Patent US5357119A successfully refreshed from Google Patents.
US5357119A
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Field effect devices having short period superlattice structures using Si and Ge
Assignee: University of California
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Filing: 1993-02-19
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Granted: 1994-10-18
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Expires: 2013-02-19
Abstract
Abstract Carrier mobility in a heterojunction field effect device is increased by reducing or eliminating alloy scattering. The active channel region of the field effect device uses alternating layers of pure silicon and germanium which form a short period superlattice with the thickness of each layer in the superlattice being no greater than the critical thickness for maintaining a strained heterojunction. The gate contact of the field effect device can comprise quantum Si/Ge wires which provide quantum confinement in the growth plane, thereby allowing the field effect device to further improve the mobility by restricting phonon scattering. The structure can be used to improve device speed performance.
Inventors
- 👤 Kang L. Wang
- 👤 Jin S. Park
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 07:18
CPC Classifications
H; H10; H10D; H10D84/00; H10D84/80; H10D84/82; H10D84/83; H10D84/85; H10D30/00; H10D30/60; H10D30/751; H10D62/00; H10D62/80; H10D62/81; H10D62/815; H10D62/8161; H10D62/8162; H10D62/8164; H10D84/8311
Claims Analysis
Total Claims: 22
Claim 1
Independent Claim
96 words
A field effect device comprising a monocrystalline silicon semiconductor substrate, a first epitaxial layer of silicon grown on said substrate and doped with a first conductivity type dopant, a plurality of layers of semiconductor material epitaxially grown on said first epitaxial layer, said plurality of layers comprising alternate single layers of silicon and of germanium semiconductor materials, thereby forming a plurality of heterojunctions in a superlattice structure, a source and a drain formed in spaced apart regions in said first epitaxial layer with said superlattice structure therebetween, and a gate contact formed over said superlattice structure.
Claim 2
Dependent Claim
96 words
A field effect device comprising a monocrystalline silicon semiconductor substrate, a first epitaxial layer of silicon grown on said substrate and doped with a first conductivity type dopant, a plurality of layers of semiconductor material epitaxially grown on said first epitaxial layer, said plurality of layers comprising alternate single layers of silicon and of germanium semiconductor materials, thereby forming a plurality of heterojunctions in a superlattice structure, a source and a drain formed in spaced apart regions in said first epitaxial layer with said superlattice structure therebetween, and a gate contact formed over said superlattice structure.
Claim 3
Dependent Claim
23 words
The field effect device as defined by claim 1 and further including an insulation layer between said gate contact and said superlattice structure.
Claim 4
Dependent Claim
41 words
The field effect device as defined by claim 2 and further including a buffer layer of silicon over said superlattice structure, said insulation layer comprising silicon oxide formed on said layer of silicon, said superlattice structure functioning as a conduction channel.
Claim 5
Dependent Claim
23 words
The field effect device as defined by claim 3 and further including an undoped spacer layer on which said superlattice structure is formed.
Claim 6
Dependent Claim
49 words
The field effect device as defined by claim 5 wherein numbers of atomic layers for silicon and germanium are n and m and the ratio of n to m+n equals alloy concentration of the buffer layer whereby said superlattice has no average strain with respect to said buffer layer.
Claim 7
Dependent Claim
32 words
The field effect device as defined by claim 5 wherein thickness of each silicon and germanium layer in said superlattice is not greater than a critical thickness for maintaining a strained heterojunction.
Claim 8
Dependent Claim
26 words
The field effect device as defined by claim 5 wherein said first conductivity type is n-type, said source and said drain being doped with p-type dopant.
Claim 9
Dependent Claim
14 words
The field effect device as defined by claim 4 wherein said superlattice is undoped.
Claim 10
Dependent Claim
17 words
The field effect device as defined by claim 7 wherein said gate contact comprises doped polycrystalline silicon.
Claim 11
Dependent Claim
22 words
The field effect device as defined by claim 7 wherein said field effect device is one of two complementary field effect devices.
Claim 12
Dependent Claim
97 words
A field effect device comprising a monocrystalline silicon semiconductor substrate, a first epitaxial layer of silicon-germanium alloy grown on said substrate and doped with a first conductivity type dopant, a plurality of layers of semiconductor material epitaxially grown on said first epitaxial layer said plurality of layers comprising alternate single layers of silicon and of germanium semiconductor materials, thereby forming a plurality of heterojunctions in a superlattice structure, a source and a drain formed in spaced apart regions in said first epitaxial layer with said superlattice structure therebetween, and a gate contact formed over said superlattice structure.
Claim 13
Dependent Claim
97 words
A field effect device comprising a monocrystalline silicon semiconductor substrate, a first epitaxial layer of silicon-germanium alloy grown on said substrate and doped with a first conductivity type dopant, a plurality of layers of semiconductor material epitaxially grown on said first epitaxial layer said plurality of layers comprising alternate single layers of silicon and of germanium semiconductor materials, thereby forming a plurality of heterojunctions in a superlattice structure, a source and a drain formed in spaced apart regions in said first epitaxial layer with said superlattice structure therebetween, and a gate contact formed over said superlattice structure.
Claim 14
Dependent Claim
48 words
The field effect device as defined by claim 11 and further including an undoped setback layer of silicon epitaxially grown on said superlattice, a doped layer of semiconductor material epitaxially grown on said setback layer, and an undoped cap layer of silicon epitaxially grown on said doped layer.
Claim 15
Dependent Claim
29 words
The field effect device as defined by claim 12 wherein thickness of each layer in said superlattice is not greater than a critical thickness for maintaining a strained heterojunction.
Claim 16
Dependent Claim
33 words
The field effect device as defined by claim 13 wherein said first conductivity type dopant is p-type, said source and said drain being doped with n-type dopant, and said superlattice structure is undoped.
Claim 17
Dependent Claim
24 words
The field effect device as defined by claim 13 wherein said first conductivity type is n-type, said source and said drain being doped p-type.
Claim 18
Dependent Claim
18 words
The field effect device as defined by claim 14 wherein said gate contact comprises a Schottky metal contact.
Claim 19
Dependent Claim
22 words
The field effect device as defined by claim 16 wherein said field effect device is one of two complementary field effect devices.
Claim 20
Dependent Claim
19 words
The field effect device as defined by claim 1 wherein said gate contact comprises a plurality of quantum wires.
Claim 21
Dependent Claim
29 words
The field effect device as defined by claim 18 wherein said quantum wires comprise a layer of doped semiconductor material which has been etched to form said quantum wires.
Claim 22
Dependent Claim
20 words
The field effect device as defined by claim 19 wherein said layer of doped semiconductor material comprises a germanium-silicon alloy.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 1997-10-17 | 1998-04-18 | 1998-10-18 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-10-17 | 2002-04-18 | 2002-10-18 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-10-17 | 2006-04-18 | 2006-10-18 | $7700.00 | Window Closed / Lapsed |