wherein said second temperature is maintained for 1 to 10 minutes to provide stress release for said conductor.
Claim 13
Dependent Claim
19 words
The method claimed in claim 1 wherein said second temperature is about 400° C. higher than said first temperature.
Claim 14
Dependent Claim
17 words
The method claimed in claim 1 wherein said layer of metal conductor is 2,000 to 5,000 angstroms.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-10-31 | 1998-05-02 | 1998-11-01 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-10-31 | 2002-05-02 | 2002-11-01 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-10-31 | 2006-05-02 | 2006-11-01 | $7700.00 | Window Closed / Lapsed |