US5348835A
Expired / Lapsed
US
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Photosensitive resin composition for forming polyimide film pattern comprising an o-quinone diazide photosensitive agent
Assignee: Toshiba Corp
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Filing: 1991-09-27
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Granted: 1994-09-20
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Expires: 2011-09-27
Abstract
Abstract Disclosed is a photosensitive resin composition, containing a polyamic acid derivative having a repeating unit represented by general formula (1) given below and a photosensitive agent: ##STR1## where, R 1 represents a tetravalent organic group, R 2 represents a divalent organic group, and R 3 and R 4 represent a monovalent organic group, at least one of R 3 and R 4 being an organic group having at least on hydroxyl group bonded to an aromatic ring. A semiconductor substrate is coated with the photosensitive resin composition, followed by exposing the coated film to light through a patterning mask and subsequently applying a development and a heat treatment so as to form a polyimide film pattern. A baking treatment also be applied immediately after the exposure step. The photosensitive resin composition of the present invention performs the function of a positive or negative photoresist film and the function of a polyimide protective film on a semiconductor substrate.
Inventors
- 👤 Masayuki Oba
- 👤 Rumiko Hayase
- 👤 Naoko Kihara
- 👤 Shuzi Hayase
- 👤 Yukihiro Mikogami
- 👤 Yoshihiko Nakano
- 👤 Naohiko Oyasato
- 👤 Shigeru Matake
- 👤 Kei Takano
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 03:41
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/038; G03F7/0387; G03F7/022; G03F7/023; G03F7/0233
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
91 words
A photosensitive resin composition for forming a polyimide film pattern, comprising in admixture a polyamic acid derivative having a repeating unit represented by general formula (1), and a photosensitizing amount of an o-quinone diazide compound photosensitive agent: ##STR142## where, R 1 represents a tetravalent organic group, R 2 represents a divalent organic group, and R 3 and R 4 represent a monovalent organic group or hydroxyl group, at least one of R 3 and R 4 being an organic group having at least one hydroxyl group bonded to an aromatic ring.
Claim 2
Dependent Claim
91 words
A photosensitive resin composition for forming a polyimide film pattern, comprising in admixture a polyamic acid derivative having a repeating unit represented by general formula (1), and a photosensitizing amount of an o-quinone diazide compound photosensitive agent: ##STR142## where, R 1 represents a tetravalent organic group, R 2 represents a divalent organic group, and R 3 and R 4 represent a monovalent organic group or hydroxyl group, at least one of R 3 and R 4 being an organic group having at least one hydroxyl group bonded to an aromatic ring.
Claim 3
Dependent Claim
117 words
A photosensitive resin composition for forming a polyimide film pattern, comprising in admixture a polyamic acid derivative having a repeating unit represented by general formula (1), a polyamic acid having a repeating unit represented by general formula (2), and a photosensitizing amount of an o-quinone diazide compound photosensitive agent: ##STR143## where, R 1 represents a tetravalent organic group, R 2 represents a divalent organic group, R 3 and R 4 represent a monovalent organic group or hydroxyl group, at least one of R 3 and R 4 being an organic group having at least one hydroxyl group bonded to an aromatic ring, R 5 represents a tetravalent organic group, and R 6 represents a divalent organic group.
Claim 4
Dependent Claim
117 words
A photosensitive resin composition for forming a polyimide film pattern, comprising in admixture a polyamic acid derivative having a repeating unit represented by general formula (1), a polyamic acid having a repeating unit represented by general formula (2), and a photosensitizing amount of an o-quinone diazide compound photosensitive agent: ##STR143## where, R 1 represents a tetravalent organic group, R 2 represents a divalent organic group, R 3 and R 4 represent a monovalent organic group or hydroxyl group, at least one of R 3 and R 4 being an organic group having at least one hydroxyl group bonded to an aromatic ring, R 5 represents a tetravalent organic group, and R 6 represents a divalent organic group.
Claim 5
Dependent Claim
118 words
A photosensitive resin composition for forming a polyimide film pattern, comprising in admixture a polyamic acid derivative having a copolymer structure including a repeating unit represented by general formula (1) and a repeating unit represented by general formula (2), and a photosensitizing amount of an o-quinone diazide compound photosensitive agent: ##STR144## where, R 1 represents a tetravalent organic group, R 2 represents a divalent organic group, R 3 and R 4 represent a monovalent organic group or hydroxyl group, at least one of R 3 and R 4 being an organic group having at least one hydroxyl group bonded to an aromatic ring, R 5 represents a tetravalent organic group, and R 6 represents a divalent organic group.
Claim 6
Dependent Claim
118 words
A photosensitive resin composition for forming a polyimide film pattern, comprising in admixture a polyamic acid derivative having a copolymer structure including a repeating unit represented by general formula (1) and a repeating unit represented by general formula (2), and a photosensitizing amount of an o-quinone diazide compound photosensitive agent: ##STR144## where, R 1 represents a tetravalent organic group, R 2 represents a divalent organic group, R 3 and R 4 represent a monovalent organic group or hydroxyl group, at least one of R 3 and R 4 being an organic group having at least one hydroxyl group bonded to an aromatic ring, R 5 represents a tetravalent organic group, and R 6 represents a divalent organic group.
Claim 7
Dependent Claim
53 words
The photosensitive resin composition for forming a polyimide film pattern according to claim 1, wherein said photosensitive agent is used in an amount of 0.1 to 30 parts by weight based on 100 parts by weight of the amount of said polyamic acid derivative having a repeating unit represented by general formula (1).
Claim 8
Dependent Claim
54 words
The photosensitive resin composition for forming a polyimide film pattern according to claim 2, wherein said polyamic acid derivative having a repeating unit represented by general formula (1) is used in an amount of 20 to 98 parts by weight based on 100 parts by weight of the amount of the total resin component.
Claim 9
Dependent Claim
69 words
The photosensitive resin composition for forming a polyimide film pattern according to claim 2, wherein said photosensitive agent is added in an amount of 5 to 50 parts by weight based on 100 parts by weight of the sum of the polyamic acid derivative having a repeating unit represented by general formula (1), the polyamic acid having a repeating unit represented by general formula (2), and the photosensitive agent.
Claim 10
Dependent Claim
58 words
The photosensitive resin composition for forming a polyimide film pattern according to claim 3, wherein said photosensitive agent is used in an amount of 0.1 to 30 parts by weight based on 100 parts by weight of the amount of the polyamic acid derivative having a copolymer structure including repeating units represented by general formulas (1) and (2).
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-09-19 | 1998-03-21 | 1998-09-20 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-09-19 | 2002-03-21 | 2002-09-20 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-09-19 | 2006-03-21 | 2006-09-20 | $7700.00 | Window Closed / Lapsed |